JPS625638U - - Google Patents
Info
- Publication number
- JPS625638U JPS625638U JP9788285U JP9788285U JPS625638U JP S625638 U JPS625638 U JP S625638U JP 9788285 U JP9788285 U JP 9788285U JP 9788285 U JP9788285 U JP 9788285U JP S625638 U JPS625638 U JP S625638U
- Authority
- JP
- Japan
- Prior art keywords
- processing table
- sheathed heater
- semiconductor manufacturing
- heating apparatus
- electric motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000012212 insulator Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9788285U JPS625638U (un) | 1985-06-27 | 1985-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9788285U JPS625638U (un) | 1985-06-27 | 1985-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS625638U true JPS625638U (un) | 1987-01-14 |
Family
ID=30965292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9788285U Pending JPS625638U (un) | 1985-06-27 | 1985-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS625638U (un) |
-
1985
- 1985-06-27 JP JP9788285U patent/JPS625638U/ja active Pending