JPS62190170U - - Google Patents

Info

Publication number
JPS62190170U
JPS62190170U JP7871986U JP7871986U JPS62190170U JP S62190170 U JPS62190170 U JP S62190170U JP 7871986 U JP7871986 U JP 7871986U JP 7871986 U JP7871986 U JP 7871986U JP S62190170 U JPS62190170 U JP S62190170U
Authority
JP
Japan
Prior art keywords
partition plate
housing
opening
vacuum
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7871986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7871986U priority Critical patent/JPS62190170U/ja
Publication of JPS62190170U publication Critical patent/JPS62190170U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
JP7871986U 1986-05-23 1986-05-23 Pending JPS62190170U (US07816562-20101019-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7871986U JPS62190170U (US07816562-20101019-C00012.png) 1986-05-23 1986-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7871986U JPS62190170U (US07816562-20101019-C00012.png) 1986-05-23 1986-05-23

Publications (1)

Publication Number Publication Date
JPS62190170U true JPS62190170U (US07816562-20101019-C00012.png) 1987-12-03

Family

ID=30927918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7871986U Pending JPS62190170U (US07816562-20101019-C00012.png) 1986-05-23 1986-05-23

Country Status (1)

Country Link
JP (1) JPS62190170U (US07816562-20101019-C00012.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002540612A (ja) * 1999-03-29 2002-11-26 ラム リサーチ コーポレーション デュアル側面スロットバルブおよび同バルブを実施するための方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002540612A (ja) * 1999-03-29 2002-11-26 ラム リサーチ コーポレーション デュアル側面スロットバルブおよび同バルブを実施するための方法

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