JPS62152348U - - Google Patents
Info
- Publication number
- JPS62152348U JPS62152348U JP4104186U JP4104186U JPS62152348U JP S62152348 U JPS62152348 U JP S62152348U JP 4104186 U JP4104186 U JP 4104186U JP 4104186 U JP4104186 U JP 4104186U JP S62152348 U JPS62152348 U JP S62152348U
- Authority
- JP
- Japan
- Prior art keywords
- rotating disk
- contactor
- ion implantation
- semiconductor wafer
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4104186U JPS62152348U (un) | 1986-03-20 | 1986-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4104186U JPS62152348U (un) | 1986-03-20 | 1986-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62152348U true JPS62152348U (un) | 1987-09-26 |
Family
ID=30855671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4104186U Pending JPS62152348U (un) | 1986-03-20 | 1986-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62152348U (un) |
-
1986
- 1986-03-20 JP JP4104186U patent/JPS62152348U/ja active Pending