JPS6218791B2 - - Google Patents
Info
- Publication number
- JPS6218791B2 JPS6218791B2 JP58171645A JP17164583A JPS6218791B2 JP S6218791 B2 JPS6218791 B2 JP S6218791B2 JP 58171645 A JP58171645 A JP 58171645A JP 17164583 A JP17164583 A JP 17164583A JP S6218791 B2 JPS6218791 B2 JP S6218791B2
- Authority
- JP
- Japan
- Prior art keywords
- electrostrictive element
- valve
- electrostrictive
- valve seat
- combines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 13
- 238000005452 bending Methods 0.000 claims description 7
- 230000008602 contraction Effects 0.000 claims description 4
- 238000013459 approach Methods 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000037237 body shape Effects 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/025—Actuating devices; Operating means; Releasing devices electric; magnetic actuated by thermo-electric means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Magnetically Actuated Valves (AREA)
Description
【発明の詳細な説明】
この発明は、電歪素子を用いた弁装置に関し、
一層詳細には、所定電圧下に伸縮する電歪素子と
湾曲する電歪素子を組み合わせることにより流体
の制御を行うように構成した弁装置に関する。[Detailed Description of the Invention] The present invention relates to a valve device using an electrostrictive element,
More specifically, the present invention relates to a valve device configured to control fluid by combining an electrostrictive element that expands and contracts under a predetermined voltage and an electrostrictive element that bends.
流体の通路を切り換えることによりアクチユエ
ータの付勢・滅勢をはかる弁装置として電磁弁が
広汎に普及している。ところで、この電磁弁は、
一般的にソレノイドを含むために小型化には限度
があるし、また、複数個の電磁弁を連設する電磁
弁マニホールドにした場合、前記のように小型化
に対する制約と共にソレノイドの付勢・滅勢時の
衝撃、音も無視できないほどに煩わしい。しか
も、ソレノイドの付勢・滅勢の際に消費される電
力は、相当大きくなる。さらにまた、空気等の流
体圧を利用するロボツトに電磁弁を付設してその
制御を行おうとする時、マイクロプロセツサ等を
組み込んで可及的に小型であろうとする要請に沿
わない不都合を露呈する。 2. Description of the Related Art Electromagnetic valves are widely used as valve devices that energize and deenergize actuators by switching fluid passages. By the way, this solenoid valve is
Generally, there is a limit to miniaturization because it includes a solenoid, and if a solenoid valve manifold is used in which multiple solenoid valves are installed in series, there are restrictions on miniaturization as described above, and the energization and deactivation of the solenoid. The shock and sound of the moment is so annoying that it cannot be ignored. Moreover, the power consumed when energizing and deactivating the solenoid becomes considerably large. Furthermore, when a solenoid valve is attached to a robot that uses fluid pressure such as air to control it, there is a problem that it does not meet the requirement of incorporating a microprocessor etc. and making it as small as possible. do.
そこで、本発明者等は、鋭意研究並びに工夫を
重ねた結果、電圧の印加極性によつて互いに伸縮
する板状の電歪素子を二枚張り合わせたバイモル
フ型電歪素子に着目し、このバイモルフ型電歪素
子と単に一方向に伸縮するに過ぎない電歪素子と
を組み合わせ、所定の電圧下に前記素子の伸縮並
びに湾曲作用により流体を制御する弁座の開成、
閉成を行うように構成すれば、小型化に適し、消
費電力の少ないしかも動作も安定した弁装置が得
られ前記の問題点が一掃できることが判つた。 Therefore, as a result of intensive research and efforts, the present inventors focused on a bimorph type electrostrictive element, which is made by laminating two plate-shaped electrostrictive elements that expand and contract with each other depending on the polarity of applied voltage. Opening a valve seat that combines an electrostrictive element and an electrostrictive element that merely expands and contracts in one direction, and controls fluid by the expansion, contraction and curving action of the element under a predetermined voltage;
It has been found that by configuring the valve to close, a valve device suitable for miniaturization, low power consumption, and stable operation can be obtained, and the above-mentioned problems can be eliminated.
従つて、本発明の目的は、小型化に適し、動作
が確実且つ静寂であり、しかも、製造コストも低
廉消費電力の少ない流体制御用の弁装置を提供す
るにある。 SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a valve device for fluid control that is suitable for downsizing, operates reliably and quietly, is inexpensive to manufacture, and consumes little power.
前記の目的を達成するために、本発明は、一方
向に伸縮可能な第１の電歪素子に前記伸縮方向に
対して直交する方向に湾曲する第２の電歪素子を
係止し、前記湾曲する第２電歪素子の湾曲方向に
弁座を配設し、前記第１電歪素子と第２電歪素子
とに所定の電圧を印加し、前記電歪素子により前
記弁座の開閉成動作を行うよう構成することを特
徴とする。 In order to achieve the above object, the present invention locks a second electrostrictive element that is curved in a direction perpendicular to the direction of expansion and contraction to a first electrostrictive element that can be expanded and contracted in one direction, and A valve seat is disposed in the bending direction of the second electrostrictive element, and a predetermined voltage is applied to the first electrostrictive element and the second electrostrictive element, and the valve seat is opened and closed by the electrostrictive element. It is characterized by being configured to perform an action.
次に、本発明に係る弁装置について好適な実施
例を挙げ、添付の図面を参照しながら以下詳細に
説明する。 Next, preferred embodiments of the valve device according to the present invention will be described in detail with reference to the accompanying drawings.
第１図および第２図において、参照符号１０
は、ハウジング内に配置される矩形状の基台を示
し、この基台１０の上部中央部に所定間隔離間し
て一対の矩形状の弁体１２，１４を対向配置す
る。弁体１２，１４の互いに対面する側面部１
６，１８の略中央部には、夫々、円錐台状に膨出
する弁座２０，２２を形成する。弁体１２には前
記弁座２０から第１図において水平方向に延在す
る流体導入孔２４を設け、一方、弁体１４には、
前記弁座２２から、同様に水平方向に延在する流
体排出孔２６が設けられる。 In FIGS. 1 and 2, reference numeral 10
1 shows a rectangular base disposed within a housing, and a pair of rectangular valve bodies 12 and 14 are disposed facing each other at a predetermined distance in the upper center of the base 10. Side portions 1 of the valve bodies 12 and 14 facing each other
Valve seats 20 and 22, which bulge out in the shape of a truncated cone, are formed at substantially central portions of the valves 6 and 18, respectively. The valve body 12 is provided with a fluid introduction hole 24 extending horizontally from the valve seat 20 in the horizontal direction in FIG.
From said valve seat 22 a fluid outlet hole 26 is provided which also extends horizontally.
次に、前記基台１０の側面部から一方向に伸縮
可能な一対の電歪素子２８，３０を延在させその
両端部に係止部材３２，３４を立設しておく。係
止部材３２，３４の互いに対抗する面部３６，３
８には垂直方向にヒンジを形成するＶ溝４０，４
２を刻設し、これらのＶ溝４０，４２に板状のバ
イモルフ型電歪素子４４を係止する。この場合、
バイモルフ型電歪素子４４は、少なくとも印加さ
れる電圧の極性によつて互いに反対に伸縮作用を
行う素子片４６ａ，４６ｂにより形成されるもの
である。 Next, a pair of electrostrictive elements 28 and 30 that can be expanded and contracted in one direction extend from the side surface of the base 10, and locking members 32 and 34 are provided upright at both ends thereof. Mutually opposing surface portions 36, 3 of the locking members 32, 34
8 has a V-groove 40, 4 that forms a hinge in the vertical direction.
2 are carved, and a plate-shaped bimorph type electrostrictive element 44 is locked in these V grooves 40 and 42. in this case,
The bimorph electrostrictive element 44 is formed by element pieces 46a and 46b that expand and contract in opposite directions depending on at least the polarity of the applied voltage.
なお、第２図において、参照符号４７は、前記
の各要素を気密に囲繞するハウジング、すなわ
ち、筐体であり、また、参照符号４８は、前記筐
体４７に形成された流体導出口である。 In FIG. 2, reference numeral 47 is a housing that airtightly surrounds each of the above-mentioned elements, that is, a casing, and reference numeral 48 is a fluid outlet formed in the casing 47. .
本発明に係る弁装置は、基本的には以上のよう
に構成されるものであり、次にその作用について
説明する。 The valve device according to the present invention is basically constructed as described above, and its operation will be explained next.
既に述べたように、バイモルフ型の電歪素子
は、印加される電圧Ｖの極性によつて互いに反対
方向に伸縮する板状の素子P1，P2を少なくとも二
枚重ね合わせて構成される。従つて、第３図にお
いて、所定の極性で電圧が印加されると素子P1
は、伸長し、一方、素子P2は、逆に収縮する。こ
の結果、図において下方に指向する湾曲状態が得
られる。一方、前記と反対の極性で電圧を印加す
ると、素子P1は収縮し、素子P2は、伸長し、これ
によつて前記と逆の湾曲状態が得られる。 As already mentioned, the bimorph type electrostrictive element is constructed by stacking at least two plate-shaped elements P 1 and P 2 that expand and contract in opposite directions depending on the polarity of the applied voltage V. Therefore, in FIG. 3, when a voltage is applied with a predetermined polarity, element P 1
expands, while element P 2 conversely contracts. This results in a downwardly oriented curved state in the figure. On the other hand, when a voltage with the opposite polarity is applied, element P 1 contracts and element P 2 expands, thereby obtaining the opposite curved state.
そこで、以上のような原理を基本として第１図
並びに第２図の装置の作用を説明すると次の通り
である。 The operation of the apparatus shown in FIGS. 1 and 2 will now be explained based on the above principle.
先ず、一方向に伸縮自在な電歪素子２８，３０
およびバイモルフ型電歪素子４４に何らの電圧を
印加しない状態において、電歪素子４４の長さを
Ｖ溝４０，４２間の長さＬよりも若干長く形成し
ておけば、電歪素子４４はその長さのために湾曲
し、素子４４の一側部は、弁座２０に圧接してそ
の開口部を閉塞する。 First, the electrostrictive elements 28 and 30 are expandable and contractible in one direction.
In a state where no voltage is applied to the bimorph type electrostrictive element 44, if the length of the electrostrictive element 44 is formed to be slightly longer than the length L between the V grooves 40 and 42, the electrostrictive element 44 can be Curved due to its length, one side of the element 44 presses against the valve seat 20 and closes its opening.
次に、電歪素子２８，３０に所定の極性で電圧
を印加すると、これらの電歪素子２８，３０は、
一方向にのみ伸長するために前記Ｖ溝４０，４２
間の距離Ｌは拡開し、これに伴つて電歪素子４４
は、略真直ぐになる。そこで、前記電歪素子２
８，３０への電圧の印加をそのまま保持すると共
に電圧素子４４の夫々の素子片４６ａ，４６ｂに
所定の極性の電圧を印加すれば、先に示した物性
によつて電歪素子片４６ａは伸長し、電歪素子片
４６ｂは逆に収縮する。このため、電歪素子４４
は、除々に弁座２０に近ずき遂にはこれを閉塞す
る。この時、電歪素子２８，３０に対する電圧の
印加を解除すれば、素子２８，３０は収縮し、こ
の収縮が弁座２０に近ずく電歪素子４４の湾曲作
用を好適に補助する。そして、電歪素子４４への
電圧の印加を解除しても電歪素子２８，３０の収
容によりＶ溝４０と４２との間は距離Ｌとなるた
めに電歪素子４４は湾曲したままとなり弁座２０
への閉塞作用はそのまま保持されることになる。 Next, when a voltage is applied to the electrostrictive elements 28 and 30 with a predetermined polarity, these electrostrictive elements 28 and 30
The V grooves 40, 42 extend only in one direction.
The distance L between the electrostrictive elements 44 and
becomes almost straight. Therefore, the electrostrictive element 2
If the voltage applied to the voltage elements 8 and 30 is maintained as it is, and a voltage of a predetermined polarity is applied to each of the element pieces 46a and 46b of the voltage element 44, the electrostrictive element piece 46a will expand due to the physical properties shown above. However, the electrostrictive element piece 46b contracts on the contrary. Therefore, the electrostrictive element 44
gradually approaches the valve seat 20 and finally closes it. At this time, if the voltage application to the electrostrictive elements 28 and 30 is released, the elements 28 and 30 contract, and this contraction suitably assists the bending action of the electrostrictive element 44 as it approaches the valve seat 20. Even when the voltage is removed from the electrostrictive element 44, the distance L remains between the V-grooves 40 and 42 due to the accommodation of the electrostrictive elements 28 and 30, so the electrostrictive element 44 remains curved and the valve remains bent. seat 20
The occlusion effect will be maintained as it is.
このようにして、印加される電圧の極性を変化
させることにより容易に弁の開閉作用を行うこと
ができる。なお、この場合、電歪素子２８，３０
と電歪素子４４への電圧の印加、除去は、同時的
に行われる得ることは勿論である。 In this way, the valve can be easily opened and closed by changing the polarity of the applied voltage. Note that in this case, the electrostrictive elements 28, 30
Of course, the application and removal of voltage to and from the electrostrictive element 44 can be performed simultaneously.
次に、第４図に本発明装置の別の実施例を示
す。 Next, FIG. 4 shows another embodiment of the apparatus of the present invention.
この実施例において、第１図並びに第２図と同
一の参照符号は、同一の構成要素を示すものであ
る。 In this embodiment, the same reference numerals as in FIG. 1 and FIG. 2 indicate the same components.
そこで、この実施例では、前記実施例のＶ溝を
刻設した係止部材３２，３４に代えて割溝５０，
５２を形成した係止部材５４，５６を電歪素子２
８，３０に係着した。従つて、電歪素子４４は、
この割溝５０，５２に螺入するボルト５８，５９
により係着されることになる。動作は、前記実施
例と同様である。 Therefore, in this embodiment, the split grooves 50,
The locking members 54 and 56 formed with 52 are connected to the electrostrictive element 2.
It was tied to 8.30. Therefore, the electrostrictive element 44 is
Bolts 58, 59 screwed into these grooves 50, 52
It will be anchored by. The operation is similar to the previous embodiment.
また、第５図および第６図にさらに別の実施例
を示す。 Furthermore, another embodiment is shown in FIGS. 5 and 6.
この実施例においても、第１図、第２図および
第４図に示す参照符号と同一の参照符号は、同一
の構成要素を示すものとする。 In this embodiment as well, the same reference numerals as those shown in FIGS. 1, 2, and 4 indicate the same components.
そこで、この実施例では、基台１０を矩形体状
よりも寧ろコ字状の基台６０に形成すると共にこ
の基台６０の中央空間部に一本の一方向のみ伸縮
可能な電歪素子６２を嵌着している。すなわち、
この実施例では、分離構成された二つの電歪素子
２８，３０に代えて一つの電歪素子６２にしたの
で電歪素子６２への電圧印加用の配線を減少でき
る利点がある。 Therefore, in this embodiment, the base 10 is formed into a U-shaped base 60 rather than a rectangular body shape, and an electrostrictive element 62 that can be expanded and contracted in only one direction is provided in the central space of the base 60. is fitted. That is,
In this embodiment, one electrostrictive element 62 is used instead of the two electrostrictive elements 28 and 30 which are configured separately, so there is an advantage that the wiring for applying voltage to the electrostrictive element 62 can be reduced.
本発明によれば、以上のように一方向のみに伸
縮する電歪素子と湾曲する電歪素子との組合せ構
造をもとに電圧の印加・除去により一対の弁座の
開成並びに閉成を可能にした。しかも、弁の切換
時のみ電圧の印加をするだけで開成・閉成状態は
電圧を除去後も保持され、従つて、エネルギーの
消費量も少なく、安定した、しかも小型化に適し
て動作時すこぶる静寂な弁装置を得ることができ
る。 According to the present invention, a pair of valve seats can be opened and closed by applying and removing voltage based on the combination structure of an electrostrictive element that expands and contracts in only one direction and an electrostrictive element that curves as described above. I made it. In addition, by applying voltage only when switching the valve, the open/closed state is maintained even after the voltage is removed, resulting in low energy consumption, stable operation, and is suitable for miniaturization. You can get a quiet valve system.
以上、本発明に係る電歪素子を用いた弁装置に
ついて好適な実施例を挙げて説明したが、本発明
は、この実施例に限定されるものではなく、本発
明の精神を逸脱しない範囲において種々の改変が
可能であることは勿論である。 Although the valve device using the electrostrictive element according to the present invention has been described above with reference to a preferred embodiment, the present invention is not limited to this embodiment, and the present invention can be applied within the scope of the spirit of the present invention. Of course, various modifications are possible.
図は、本発明に係るものであり、第１図は、一
方向に伸縮する一対の電歪素子と湾曲する電歪素
子との相関々係を示す弁装置の斜視説明図、第２
図は、第１図に示す弁本体が筐体内に配置された
状態の一部切断平面図、第３図は、湾曲する電歪
素子の動作原理図、第４図は、本発明の別の実施
例に係るものであつて、湾曲する電歪素子をボル
トで固定した状態の平面図、第５図は、本発明の
さらに別の実施例に係るものであつて、湾曲する
電歪素子と１本の一方向に伸縮する電歪素子との
組合せを示す斜視説明図、第６図は、第５図に示
す装置の平面図である。
１０…基台、１２，１４…弁体、１６，１８…
側部、２０，２２…弁座、２４…流体導入口、２
６…流体排出口、２８，３０…電歪素子、３２，
３４…係止部材、３６，３８…面部、４０，４２
…Ｖ溝、４４…電歪素子、４７…割溝、４８…流
体導出口、５０，５２…割溝、５４，５６…係止
部材、５８，５９…ボルト、６０…基台、６２…
電歪素子。
The figures relate to the present invention; FIG. 1 is a perspective explanatory view of a valve device showing the relationship between a pair of electrostrictive elements that expand and contract in one direction and an electrostrictive element that bends;
The figure is a partially cutaway plan view of the valve body shown in FIG. 1 arranged in the housing, FIG. 3 is a diagram of the operating principle of the bending electrostrictive element, and FIG. FIG. 5, which is a plan view of a bending electrostrictive element fixed with bolts, is a plan view of a bending electrostrictive element and a bending electrostrictive element according to another embodiment of the present invention. FIG. 6, a perspective explanatory view showing a combination with one electrostrictive element that expands and contracts in one direction, is a plan view of the device shown in FIG. 5. 10... Base, 12, 14... Valve body, 16, 18...
Side part, 20, 22...Valve seat, 24...Fluid inlet, 2
6...Fluid outlet, 28, 30...Electrostrictive element, 32,
34... Locking member, 36, 38... Surface portion, 40, 42
...V groove, 44...electrostrictive element, 47...divided groove, 48...fluid outlet, 50, 52...divided groove, 54, 56...locking member, 58, 59...bolt, 60...base, 62...
Electrostrictive element.
Claims (1)
縮方向に対して直交する方向に湾曲する第２の電
歪素子を係止し、前記湾曲する第２電歪素子の湾
曲方向に弁座を配設し、前記第１電歪素子と第２
電歪素子とに所定の電圧を印加し、前記第２電歪
素子により前記弁座の開閉成動作を行うよう構成
することを特徴とする電歪素子を組合せた弁装
置。 ２ 特許請求の範囲第１項記載の装置において、
弁座は、所定間隔離間した一対の流体導入用弁座
と流体排出用弁座とからなり、前記一対の弁座は
互いに対向配置され、第２電歪素子は、前記一対
の弁座の間に介装されてなる電歪素子を組合わせ
た弁装置。 ３ 特許請求の範囲第１項記載の装置において、
第１電歪素子は、弁座が形成される基台の両側部
から互いに反対方向に延在してなる電歪素子を組
合わせた弁装置。 ４ 特許請求の範囲第１項記載の装置において、
第１電歪素子は、コ字状に形成された基台の中部
空間部から延在する一本の素子からなる電歪素子
を組合わせた弁装置。 ５ 特許請求の範囲第１項記載の装置において、
第２電歪素子は、第１電歪素子の端部に配設され
たＶ溝を有する係止部材に支障されてなる電歪素
子を組合わせた弁装置。 ６ 特許請求の範囲第１項記載の装置において、
第２電歪素子は、第１電歪素子の端部に配設され
た割溝を有する係止部材に支承されてなる電歪素
子を組合わせた弁装置。[Scope of Claims] 1. A second electrostrictive element that is curved in a direction perpendicular to the direction of expansion and contraction is locked to a first electrostrictive element that can be expanded and contracted in one direction, and the second electrostrictive element that is curved is A valve seat is arranged in the bending direction of the element, and the first electrostrictive element and the second electrostrictive element are connected to each other.
1. A valve device combining an electrostrictive element, characterized in that a predetermined voltage is applied to the electrostrictive element, and the second electrostrictive element opens and closes the valve seat. 2. In the device according to claim 1,
The valve seat includes a pair of fluid introduction valve seats and a fluid discharge valve seat separated by a predetermined distance, the pair of valve seats are arranged to face each other, and the second electrostrictive element is arranged between the pair of valve seats. A valve device that combines an electrostrictive element interposed in a . 3. In the device according to claim 1,
The first electrostrictive element is a valve device that combines electrostrictive elements that extend in opposite directions from both sides of a base on which a valve seat is formed. 4. In the device according to claim 1,
The first electrostrictive element is a valve device that combines an electrostrictive element consisting of a single element extending from a central space of a U-shaped base. 5. In the device according to claim 1,
The second electrostrictive element is a valve device in which an electrostrictive element is combined with a locking member having a V-groove disposed at an end of the first electrostrictive element. 6. In the device according to claim 1,
The second electrostrictive element is a valve device that combines an electrostrictive element supported by a locking member having a groove provided at the end of the first electrostrictive element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17164583A JPS6065971A (en) | 1983-09-16 | 1983-09-16 | Valve device with electrostriction element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17164583A JPS6065971A (en) | 1983-09-16 | 1983-09-16 | Valve device with electrostriction element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6065971A JPS6065971A (en) | 1985-04-15 |
| JPS6218791B2 true JPS6218791B2 (en) | 1987-04-24 |
Family
ID=15927046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17164583A Granted JPS6065971A (en) | 1983-09-16 | 1983-09-16 | Valve device with electrostriction element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6065971A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6065688A (en) * | 1998-03-09 | 2000-05-23 | The United States Of America As Represented By The Secretary Of The Navy | Mass-flux actuator with high frequency response |
| GB9927572D0 (en) * | 1999-11-22 | 2000-01-19 | Pbt Ip Limited | Piezo ceramic bender and valve incorporating same |
| JP5066678B2 (en) * | 2007-03-22 | 2012-11-07 | 並木精密宝石株式会社 | Magnetostrictive gas valve |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5250010A (en) * | 1975-10-20 | 1977-04-21 | Nippon Denso Co Ltd | Fluid injection valve |
-
1983
- 1983-09-16 JP JP17164583A patent/JPS6065971A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5250010A (en) * | 1975-10-20 | 1977-04-21 | Nippon Denso Co Ltd | Fluid injection valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6065971A (en) | 1985-04-15 |
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