JPS62192645U - - Google Patents
Info
- Publication number
- JPS62192645U JPS62192645U JP8147886U JP8147886U JPS62192645U JP S62192645 U JPS62192645 U JP S62192645U JP 8147886 U JP8147886 U JP 8147886U JP 8147886 U JP8147886 U JP 8147886U JP S62192645 U JPS62192645 U JP S62192645U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- rollers
- wafer
- oriented flat
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8147886U JPS62192645U (ro) | 1986-05-28 | 1986-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8147886U JPS62192645U (ro) | 1986-05-28 | 1986-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192645U true JPS62192645U (ro) | 1987-12-08 |
Family
ID=30933254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8147886U Pending JPS62192645U (ro) | 1986-05-28 | 1986-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192645U (ro) |
-
1986
- 1986-05-28 JP JP8147886U patent/JPS62192645U/ja active Pending