JPS62197846U - - Google Patents
Info
- Publication number
- JPS62197846U JPS62197846U JP8670586U JP8670586U JPS62197846U JP S62197846 U JPS62197846 U JP S62197846U JP 8670586 U JP8670586 U JP 8670586U JP 8670586 U JP8670586 U JP 8670586U JP S62197846 U JPS62197846 U JP S62197846U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- chamber
- plasma
- load lock
- communicates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Waveguide Connection Structure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8670586U JPS62197846U (es) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8670586U JPS62197846U (es) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197846U true JPS62197846U (es) | 1987-12-16 |
Family
ID=30943259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8670586U Pending JPS62197846U (es) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197846U (es) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6153719A (ja) * | 1984-08-24 | 1986-03-17 | Nippon Telegr & Teleph Corp <Ntt> | 半導体結晶性膜製造装置 |
-
1986
- 1986-06-06 JP JP8670586U patent/JPS62197846U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6153719A (ja) * | 1984-08-24 | 1986-03-17 | Nippon Telegr & Teleph Corp <Ntt> | 半導体結晶性膜製造装置 |