JPS62196341U - - Google Patents
Info
- Publication number
- JPS62196341U JPS62196341U JP8411786U JP8411786U JPS62196341U JP S62196341 U JPS62196341 U JP S62196341U JP 8411786 U JP8411786 U JP 8411786U JP 8411786 U JP8411786 U JP 8411786U JP S62196341 U JPS62196341 U JP S62196341U
- Authority
- JP
- Japan
- Prior art keywords
- base
- support
- support table
- negative pressure
- table according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8411786U JPS62196341U ( ) | 1986-06-04 | 1986-06-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8411786U JPS62196341U ( ) | 1986-06-04 | 1986-06-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62196341U true JPS62196341U ( ) | 1987-12-14 |
Family
ID=30938325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8411786U Pending JPS62196341U ( ) | 1986-06-04 | 1986-06-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62196341U ( ) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01244637A (ja) * | 1988-03-25 | 1989-09-29 | Bando Chem Ind Ltd | 半導体ウエハー固定用マウントテーブル及び半導体ウエハーのダイシング方法 |
-
1986
- 1986-06-04 JP JP8411786U patent/JPS62196341U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01244637A (ja) * | 1988-03-25 | 1989-09-29 | Bando Chem Ind Ltd | 半導体ウエハー固定用マウントテーブル及び半導体ウエハーのダイシング方法 |