JPS62188135U - - Google Patents

Info

Publication number
JPS62188135U
JPS62188135U JP7640086U JP7640086U JPS62188135U JP S62188135 U JPS62188135 U JP S62188135U JP 7640086 U JP7640086 U JP 7640086U JP 7640086 U JP7640086 U JP 7640086U JP S62188135 U JPS62188135 U JP S62188135U
Authority
JP
Japan
Prior art keywords
door flange
rings
door
quartz
quartz tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7640086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530355Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7640086U priority Critical patent/JPH0530355Y2/ja
Publication of JPS62188135U publication Critical patent/JPS62188135U/ja
Application granted granted Critical
Publication of JPH0530355Y2 publication Critical patent/JPH0530355Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP7640086U 1986-05-21 1986-05-21 Expired - Lifetime JPH0530355Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7640086U JPH0530355Y2 (enrdf_load_stackoverflow) 1986-05-21 1986-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7640086U JPH0530355Y2 (enrdf_load_stackoverflow) 1986-05-21 1986-05-21

Publications (2)

Publication Number Publication Date
JPS62188135U true JPS62188135U (enrdf_load_stackoverflow) 1987-11-30
JPH0530355Y2 JPH0530355Y2 (enrdf_load_stackoverflow) 1993-08-03

Family

ID=30923441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7640086U Expired - Lifetime JPH0530355Y2 (enrdf_load_stackoverflow) 1986-05-21 1986-05-21

Country Status (1)

Country Link
JP (1) JPH0530355Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023127054A1 (ja) * 2021-12-27 2023-07-06 株式会社Kokusai Electric 漏洩検知装置、半導体装置の製造方法、基板処理方法およびプログラム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023127054A1 (ja) * 2021-12-27 2023-07-06 株式会社Kokusai Electric 漏洩検知装置、半導体装置の製造方法、基板処理方法およびプログラム
TWI853321B (zh) * 2021-12-27 2024-08-21 日商國際電氣股份有限公司 洩漏檢測裝置，半導體裝置的製造方法，基板處理方法及程式

Also Published As

Publication number Publication date
JPH0530355Y2 (enrdf_load_stackoverflow) 1993-08-03

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