JPS62186837U - - Google Patents
Info
- Publication number
- JPS62186837U JPS62186837U JP7425686U JP7425686U JPS62186837U JP S62186837 U JPS62186837 U JP S62186837U JP 7425686 U JP7425686 U JP 7425686U JP 7425686 U JP7425686 U JP 7425686U JP S62186837 U JPS62186837 U JP S62186837U
- Authority
- JP
- Japan
- Prior art keywords
- belt
- wafer transfer
- transfer device
- wafer
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7425686U JPS62186837U (un) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7425686U JPS62186837U (un) | 1986-05-16 | 1986-05-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62186837U true JPS62186837U (un) | 1987-11-27 |
Family
ID=30919301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7425686U Pending JPS62186837U (un) | 1986-05-16 | 1986-05-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62186837U (un) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009026224A (ja) * | 2007-07-23 | 2009-02-05 | Canon Machinery Inc | カード搬送装置 |
-
1986
- 1986-05-16 JP JP7425686U patent/JPS62186837U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009026224A (ja) * | 2007-07-23 | 2009-02-05 | Canon Machinery Inc | カード搬送装置 |