JPS62192635U - - Google Patents
Info
- Publication number
- JPS62192635U JPS62192635U JP8044186U JP8044186U JPS62192635U JP S62192635 U JPS62192635 U JP S62192635U JP 8044186 U JP8044186 U JP 8044186U JP 8044186 U JP8044186 U JP 8044186U JP S62192635 U JPS62192635 U JP S62192635U
- Authority
- JP
- Japan
- Prior art keywords
- output shaft
- electric motor
- wafer chuck
- processing apparatus
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8044186U JPS62192635U (un) | 1986-05-28 | 1986-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8044186U JPS62192635U (un) | 1986-05-28 | 1986-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192635U true JPS62192635U (un) | 1987-12-08 |
Family
ID=30931248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8044186U Pending JPS62192635U (un) | 1986-05-28 | 1986-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192635U (un) |
-
1986
- 1986-05-28 JP JP8044186U patent/JPS62192635U/ja active Pending