JPS6219683B2 - - Google Patents
Info
- Publication number
- JPS6219683B2 JPS6219683B2 JP13685479A JP13685479A JPS6219683B2 JP S6219683 B2 JPS6219683 B2 JP S6219683B2 JP 13685479 A JP13685479 A JP 13685479A JP 13685479 A JP13685479 A JP 13685479A JP S6219683 B2 JPS6219683 B2 JP S6219683B2
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- film
- fiber
- dielectric film
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000835 fiber Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 32
- 239000010409 thin film Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 238000002161 passivation Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13685479A JPS5660310A (en) | 1979-10-23 | 1979-10-23 | Film thickness control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13685479A JPS5660310A (en) | 1979-10-23 | 1979-10-23 | Film thickness control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5660310A JPS5660310A (en) | 1981-05-25 |
| JPS6219683B2 true JPS6219683B2 (Direct) | 1987-04-30 |
Family
ID=15185051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13685479A Granted JPS5660310A (en) | 1979-10-23 | 1979-10-23 | Film thickness control device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5660310A (Direct) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2779741B2 (ja) * | 1992-09-11 | 1998-07-23 | 新日本製鐵株式会社 | 被膜形成のための条件決定方法 |
-
1979
- 1979-10-23 JP JP13685479A patent/JPS5660310A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5660310A (en) | 1981-05-25 |
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