JPS62193656U - - Google Patents

Info

Publication number
JPS62193656U
JPS62193656U JP8097086U JP8097086U JPS62193656U JP S62193656 U JPS62193656 U JP S62193656U JP 8097086 U JP8097086 U JP 8097086U JP 8097086 U JP8097086 U JP 8097086U JP S62193656 U JPS62193656 U JP S62193656U
Authority
JP
Japan
Prior art keywords
filament
ion source
cathode
vacuum container
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8097086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8097086U priority Critical patent/JPS62193656U/ja
Publication of JPS62193656U publication Critical patent/JPS62193656U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP8097086U 1986-05-30 1986-05-30 Pending JPS62193656U (un)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8097086U JPS62193656U (un) 1986-05-30 1986-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8097086U JPS62193656U (un) 1986-05-30 1986-05-30

Publications (1)

Publication Number Publication Date
JPS62193656U true JPS62193656U (un) 1987-12-09

Family

ID=30932271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8097086U Pending JPS62193656U (un) 1986-05-30 1986-05-30

Country Status (1)

Country Link
JP (1) JPS62193656U (un)

Similar Documents

Publication Publication Date Title
JPS62193656U (un)
JP2569913Y2 (ja) イオン注入装置
JPH0472548U (un)
JPH0298451U (un)
JPH0229149U (un)
JPH02110166U (un)
JPS5719941A (en) Negative ion source
JPS6370651U (un)
JPH02123051U (un)
JPH0394753U (un)
JPS594428Y2 (ja) イオン源装置先端イオン発生部の真空封止機構
JPS62182970U (un)
JPS6251648U (un)
JPH0295148U (un)
JPS63112745U (un)
JPH0332348U (un)
JPS62170729U (un)
JPH0333946U (un)
JPS6346465U (un)
JPS62160454U (un)
JPH03109258U (un)
JPS62203265U (un)
JPH034456U (un)
JPS6328243U (un)
JPH0449447U (un)