JPS62188049U - - Google Patents

Info

Publication number
JPS62188049U
JPS62188049U JP7534086U JP7534086U JPS62188049U JP S62188049 U JPS62188049 U JP S62188049U JP 7534086 U JP7534086 U JP 7534086U JP 7534086 U JP7534086 U JP 7534086U JP S62188049 U JPS62188049 U JP S62188049U
Authority
JP
Japan
Prior art keywords
cylinder
filament
plasma generation
utility
generation chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7534086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7534086U priority Critical patent/JPS62188049U/ja
Publication of JPS62188049U publication Critical patent/JPS62188049U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP7534086U 1986-05-21 1986-05-21 Pending JPS62188049U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7534086U JPS62188049U (enrdf_load_stackoverflow) 1986-05-21 1986-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7534086U JPS62188049U (enrdf_load_stackoverflow) 1986-05-21 1986-05-21

Publications (1)

Publication Number Publication Date
JPS62188049U true JPS62188049U (enrdf_load_stackoverflow) 1987-11-30

Family

ID=30921389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7534086U Pending JPS62188049U (enrdf_load_stackoverflow) 1986-05-21 1986-05-21

Country Status (1)

Country Link
JP (1) JPS62188049U (enrdf_load_stackoverflow)

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