JPS62184736U - - Google Patents
Info
- Publication number
- JPS62184736U JPS62184736U JP7405686U JP7405686U JPS62184736U JP S62184736 U JPS62184736 U JP S62184736U JP 7405686 U JP7405686 U JP 7405686U JP 7405686 U JP7405686 U JP 7405686U JP S62184736 U JPS62184736 U JP S62184736U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chamber
- gas
- semiconductor manufacturing
- manufacturing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 230000032258 transport Effects 0.000 claims 2
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7405686U JPS62184736U (enExample) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7405686U JPS62184736U (enExample) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184736U true JPS62184736U (enExample) | 1987-11-24 |
Family
ID=30918929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7405686U Pending JPS62184736U (enExample) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184736U (enExample) |
-
1986
- 1986-05-16 JP JP7405686U patent/JPS62184736U/ja active Pending