JPS62188051U - - Google Patents

Info

Publication number
JPS62188051U
JPS62188051U JP7534286U JP7534286U JPS62188051U JP S62188051 U JPS62188051 U JP S62188051U JP 7534286 U JP7534286 U JP 7534286U JP 7534286 U JP7534286 U JP 7534286U JP S62188051 U JPS62188051 U JP S62188051U
Authority
JP
Japan
Prior art keywords
casing
plasma generation
generation chamber
movable
displaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7534286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7534286U priority Critical patent/JPS62188051U/ja
Publication of JPS62188051U publication Critical patent/JPS62188051U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP7534286U 1986-05-21 1986-05-21 Pending JPS62188051U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7534286U JPS62188051U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-21 1986-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7534286U JPS62188051U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-21 1986-05-21

Publications (1)

Publication Number Publication Date
JPS62188051U true JPS62188051U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-30

Family

ID=30921393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7534286U Pending JPS62188051U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-21 1986-05-21

Country Status (1)

Country Link
JP (1) JPS62188051U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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