JPS62184734U - - Google Patents
Info
- Publication number
- JPS62184734U JPS62184734U JP1986073025U JP7302586U JPS62184734U JP S62184734 U JPS62184734 U JP S62184734U JP 1986073025 U JP1986073025 U JP 1986073025U JP 7302586 U JP7302586 U JP 7302586U JP S62184734 U JPS62184734 U JP S62184734U
- Authority
- JP
- Japan
- Prior art keywords
- lamps
- adjusted
- utility
- vapor phase
- reflecting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986073025U JPS62184734U (enExample) | 1986-05-15 | 1986-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986073025U JPS62184734U (enExample) | 1986-05-15 | 1986-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184734U true JPS62184734U (enExample) | 1987-11-24 |
Family
ID=30916991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986073025U Pending JPS62184734U (enExample) | 1986-05-15 | 1986-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184734U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009164379A (ja) * | 2008-01-08 | 2009-07-23 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
| JP2009272399A (ja) * | 2008-05-02 | 2009-11-19 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
-
1986
- 1986-05-15 JP JP1986073025U patent/JPS62184734U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009164379A (ja) * | 2008-01-08 | 2009-07-23 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
| JP2009272399A (ja) * | 2008-05-02 | 2009-11-19 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |