JPS62187214A - Micro-displacement detector - Google Patents

Micro-displacement detector

Info

Publication number
JPS62187214A
JPS62187214A JP2885786A JP2885786A JPS62187214A JP S62187214 A JPS62187214 A JP S62187214A JP 2885786 A JP2885786 A JP 2885786A JP 2885786 A JP2885786 A JP 2885786A JP S62187214 A JPS62187214 A JP S62187214A
Authority
JP
Japan
Prior art keywords
key top
light receiving
displacement
movable part
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2885786A
Other languages
Japanese (ja)
Inventor
Hiroyuki Nobesawa
延沢 広行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP2885786A priority Critical patent/JPS62187214A/en
Publication of JPS62187214A publication Critical patent/JPS62187214A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:To detect displacement of a movable part at a high speed stably with high accuracy by arranging a light emitting part at the central position in opposition to a swingable key top having a reflection mirror and providing plural light receiving parts around it. CONSTITUTION:When there is not displacement on the movable part K and the key top 3 is vertical with respect to an axis of a housing 1, laser light emitted in an axial direction from a micro-lens 6 through an optical fiber 7 is reflected in a reverse direction by the reflection mirror 4. As a result, the reflected light is not detected with any light receiving part 8 in this state and it is detected that the displacement is zero. On the other hand, when the movable part K is slightly displaced and the key top 3 is inclined by a small angle against the force of a spring 2, the laser light emitted in the axial direction is reflected with the angle twice as large as the inclined angle of the key top 3 by the reflection mirror 4. This reflected light is made incident on the light receiving part 8a and detected as an electrical signal through an optical fiber 10. Accordingly, the inclined angle of the key top 3 is calculated by the recognition of the light receiving part 8a and the quantity of displacement and the direction of the movable part K can be detected.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は微小な変位を高精度に検出する装置に関し、特
に光を利用した微小変位検出装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device for detecting minute displacements with high precision, and particularly to a minute displacement detection device using light.

〔従来の技術〕[Conventional technology]

従来、可動部の微小な移動距離や移動角度等の変位を検
出する装置として、機械的な原理により動作されるスイ
ッチが用いられ、これを可動部の変位に対応して動作さ
せて電気信号として検出するものが提案されている。通
常、このスイッチは可動部の周囲に複数個配設しており
、可動部の移動方向や移動量に応じて選択的に動作され
るスイッチを判別することにより、可動部の移動方向や
移動量を検出することができる。
Conventionally, switches operated on mechanical principles have been used as devices to detect small displacements such as moving distances and moving angles of moving parts, and switches are operated in response to the displacement of the moving parts to generate electrical signals. A detection method has been proposed. Usually, multiple switches are installed around the movable part, and by determining which switch is selectively activated depending on the direction and amount of movement of the movable part, can be detected.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上述した従来の検出装置は、機械的に動作されるスイッ
チを用いているために、スイッチ接点不良やチャタリン
グ等が原因して高速かつ安定した検出を行うことが困難
である。また、スイッチの小型化には限度があるため可
動部に近接して多数個のスイッチを配設することは困難
であり、微小な変位を高精度に検出することは難しい。
Since the conventional detection device described above uses a mechanically operated switch, it is difficult to perform high-speed and stable detection due to switch contact failure, chattering, and the like. Further, since there is a limit to the miniaturization of switches, it is difficult to arrange a large number of switches close to a movable part, and it is difficult to detect minute displacements with high precision.

更に、スイッチの数を増やすと装置が大型になる等の問
題もある。
Furthermore, increasing the number of switches causes problems such as an increase in the size of the device.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の微小変位検出装置は、可動部の変位を高速かつ
安定して高精度に検出することができ、しかも装置の小
型化を図るものである。
The minute displacement detection device of the present invention is capable of detecting the displacement of a movable part at high speed, stably, and with high precision, and is capable of reducing the size of the device.

本発明の微小変位検出装置は、内面に反射鏡を有しかつ
可動部の移動に伴って揺動されるキートップと、このキ
ートップの中心位置において前記反射鏡に対向配置した
発光部と、この発光部の周囲に配設した複数個の受光部
とで構成している。
The minute displacement detection device of the present invention includes: a key top having a reflecting mirror on its inner surface and swinging as the movable part moves; and a light emitting part disposed opposite to the reflecting mirror at a central position of the key top. It consists of a plurality of light receiving sections arranged around this light emitting section.

〔実施例〕〔Example〕

次に、本発明を図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.

第1図は本発明の一実施例の縦断面図、第2図は第1図
の■■線に沿う断面図である。
FIG. 1 is a longitudinal cross-sectional view of one embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along the line ■■■ in FIG.

この微小変位検出装置は、円筒容器状をしたハウジング
1の内側周辺部に渦巻き状をしたスプリング2を嵌着し
、このスプリング2によって円板状のキートップ3を前
記ハウジング1の開口位置に軸方向に対して垂直に支持
している。このためこのキートップ3は外力を受けたと
きにハウジングlに対して3次元方向に揺動されること
ができる。また、このキートップ3は内面中心部に平面
反射鏡4を一体に取着するとともに、外面の周辺一部に
は微小変位が検出される可動部Kが当接している。
This minute displacement detection device has a spiral spring 2 fitted around the inside of a cylindrical housing 1, and this spring 2 pivots a disk-shaped key top 3 to an open position of the housing 1. It is supported perpendicular to the direction. Therefore, the key top 3 can be swung in three dimensions with respect to the housing 1 when subjected to an external force. Further, this key top 3 has a flat reflecting mirror 4 integrally attached to the center of the inner surface, and a movable part K that detects minute displacement is in contact with a part of the outer periphery.

前記ハウジング1の底面中心位置にはハウジング1の軸
方向に光を射出する発光部5を固着している。この実施
例では発光部5は微小レンズ6と、これに繋がる光ファ
イバ7とで構成し、この光ファイバ7の図外の先端から
入力されるレーザ光を光ファイバ7によって微小レンズ
6まで伝送させ、ここから前記キートップ3に向けて軸
方向に射出するように構成している。
A light emitting section 5 that emits light in the axial direction of the housing 1 is fixed at the center of the bottom surface of the housing 1. In this embodiment, the light emitting unit 5 is composed of a microlens 6 and an optical fiber 7 connected to the microlens 6, and a laser beam inputted from an unillustrated tip of the optical fiber 7 is transmitted to the microlens 6 through the optical fiber 7. , so that it is ejected from here toward the key top 3 in the axial direction.

また、前記ハウジング1の底面には前記発光部5を包囲
するように多数個の受光部8を配設している。この実施
例では、これら受光部8は微小レンズ9とこれに繋がる
光ファイバ10とで構成し、光ファイバ10の先端は夫
々図外の検出器の一部を構成する光−電気変換素子に接
続している。そして、これら受光部8は前記発光部5を
中心とした多数の同心円上に、しかも円周方向に揃えて
配設している。
Further, a large number of light receiving sections 8 are arranged on the bottom surface of the housing 1 so as to surround the light emitting section 5. In this embodiment, these light receiving sections 8 are composed of a microlens 9 and an optical fiber 10 connected thereto, and the tips of the optical fibers 10 are each connected to an optical-to-electrical conversion element that constitutes a part of a detector (not shown). are doing. These light receiving sections 8 are arranged on a large number of concentric circles centered on the light emitting section 5, and aligned in the circumferential direction.

この構成によれば、第1図のように可動部Kに変位が生
じておらず、キートップ3がハウジング1の軸に対して
垂直状態を保っているときには、光ファイバ7を通して
微小レンズ6から軸方向に向けて射出されたレーザ光は
、反射鏡4によって軸方向逆向きに反射される。このた
め、この状態では反射光はいずれの受光部8においても
検出されず、変位が零であることが検出される。
According to this configuration, when the movable part K is not displaced and the key top 3 is maintained perpendicular to the axis of the housing 1 as shown in FIG. The laser beam emitted in the axial direction is reflected by the reflecting mirror 4 in the opposite direction to the axial direction. Therefore, in this state, reflected light is not detected by any of the light receiving sections 8, and it is detected that the displacement is zero.

一方、可動部Kが微小変位し、第3図のようにスプリン
グ2の力に抗してキートップ3が微小角度傾斜されると
、発光部5から軸方向に射出されたレーザ光は反射鏡4
によって軸から外れた方向、即ちキートップ3の傾斜角
度の2倍の角度で反射される。そして、この反射光は受
光部8の中の−の受光部8aに入射しここから光ファイ
バ10を通して図外の検出器に伝送され、電気信号とし
て検出される。したがって、検出器においてこの受光部
8aを認識することにより、光の反射角度が算出できか
つ反射鏡4、つまりキートップ3の傾斜角度が算出でき
る。これにより、可動部にの変位量及びその方向が検出
できる。
On the other hand, when the movable part K is slightly displaced and the key top 3 is tilted by a small angle against the force of the spring 2 as shown in FIG. 4
The light is reflected in a direction off-axis, that is, at an angle twice the inclination angle of the key top 3. Then, this reflected light enters the negative light receiving section 8a in the light receiving section 8, is transmitted from there through the optical fiber 10 to a detector (not shown), and is detected as an electrical signal. Therefore, by recognizing this light receiving portion 8a with a detector, the reflection angle of light and the inclination angle of the reflecting mirror 4, that is, the key top 3 can be calculated. Thereby, the amount and direction of displacement of the movable part can be detected.

可動部にの変位量が増大すれば、第4図のようにキート
ップ3の傾斜角度も増大し、反射光を検出する受光部8
も径方向の外側に配置した受光部8bに移動される。し
たがって、これら受光部8aと8bとの相対位置を相互
に比較することにより、可動部にの相対変位を検出する
こともできる。
As the amount of displacement of the movable part increases, the inclination angle of the key top 3 increases as shown in FIG. 4, and the light receiving part 8 that detects reflected light increases.
is also moved to the light receiving section 8b arranged on the outside in the radial direction. Therefore, by comparing the relative positions of these light receiving parts 8a and 8b, it is also possible to detect the relative displacement of the movable part.

このため、機械的スイッチのようなチャタリングや接触
不良による誤検出が生じることはなく、しかも検出の応
答が速いので、高速かつ正確な検出を行うことができる
。また、発光部5や受光部8は光ファイバと微小レンズ
で構成しているので、受光部8を高密度で配設でき検出
精度を向上できるとともに装置の小型化を達成できる。
Therefore, erroneous detection due to chattering or poor contact unlike mechanical switches does not occur, and the detection response is fast, so fast and accurate detection can be performed. In addition, since the light emitting section 5 and the light receiving section 8 are composed of optical fibers and microlenses, the light receiving section 8 can be arranged at a high density, improving detection accuracy and downsizing the device.

なお、上述の説明では径方向の変位について検出する場
合を示したが、円周方向についても同様に検出でき、こ
れによりキートップ3及び可動部にの変位を3次元的に
検出することができる。
In addition, although the above explanation shows the case where the displacement in the radial direction is detected, the detection can also be performed in the circumferential direction in the same way, and thereby the displacement of the key top 3 and the movable part can be detected three-dimensionally. .

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、反射鏡を有する揺動可能
なキートップに対向する中心位置に発光部を配置すると
ともに、この発光部の周囲に複数個の受光部を配設した
構成としているので、可動部の変位を検出するに際して
も機械的スイッチのようなチャタリングや接触不良によ
る誤検出が生じることはなく、しかも検出の応答が速い
ので、高速かつ正確な検出を行うことができる。また、
発光部や受光部を高密度で配設でき検出精度を向上する
とともに装置の小型化を達成することができる。
As explained above, the present invention has a structure in which a light emitting part is arranged at a central position facing a swingable key top having a reflecting mirror, and a plurality of light receiving parts are arranged around this light emitting part. Therefore, when detecting the displacement of the movable part, erroneous detection due to chattering or contact failure unlike mechanical switches does not occur, and the detection response is fast, so fast and accurate detection can be performed. Also,
The light emitting section and the light receiving section can be arranged at a high density, thereby improving detection accuracy and downsizing the device.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の縦断面図、第2図は第1図
の■n線に沿う断面図、第3図及び第4図は作用を説明
するための第1図と同様の図である。 1・・・ハウジング、2・・・スプリング、3・・・キ
ートップ、4・・・反射鏡、5・・・発光部、6・・・
微小レンズ、7・・・光ファイバ、8.8a、8b・・
・受光部、9・・・レンズ、10・・・光ファイバ。 代理人 弁理士  鈴 木 章 夫;ζ゛第1図
Fig. 1 is a longitudinal sectional view of an embodiment of the present invention, Fig. 2 is a sectional view taken along the n line in Fig. 1, and Figs. 3 and 4 are similar to Fig. 1 for explaining the operation. This is a diagram. DESCRIPTION OF SYMBOLS 1...Housing, 2...Spring, 3...Key top, 4...Reflector, 5...Light emitting part, 6...
Microlens, 7... Optical fiber, 8.8a, 8b...
- Light receiving section, 9...lens, 10...optical fiber. Agent Patent attorney Akio Suzuki; ζ゛Figure 1

Claims (2)

【特許請求の範囲】[Claims] (1)内面に反射鏡を有しかつ可動部の移動に伴って揺
動されるキートップと、このキートップの中心位置にお
いて前記反射鏡に対向配置した発光部と、この発光部の
周囲に配設した複数個の受光部とで構成し、前記発光部
から反射鏡に向けて射出した光を前記受光部で検出でき
るように構成したことを特徴とする微小変位検出装置。
(1) A key top that has a reflecting mirror on its inner surface and swings as the movable part moves, a light emitting part placed opposite the reflecting mirror at the center position of the key top, and a light emitting part arranged around the light emitting part. What is claimed is: 1. A minute displacement detection device comprising a plurality of disposed light receiving sections, the light receiving section being configured to detect light emitted from the light emitting section toward a reflecting mirror.
(2)キートップは円筒容器状に形成したハウジングに
スプリング支持するとともにその内面に前記反射鏡を固
着し、前記発光部は前記ハウジングの底面中心位置に配
置するとともに、各受光部はこの底面周囲位置に同心か
つ同円周位置に配置してなる特許請求の範囲第1項記載
の微小変位検出装置。
(2) The key top is supported by a spring on a housing formed in the shape of a cylindrical container, and the reflecting mirror is fixed to the inner surface of the key top, and the light emitting part is arranged at the center of the bottom surface of the housing, and each light receiving part is arranged around the bottom surface of the housing. The minute displacement detection device according to claim 1, wherein the minute displacement detection device is arranged concentrically and circumferentially.
JP2885786A 1986-02-14 1986-02-14 Micro-displacement detector Pending JPS62187214A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2885786A JPS62187214A (en) 1986-02-14 1986-02-14 Micro-displacement detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2885786A JPS62187214A (en) 1986-02-14 1986-02-14 Micro-displacement detector

Publications (1)

Publication Number Publication Date
JPS62187214A true JPS62187214A (en) 1987-08-15

Family

ID=12260050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2885786A Pending JPS62187214A (en) 1986-02-14 1986-02-14 Micro-displacement detector

Country Status (1)

Country Link
JP (1) JPS62187214A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03220407A (en) * 1990-01-25 1991-09-27 Sumitomo Heavy Ind Ltd Inclination detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03220407A (en) * 1990-01-25 1991-09-27 Sumitomo Heavy Ind Ltd Inclination detector

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