JPS62184734U - - Google Patents
Info
- Publication number
- JPS62184734U JPS62184734U JP7302586U JP7302586U JPS62184734U JP S62184734 U JPS62184734 U JP S62184734U JP 7302586 U JP7302586 U JP 7302586U JP 7302586 U JP7302586 U JP 7302586U JP S62184734 U JPS62184734 U JP S62184734U
- Authority
- JP
- Japan
- Prior art keywords
- lamps
- adjusted
- utility
- vapor phase
- reflecting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7302586U JPS62184734U (en, 2012) | 1986-05-15 | 1986-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7302586U JPS62184734U (en, 2012) | 1986-05-15 | 1986-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184734U true JPS62184734U (en, 2012) | 1987-11-24 |
Family
ID=30916991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7302586U Pending JPS62184734U (en, 2012) | 1986-05-15 | 1986-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184734U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009164379A (ja) * | 2008-01-08 | 2009-07-23 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
| JP2009272399A (ja) * | 2008-05-02 | 2009-11-19 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
-
1986
- 1986-05-15 JP JP7302586U patent/JPS62184734U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009164379A (ja) * | 2008-01-08 | 2009-07-23 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
| JP2009272399A (ja) * | 2008-05-02 | 2009-11-19 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |