JPS62191100U - - Google Patents
Info
- Publication number
- JPS62191100U JPS62191100U JP7795186U JP7795186U JPS62191100U JP S62191100 U JPS62191100 U JP S62191100U JP 7795186 U JP7795186 U JP 7795186U JP 7795186 U JP7795186 U JP 7795186U JP S62191100 U JPS62191100 U JP S62191100U
- Authority
- JP
- Japan
- Prior art keywords
- hollow cathode
- hole diameter
- evacuated chamber
- plasma
- discharge type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Plasma Technology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7795186U JPS62191100U (un) | 1986-05-23 | 1986-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7795186U JPS62191100U (un) | 1986-05-23 | 1986-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62191100U true JPS62191100U (un) | 1987-12-04 |
Family
ID=30926443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7795186U Pending JPS62191100U (un) | 1986-05-23 | 1986-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62191100U (un) |
-
1986
- 1986-05-23 JP JP7795186U patent/JPS62191100U/ja active Pending
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