JPS6219510B2 - - Google Patents

Info

Publication number
JPS6219510B2
JPS6219510B2 JP9250483A JP9250483A JPS6219510B2 JP S6219510 B2 JPS6219510 B2 JP S6219510B2 JP 9250483 A JP9250483 A JP 9250483A JP 9250483 A JP9250483 A JP 9250483A JP S6219510 B2 JPS6219510 B2 JP S6219510B2
Authority
JP
Japan
Prior art keywords
ions
fecl
organic solvent
hcl
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9250483A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59219471A (ja
Inventor
Morio Watanabe
Yamaji Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NISHIMURA WATANABE CHUSHUTSU KENKYUSHO KK
Original Assignee
NISHIMURA WATANABE CHUSHUTSU KENKYUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NISHIMURA WATANABE CHUSHUTSU KENKYUSHO KK filed Critical NISHIMURA WATANABE CHUSHUTSU KENKYUSHO KK
Priority to JP9250483A priority Critical patent/JPS59219471A/ja
Publication of JPS59219471A publication Critical patent/JPS59219471A/ja
Publication of JPS6219510B2 publication Critical patent/JPS6219510B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/46Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP9250483A 1983-05-27 1983-05-27 エツチング液の回収方法 Granted JPS59219471A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9250483A JPS59219471A (ja) 1983-05-27 1983-05-27 エツチング液の回収方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9250483A JPS59219471A (ja) 1983-05-27 1983-05-27 エツチング液の回収方法

Publications (2)

Publication Number Publication Date
JPS59219471A JPS59219471A (ja) 1984-12-10
JPS6219510B2 true JPS6219510B2 (enrdf_load_stackoverflow) 1987-04-28

Family

ID=14056135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9250483A Granted JPS59219471A (ja) 1983-05-27 1983-05-27 エツチング液の回収方法

Country Status (1)

Country Link
JP (1) JPS59219471A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO300004B1 (no) * 1994-03-30 1997-03-17 Elkem Materials Fremgangsmåte for gjenvinning av metallklorid fra silisium eller ferrosilisiumlegering som er blitt reagert med kloreringsmidler
WO2006028303A1 (en) * 2004-09-08 2006-03-16 Sam Do Chemical Co., Ltd Method for recovery of nikel and regeneration of etching solution from a spent fecl3 etching solution

Also Published As

Publication number Publication date
JPS59219471A (ja) 1984-12-10

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