JPS62188346U - - Google Patents
Info
- Publication number
- JPS62188346U JPS62188346U JP7719886U JP7719886U JPS62188346U JP S62188346 U JPS62188346 U JP S62188346U JP 7719886 U JP7719886 U JP 7719886U JP 7719886 U JP7719886 U JP 7719886U JP S62188346 U JPS62188346 U JP S62188346U
- Authority
- JP
- Japan
- Prior art keywords
- slide table
- workpiece
- optical scale
- detection optical
- position detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 4
Landscapes
- Automatic Control Of Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7719886U JPS62188346U (enExample) | 1986-05-22 | 1986-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7719886U JPS62188346U (enExample) | 1986-05-22 | 1986-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62188346U true JPS62188346U (enExample) | 1987-11-30 |
Family
ID=30924982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7719886U Pending JPS62188346U (enExample) | 1986-05-22 | 1986-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188346U (enExample) |
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1986
- 1986-05-22 JP JP7719886U patent/JPS62188346U/ja active Pending