JPS62184743U - - Google Patents
Info
- Publication number
- JPS62184743U JPS62184743U JP7405286U JP7405286U JPS62184743U JP S62184743 U JPS62184743 U JP S62184743U JP 7405286 U JP7405286 U JP 7405286U JP 7405286 U JP7405286 U JP 7405286U JP S62184743 U JPS62184743 U JP S62184743U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- wafer
- edge
- continuity
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 7
- 238000003708 edge detection Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7405286U JPS62184743U (enExample) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7405286U JPS62184743U (enExample) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184743U true JPS62184743U (enExample) | 1987-11-24 |
Family
ID=30918921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7405286U Pending JPS62184743U (enExample) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184743U (enExample) |
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1986
- 1986-05-16 JP JP7405286U patent/JPS62184743U/ja active Pending