JPS62190722A - 半導体ウエハ−の電気メツキ用電圧モニタ− - Google Patents

半導体ウエハ−の電気メツキ用電圧モニタ−

Info

Publication number
JPS62190722A
JPS62190722A JP3341186A JP3341186A JPS62190722A JP S62190722 A JPS62190722 A JP S62190722A JP 3341186 A JP3341186 A JP 3341186A JP 3341186 A JP3341186 A JP 3341186A JP S62190722 A JPS62190722 A JP S62190722A
Authority
JP
Japan
Prior art keywords
value
circuit
voltage
difference
vmin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3341186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0556857B2 (enExample
Inventor
Motoki Ito
伊藤　基樹
Masakazu Terada
雅一 寺田
Yukihisa Sasaki
佐々木　恭久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP3341186A priority Critical patent/JPS62190722A/ja
Publication of JPS62190722A publication Critical patent/JPS62190722A/ja
Publication of JPH0556857B2 publication Critical patent/JPH0556857B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
JP3341186A 1986-02-17 1986-02-17 半導体ウエハ−の電気メツキ用電圧モニタ− Granted JPS62190722A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3341186A JPS62190722A (ja) 1986-02-17 1986-02-17 半導体ウエハ−の電気メツキ用電圧モニタ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3341186A JPS62190722A (ja) 1986-02-17 1986-02-17 半導体ウエハ−の電気メツキ用電圧モニタ−

Publications (2)

Publication Number Publication Date
JPS62190722A true JPS62190722A (ja) 1987-08-20
JPH0556857B2 JPH0556857B2 (enExample) 1993-08-20

Family

ID=12385846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3341186A Granted JPS62190722A (ja) 1986-02-17 1986-02-17 半導体ウエハ−の電気メツキ用電圧モニタ−

Country Status (1)

Country Link
JP (1) JPS62190722A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003095715A1 (en) * 2002-05-07 2003-11-20 University Of Southern California Methods and apparatus for monitoring deposition quality during conformable contact mask plasting operations
JP2007270313A (ja) * 2006-03-31 2007-10-18 Furukawa Electric Co Ltd:The 電気めっき装置
US11211228B1 (en) 2003-05-07 2021-12-28 Microfabrica Inc. Neutral radical etching of dielectric sacrificial material from reentrant multi-layer metal structures

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003095715A1 (en) * 2002-05-07 2003-11-20 University Of Southern California Methods and apparatus for monitoring deposition quality during conformable contact mask plasting operations
US11211228B1 (en) 2003-05-07 2021-12-28 Microfabrica Inc. Neutral radical etching of dielectric sacrificial material from reentrant multi-layer metal structures
JP2007270313A (ja) * 2006-03-31 2007-10-18 Furukawa Electric Co Ltd:The 電気めっき装置

Also Published As

Publication number Publication date
JPH0556857B2 (enExample) 1993-08-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term