JPS62195446U - - Google Patents
Info
- Publication number
- JPS62195446U JPS62195446U JP1986083974U JP8397486U JPS62195446U JP S62195446 U JPS62195446 U JP S62195446U JP 1986083974 U JP1986083974 U JP 1986083974U JP 8397486 U JP8397486 U JP 8397486U JP S62195446 U JPS62195446 U JP S62195446U
- Authority
- JP
- Japan
- Prior art keywords
- gears
- surface plates
- surface plate
- plates
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009434 installation Methods 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986083974U JPH0448925Y2 (US08066781-20111129-C00013.png) | 1986-06-02 | 1986-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986083974U JPH0448925Y2 (US08066781-20111129-C00013.png) | 1986-06-02 | 1986-06-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62195446U true JPS62195446U (US08066781-20111129-C00013.png) | 1987-12-12 |
| JPH0448925Y2 JPH0448925Y2 (US08066781-20111129-C00013.png) | 1992-11-18 |
Family
ID=30938056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986083974U Expired JPH0448925Y2 (US08066781-20111129-C00013.png) | 1986-06-02 | 1986-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448925Y2 (US08066781-20111129-C00013.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013051184A1 (ja) * | 2011-10-04 | 2013-04-11 | 信越半導体株式会社 | ウェーハの加工方法 |
| JP2016097450A (ja) * | 2014-11-18 | 2016-05-30 | 信越半導体株式会社 | ワークの加工装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5554173A (en) * | 1978-10-06 | 1980-04-21 | Ulvac Corp | Safety device for polisher |
| JPS5776406A (en) * | 1980-10-30 | 1982-05-13 | Supiide Fuamu Kk | Displacement detector in both side lapping plate |
-
1986
- 1986-06-02 JP JP1986083974U patent/JPH0448925Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5554173A (en) * | 1978-10-06 | 1980-04-21 | Ulvac Corp | Safety device for polisher |
| JPS5776406A (en) * | 1980-10-30 | 1982-05-13 | Supiide Fuamu Kk | Displacement detector in both side lapping plate |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013051184A1 (ja) * | 2011-10-04 | 2013-04-11 | 信越半導体株式会社 | ウェーハの加工方法 |
| JP2013078826A (ja) * | 2011-10-04 | 2013-05-02 | Shin Etsu Handotai Co Ltd | ウェーハの加工方法 |
| US9490180B2 (en) | 2011-10-04 | 2016-11-08 | Shin-Etsu Handotai Co., Ltd. | Method for processing wafer |
| JP2016097450A (ja) * | 2014-11-18 | 2016-05-30 | 信越半導体株式会社 | ワークの加工装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0448925Y2 (US08066781-20111129-C00013.png) | 1992-11-18 |
