JPS6437045U - - Google Patents
Info
- Publication number
- JPS6437045U JPS6437045U JP13162987U JP13162987U JPS6437045U JP S6437045 U JPS6437045 U JP S6437045U JP 13162987 U JP13162987 U JP 13162987U JP 13162987 U JP13162987 U JP 13162987U JP S6437045 U JPS6437045 U JP S6437045U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- arm
- rollers
- protrusion
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Feeding Of Workpieces (AREA)
- Warehouses Or Storage Devices (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13162987U JPS6437045U (ro) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13162987U JPS6437045U (ro) | 1987-08-31 | 1987-08-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6437045U true JPS6437045U (ro) | 1989-03-06 |
Family
ID=31387877
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13162987U Pending JPS6437045U (ro) | 1987-08-31 | 1987-08-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6437045U (ro) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01313953A (ja) * | 1988-04-25 | 1989-12-19 | Tegal Corp | ウェハー支持用のスパチュラ装置およびウェハーの配置方法 |
JP2003095435A (ja) * | 2001-09-27 | 2003-04-03 | Ebara Corp | 四辺形基板搬送ロボット |
JP2014083522A (ja) * | 2012-10-26 | 2014-05-12 | Disco Abrasive Syst Ltd | 洗浄装置と四角板状ワークの搬送方法 |
-
1987
- 1987-08-31 JP JP13162987U patent/JPS6437045U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01313953A (ja) * | 1988-04-25 | 1989-12-19 | Tegal Corp | ウェハー支持用のスパチュラ装置およびウェハーの配置方法 |
JP2003095435A (ja) * | 2001-09-27 | 2003-04-03 | Ebara Corp | 四辺形基板搬送ロボット |
JP2014083522A (ja) * | 2012-10-26 | 2014-05-12 | Disco Abrasive Syst Ltd | 洗浄装置と四角板状ワークの搬送方法 |