JPS62193724U - - Google Patents
Info
- Publication number
- JPS62193724U JPS62193724U JP8105486U JP8105486U JPS62193724U JP S62193724 U JPS62193724 U JP S62193724U JP 8105486 U JP8105486 U JP 8105486U JP 8105486 U JP8105486 U JP 8105486U JP S62193724 U JPS62193724 U JP S62193724U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- storage recesses
- tray
- same direction
- respective corners
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 238000005530 etching Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は平面図、第３図は第２図―線断面図、第
４図はエツチング装置の断面図、第５図は基板ト
レイの従来例を示す斜視図である。
８，８Ａ，８Ｂ……被処理基板、２０……基板
トレイ、２１Ａ〜２１Ｄ……エプロン部、２１Ｅ
……基板保持部、２３，２４……基板収納凹部、
２６……基板取出部。
Fig. 1 is a perspective view showing one embodiment of the present invention;
3 is a sectional view taken along the line of FIG. 2, FIG. 4 is a sectional view of the etching apparatus, and FIG. 5 is a perspective view showing a conventional example of a substrate tray. 8, 8A, 8B...Substrate to be processed, 20...Substrate tray, 21A to 21D...Apron section, 21E
...Substrate holding part, 23, 24...Substrate storage recess,
26... Board removal part.
Claims (1)
の基板トレイの表面にそれぞれ方形で相似形をな
す複数の基板収納凹部を階段状に設けると共にこ
れらの基板収納凹部の同一方向の角部毎に対角線
方向に延在する基板取出部をそれぞれ設けて前記
同一方向の各角部を互いに連通させてなり、前記
基板取出部はその幅が前記各角部に対応する部分
において狭く、隣り合う角部間において広くなる
ように形成されていることを特徴とする基板トレ
イ。 In a substrate tray that holds a substrate to be processed, a plurality of rectangular and similar substrate storage recesses are provided in a stepped manner on the surface of the substrate tray, and a plurality of substrate storage recesses are provided in a diagonal direction at each corner in the same direction of these substrate storage recesses. Extending substrate ejection portions are provided to allow the respective corners in the same direction to communicate with each other, and the width of the substrate ejection portions is narrow in portions corresponding to the respective corners and wide between adjacent corners. A substrate tray characterized in that it is formed so as to be.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8105486U JPS62193724U (en) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8105486U JPS62193724U (en) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193724U true JPS62193724U (en) | 1987-12-09 |
Family
ID=30932436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8105486U Pending JPS62193724U (en) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193724U (en) |
-
1986
- 1986-05-30 JP JP8105486U patent/JPS62193724U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62193724U (en) | ||
| JPS62163949U (en) | ||
| JPS62200586U (en) | ||
| JPH0210275U (en) | ||
| JPS59184093U (en) | drying container | |
| JPS6430825U (en) | ||
| JPS6018931U (en) | Palette structure | |
| JPS6295531U (en) | ||
| JPS6289145U (en) | ||
| JPS6426273U (en) | ||
| JPS61199112U (en) | ||
| JPS62178508U (en) | ||
| JPS5873749U (en) | Container partition frame | |
| JPS6165115U (en) | ||
| JPS6235422U (en) | ||
| JPH0320639U (en) | ||
| JPS6418733U (en) | ||
| JPS6359920U (en) | ||
| JPS6368116U (en) | ||
| JPH0294172U (en) | ||
| JPS62202868U (en) | ||
| JPS6148489U (en) | ||
| JPS6299509U (en) | ||
| JPH01154243U (en) | ||
| JPH01151514U (en) |