JPS62152437U - - Google Patents
Info
- Publication number
- JPS62152437U JPS62152437U JP3909986U JP3909986U JPS62152437U JP S62152437 U JPS62152437 U JP S62152437U JP 3909986 U JP3909986 U JP 3909986U JP 3909986 U JP3909986 U JP 3909986U JP S62152437 U JPS62152437 U JP S62152437U
- Authority
- JP
- Japan
- Prior art keywords
- lower electrode
- heating device
- post
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000001312 dry etching Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000012805 post-processing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
図は本考案の一実施例を示す縦断面図である。
１……エツチング室、２……上電極、３……下
電極、４……加熱装置、５……ＲＦ電源。
電極、４……加熱装置、５……ＲＦ電源。
Claims (1)
- エツチング室と上電極と下電極より成るドライ
エツチング装置において、下電極に後処理用の加
熱装置を設けたことを特徴とする半導体製造装置
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3909986U JPS62152437U (ja) | 1986-03-19 | 1986-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3909986U JPS62152437U (ja) | 1986-03-19 | 1986-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62152437U true JPS62152437U (ja) | 1987-09-28 |
Family
ID=30851959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3909986U Pending JPS62152437U (ja) | 1986-03-19 | 1986-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62152437U (ja) |
-
1986
- 1986-03-19 JP JP3909986U patent/JPS62152437U/ja active Pending