JPS62193656U - - Google Patents
Info
- Publication number
- JPS62193656U JPS62193656U JP8097086U JP8097086U JPS62193656U JP S62193656 U JPS62193656 U JP S62193656U JP 8097086 U JP8097086 U JP 8097086U JP 8097086 U JP8097086 U JP 8097086U JP S62193656 U JPS62193656 U JP S62193656U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- ion source
- cathode
- vacuum container
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010891 electric arc Methods 0.000 claims description 2
- 230000001629 suppression Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8097086U JPS62193656U (un) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8097086U JPS62193656U (un) | 1986-05-30 | 1986-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62193656U true JPS62193656U (un) | 1987-12-09 |
Family
ID=30932271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8097086U Pending JPS62193656U (un) | 1986-05-30 | 1986-05-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62193656U (un) |
-
1986
- 1986-05-30 JP JP8097086U patent/JPS62193656U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS62193656U (un) | ||
JP2569913Y2 (ja) | イオン注入装置 | |
JPH0472548U (un) | ||
JPH0298451U (un) | ||
JPH0229149U (un) | ||
JPH02110166U (un) | ||
JPS5719941A (en) | Negative ion source | |
JPS6370651U (un) | ||
JPH02123051U (un) | ||
JPH0394753U (un) | ||
JPS594428Y2 (ja) | イオン源装置先端イオン発生部の真空封止機構 | |
JPS62182970U (un) | ||
JPS6251648U (un) | ||
JPH0295148U (un) | ||
JPS63112745U (un) | ||
JPH0332348U (un) | ||
JPS62170729U (un) | ||
JPH0333946U (un) | ||
JPS6346465U (un) | ||
JPS62160454U (un) | ||
JPH03109258U (un) | ||
JPS62203265U (un) | ||
JPH034456U (un) | ||
JPS6328243U (un) | ||
JPH0449447U (un) |