JPS62184736U - - Google Patents

Info

Publication number
JPS62184736U
JPS62184736U JP7405686U JP7405686U JPS62184736U JP S62184736 U JPS62184736 U JP S62184736U JP 7405686 U JP7405686 U JP 7405686U JP 7405686 U JP7405686 U JP 7405686U JP S62184736 U JPS62184736 U JP S62184736U
Authority
JP
Japan
Prior art keywords
wafer
chamber
gas
semiconductor manufacturing
manufacturing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7405686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7405686U priority Critical patent/JPS62184736U/ja
Publication of JPS62184736U publication Critical patent/JPS62184736U/ja
Pending legal-status Critical Current

Links

JP7405686U 1986-05-16 1986-05-16 Pending JPS62184736U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7405686U JPS62184736U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7405686U JPS62184736U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Publications (1)

Publication Number Publication Date
JPS62184736U true JPS62184736U (enrdf_load_stackoverflow) 1987-11-24

Family

ID=30918929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7405686U Pending JPS62184736U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Country Status (1)

Country Link
JP (1) JPS62184736U (enrdf_load_stackoverflow)

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