JPS6218312B2 - - Google Patents
Info
- Publication number
- JPS6218312B2 JPS6218312B2 JP56136981A JP13698181A JPS6218312B2 JP S6218312 B2 JPS6218312 B2 JP S6218312B2 JP 56136981 A JP56136981 A JP 56136981A JP 13698181 A JP13698181 A JP 13698181A JP S6218312 B2 JPS6218312 B2 JP S6218312B2
- Authority
- JP
- Japan
- Prior art keywords
- tool
- workpiece
- plane mirror
- angle prism
- positioning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 21
- 238000005259 measurement Methods 0.000 claims description 11
- 238000005520 cutting process Methods 0.000 claims description 8
- 238000003754 machining Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 6
- 230000008602 contraction Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 241001416181 Axis axis Species 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D59/00—Accessories specially designed for sawing machines or sawing devices
- B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
- B23D59/002—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade for the position of the saw blade
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B27—WORKING OR PRESERVING WOOD OR SIMILAR MATERIAL; NAILING OR STAPLING MACHINES IN GENERAL
- B27B—SAWS FOR WOOD OR SIMILAR MATERIAL; COMPONENTS OR ACCESSORIES THEREFOR
- B27B5/00—Sawing machines working with circular or cylindrical saw blades; Components or equipment therefor
- B27B5/29—Details; Component parts; Accessories
- B27B5/30—Details; Component parts; Accessories for mounting or securing saw blades or saw spindles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
- B28D5/024—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with the stock carried by a movable support for feeding stock into engagement with the cutting blade, e.g. stock carried by a pivoted arm or a carriage
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
- G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
- G05B19/23—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
- G05B19/231—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37275—Laser, interferometer
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/49—Nc machine tool, till multiple
- G05B2219/49169—Compensation for temperature, bending of tool
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Forests & Forestry (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Automatic Control Of Machine Tools (AREA)
Description
【発明の詳細な説明】
本発明は切断機、研削盤およびフライス盤など
の工作機械において、工具と被加工物との位置決
めを高精度に行う装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for positioning a tool and a workpiece with high precision in machine tools such as cutting machines, grinding machines, and milling machines.
切断機における従来技術による位置決め装置の
例を第１図に示す。図において、被加工物１を任
意の間隔で溝入れあるいは切断する場合、送りね
じ８を回転させることによるＸ−Ｙテーブル２の
ピツチ割出し方向（以下、Ｘ方向と記す）への移
動量、あるいは工具３４がフランジ３３により取
り付けられている主軸３１を具備するコラム（図
示せず）の前記Ｘ方向への移動量を、レーザ発振
器４１、Ｉ／インターフエイス４２、干渉器５
１、反射鏡５２、レシーバ５３、カウンタ５４お
よび演算処理装置９などで構成されるレーザ測長
システム等の測長器によつて測定し、測定結果を
モータ駆動装置７２にフイードバツクして精密位
置決めを行つていた。ところが、上述の方法で
は、周囲温度の変化によつて、主軸３１およびＸ
−Ｙテーブル２が伸縮し、加工精度（割出し精
度）を決定する工具３４と前記Ｘ−Ｙテーブル２
とのＸ方向の相対距離を正確に設定することが困
難であり、サブミクロン・オーダの高精度位置決
めは困難である。 An example of a prior art positioning device for a cutting machine is shown in FIG. In the figure, when grooving or cutting the workpiece 1 at arbitrary intervals, the amount of movement of the X-Y table 2 in the pitch indexing direction (hereinafter referred to as the X direction) by rotating the feed screw 8, Alternatively, the amount of movement in the X direction of a column (not shown) having the main shaft 31 to which the tool 34 is attached by the flange 33 can be determined by the laser oscillator 41, the I/interface 42, the interferometer 5, etc.
1. Measure with a length measuring device such as a laser length measuring system consisting of a reflecting mirror 52, a receiver 53, a counter 54, an arithmetic processing device 9, etc., and feed back the measurement results to the motor drive device 72 for precise positioning. I was gone. However, in the above method, due to changes in ambient temperature, the main shaft 31 and
- The Y table 2 expands and contracts, and the tool 34 and the X-Y table 2 determine machining accuracy (indexing accuracy).
It is difficult to accurately set the relative distance in the X direction between the two, and high-precision positioning on the order of submicrons is difficult.
本発明の目的は、上記した従来技術の欠点を排
除し、製品の歩留りの向上と生産工程の自動化と
を考慮した高精度の位置決め装置を提供するにあ
る。前記目的を達成するため、本発明は、Ｘ−Ｙ
テーブルおよび工具を具備した主軸それぞれの端
面にＸ方向への位置の測定を行うための反射鏡を
設けてレーザ測長システムを構成することによ
り、環境（温度変化）の影響による誤差をなくし
て、前記Ｘ−Ｙテーブルと工具との相対距離を正
確に設定するようにしたことを要点とするもので
ある。 SUMMARY OF THE INVENTION An object of the present invention is to provide a highly accurate positioning device that eliminates the drawbacks of the prior art described above and takes into account improvement in product yield and automation of the production process. In order to achieve the above object, the present invention provides
By configuring a laser length measurement system by providing a reflector for measuring the position in the X direction on the end face of each spindle equipped with a table and a tool, errors due to the influence of the environment (temperature change) can be eliminated. The key point is to accurately set the relative distance between the XY table and the tool.
以下、図面に従つて本発明による精密位置決め
装置の実施例を説明する。第２図および第３図は
第１の実施例を示す図で、第２図は該実施例の装
置を装備した切断機の概略を示すものであり、第
３図は割出し補正時のＸ−Ｙテーブルの動きを説
明するための説明図である。第２図において、被
加工物１は適切な方法でＸ−Ｙテーブル２に搭載
されており、該Ｘ−Ｙテーブル２には、これをＸ
方向（ピツチ割出し方向）に移動せしめる送りね
じ８が連結されており、さらに該送りねじ８に
は、直接または減速機（図示せず）を介して送り
用モータ７１が連結されており、該送り用モータ
７１はモータ駆動装置７２を介して演算処理装置
９に接続されている。演算処理装置９は、マイク
ロコンピユータあるいはミニコンピユータなどと
することが望ましく、レーザ測長システムのＩ／
インターフエイス４２からのデータ読取りルー
チンのほか、割出し量の補正ルーチンおよび記憶
回路を備え、前記Ｘ−Ｙテーブル２と工具３４と
の各々の位置を読み取り、所望の割出し量に対す
る補正値の演算処理を行う。レーザ測長システム
は、レーザ発振器４１と、該レーザ発振器４１か
ら出されたレーザ光４４を２つのレーザ光５５
ａ，６５ａに分配するための分配器４３と、分配
されたレーザ光５５ａ，６５ａと該レーザ光がそ
れぞれ反射鏡５２，６２に反射した後のレーザ光
５５ｃ，６５ｃとをそれぞれ干渉させるように適
切な位置に固定された干渉器５１，６１と、該干
渉器５１，６１から出力されたレーザ光５５ｄ，
６５ｄをそれぞれ受けて、結果をパルスに変換す
るためのレシーバ５３，６３と、該レシーバ５
３，６３から出力されるパルスをそれぞれ加減算
するためのカウンタ５４，６４と、該カウンタ５
４，６４と前記演算処理装置９とを接続するため
のＩ／インターフエイス４２とから構成されて
いる。主軸３１の変位を測定するために取り付け
られた反射鏡６２は、回転振れによる測定誤差を
なくすため、取付け調整が可能な治具（図示せ
ず）に固定されるのが望ましい。 Embodiments of the precision positioning device according to the present invention will be described below with reference to the drawings. Figures 2 and 3 are diagrams showing the first embodiment, Figure 2 shows an outline of a cutting machine equipped with the device of the embodiment, and Figure 3 shows the X during index correction. - It is an explanatory diagram for explaining movement of a Y table. In FIG. 2, a workpiece 1 is mounted in an appropriate manner on an X-Y table 2, on which it is
A feed screw 8 is connected thereto, and a feed motor 71 is connected directly or via a reducer (not shown) to the feed screw 8. The feed motor 71 is connected to the arithmetic processing unit 9 via a motor drive device 72. The arithmetic processing unit 9 is preferably a microcomputer or a minicomputer, and is an I/O of the laser length measurement system.
In addition to the data reading routine from the interface 42, it is equipped with an indexing amount correction routine and a storage circuit, which reads the respective positions of the X-Y table 2 and the tool 34, and calculates a correction value for the desired indexing amount. Perform processing. The laser length measurement system includes a laser oscillator 41 and a laser beam 44 emitted from the laser oscillator 41 into two laser beams 55.
a, 65a, and a distributor 43 suitable for interfering with the distributed laser beams 55a, 65a and the laser beams 55c, 65c after the laser beams are reflected by the reflecting mirrors 52, 62, respectively. interferometers 51 and 61 fixed at the same positions, and laser beams 55d and 55d output from the interferometers 51 and 61, respectively.
receivers 53 and 63 for receiving the signals 65d and converting the results into pulses, and the receiver 5
counters 54 and 64 for adding and subtracting the pulses output from the counters 3 and 63, respectively;
4, 64 and an I/interface 42 for connecting the arithmetic processing unit 9. The reflecting mirror 62 attached to measure the displacement of the main shaft 31 is preferably fixed to a jig (not shown) whose attachment can be adjusted in order to eliminate measurement errors due to rotational shake.
次に、動作について説明する。第３図に示すよ
うに、Ｘ−Ｙテーブル２に搭載された被加工物１
の任意の位置X1を工具３４により溝入れ加工し
た後、次の目標位置X2に前記工具３４の中央を
位置決めさせるため、送り用モータ７１を適切な
方向に回転させることによりＸ−Ｙテーブル２を
移動させ、該Ｘ−Ｙテーブル２の変位を測定させ
るレーザ測長システム（符号５１〜５４）により
測定した移動量が、所望のピツチＰあるいは原点
０からの距離Ｌに一致した時点で前記送り用モー
タ７１の回転を中止し、Ｘ−Ｙテーブル２の移動
を停止させる。さらに、前記Ｘ−Ｙテーブル２を
ピツチＰあるいは距離Ｌだけ移動させる間に、室
温変化等により主軸３１が変位し、工具３４が位
置X3に位置決めされ、目標値に対しΔＰだけ誤
差が生じる。この誤差ΔＰを、主軸３１の変位を
測定するレーザ測長システム（符号６１〜６４）
により測定し、演算処理装置９からの指令により
再び送り用モータ７１を、前記誤差ΔＰに応じ適
切な方向に回転させ、工具３４の中央を位置X2
に補正、制御する。演算処理装置９は、常時Ｘ−
Ｙテーブル２および主軸３１の変位を測定し、か
つＸ−Ｙテーブル２の移動前後の前記測定値や、
溝入れピツチＰあるいは原点からの距離Ｌ等の加
工情報を記憶する記憶回路を有し、位置決め誤差
ΔＰを算出し、補正のため所望の出力を与えるも
のである。 Next, the operation will be explained. As shown in FIG. 3, the workpiece 1 mounted on the X-Y table 2
After grooving an arbitrary position X1 with the tool 34, in order to position the center of the tool 34 at the next target position X2 , the X-Y table is rotated in an appropriate direction by rotating the feed motor 71. 2 and the displacement of the X-Y table 2 is measured by a laser length measuring system (numerals 51 to 54). When the amount of movement measured by the laser length measurement system (numerals 51 to 54) matches the desired pitch P or the distance L from the origin 0, the above-mentioned The rotation of the feed motor 71 is stopped, and the movement of the XY table 2 is stopped. Furthermore, while the X-Y table 2 is moved by pitch P or distance L, the spindle 31 is displaced due to a change in room temperature, etc., and the tool 34 is positioned at position X3 , resulting in an error of ΔP with respect to the target value. A laser length measurement system (numerals 61 to 64) that measures this error ΔP and the displacement of the main shaft 31
The feed motor 71 is again rotated in an appropriate direction according to the error ΔP according to a command from the arithmetic processing unit 9, and the center of the tool 34 is moved to the position X 2
Correct and control. The arithmetic processing unit 9 always
Measure the displacement of the Y table 2 and the main shaft 31, and measure the measured values before and after the movement of the X-Y table 2,
It has a memory circuit that stores machining information such as the grooving pitch P or the distance L from the origin, calculates the positioning error ΔP, and provides a desired output for correction.
第４図は本発明の第２の実施例における主軸３
１の、工具３４が固定されている側とは反対側軸
端部を示したものである。本実施例のごとく、反
射面が非常に高精度（平坦度0.06μｍ以下）に仕
上げられた反射鏡６２をレーザ光６５ｂと垂直に
なるように主軸３１の端面に接着し、該端面の変
位を測定することにより工具３４の変位を間接的
に測定しても、前記第１の実施例と同様の効果を
得ることができる。この場合、主軸３１、軸受３
２および両者を支持する玉軸受（図示せず）の３
者の構成から決定される熱変位上の基準点をあら
かじめ求めておき、該基準点から工具３４の中央
までの距離l1と、前記基準点から反射鏡６２まで
の距離l2との比l2／l1を演算処理装置９に記憶さ
せておき、主軸３１の端面の変位Δｌを測定する
ことにより、工具３４の変位Δｘ（第３図のΔＰ
にも相当する値）に近似する。すなわち、前記工
具３４の変位Δｘは、
Δｘ≒ｌ２／ｌ１・Δｌ ………(1)
で表わされ、前記演算処理装置９により算出す
る。 FIG. 4 shows the main shaft 3 in the second embodiment of the present invention.
1, the shaft end on the opposite side to the side to which the tool 34 is fixed is shown. As in this embodiment, a reflecting mirror 62 whose reflecting surface has been finished with extremely high precision (flatness of 0.06 μm or less) is glued to the end face of the main shaft 31 so as to be perpendicular to the laser beam 65b, and the displacement of the end face is Even if the displacement of the tool 34 is measured indirectly, the same effect as in the first embodiment can be obtained. In this case, the main shaft 31, the bearing 3
2 and 3 of the ball bearing (not shown) that supports both.
A reference point on the thermal displacement determined from the configuration of the user is determined in advance, and the ratio l of the distance l 1 from the reference point to the center of the tool 34 to the distance l 2 from the reference point to the reflector 62 is calculated. 2 /l 1 is stored in the arithmetic processing unit 9, and by measuring the displacement Δl of the end face of the main shaft 31, the displacement Δx of the tool 34 (ΔP in FIG.
(value corresponding to ). That is, the displacement Δx of the tool 34 is expressed as Δx≒l 2 /l 1 ·Δl (1) and is calculated by the arithmetic processing device 9.
第５図および第６図はいずれも本発明の第３の
実施例における工具３４側の主軸３１の軸端部を
示したものである。第５図の例においては、反射
鏡６２と、レーザ光６５ｂ，６５ｃを覆うがごと
く中空状の防水筒３５とが、主軸３１に固定され
ている。このように反射鏡６２およびレーザ光６
５ｂ，６５ｃを外部と遮断することにより、研削
液および不均一な密度分布のため生じる干渉器６
１と反射鏡６２との間の測長誤差をなくすことが
でき、正確な測定ができる。また、第６図の例に
おいては、前記防水筒３５の代りに、主軸３１を
軸心方向に中空穴を有する中空状に形成し、かつ
該主軸と同様に軸心方向に形成された中空穴の端
面に反射鏡６２が接着された反射鏡取付具６６
を、前記反射鏡６２がほぼ工具３４直下の主軸軸
心位置に配置されるように取り付ける。このよう
にすることにより、第５図の例と同様に測定誤差
をなくすことができる。 5 and 6 both show the shaft end of the main shaft 31 on the tool 34 side in a third embodiment of the present invention. In the example shown in FIG. 5, a reflecting mirror 62 and a hollow waterproof cylinder 35 that covers the laser beams 65b and 65c are fixed to the main shaft 31. In this way, the reflecting mirror 62 and the laser beam 6
By isolating 5b and 65c from the outside, the interference device 6 caused by the grinding fluid and uneven density distribution is removed.
1 and the reflecting mirror 62 can be eliminated, allowing accurate measurement. In the example shown in FIG. 6, instead of the waterproof cylinder 35, the main shaft 31 is formed into a hollow shape having a hollow hole in the axial direction, and the hollow hole is formed in the axial direction similarly to the main shaft. a reflector mount 66 with a reflector 62 glued to the end face of the reflector mount 66;
is attached so that the reflecting mirror 62 is located approximately at the center of the main shaft directly below the tool 34. By doing so, measurement errors can be eliminated as in the example shown in FIG.
第７図は本発明を旋盤に適用した場合の本発明
の第４の実施例を示したものである。本実施例で
は、第２図に示した第１の実施例における工具の
代りに被加工物１を主軸（図示せず）の先端にチ
ヤツク３７を介して取り付け、該チヤツク３７の
主軸軸心上の端面位置に反射鏡６２が配置される
ように取り付ける。また、被加工物の代りに工具
３４を工具取付台３８を介してＸ−Ｙテーブル２
に取り付ける。このような構成で、被加工物１を
回転させ、該被加工物１の変位誤差（伸縮量）を
送り用モータ７１にフイードバツクし、Ｘ−Ｙテ
ーブル２に載架した工具３４の切込み量を補正す
るようにし、被加工物１を平面、球面あるいは複
雑な形状の面に加工することができる。 FIG. 7 shows a fourth embodiment of the present invention in which the present invention is applied to a lathe. In this embodiment, instead of the tool in the first embodiment shown in FIG. 2, the workpiece 1 is attached to the tip of a main spindle (not shown) via a chuck 37, and The reflector 62 is attached so that it is located at the end face position of the reflector 62. Also, instead of the workpiece, the tool 34 is attached to the X-Y table 2 via the tool mount 38.
Attach to. With this configuration, the workpiece 1 is rotated, the displacement error (expansion/contraction amount) of the workpiece 1 is fed back to the feed motor 71, and the depth of cut of the tool 34 mounted on the X-Y table 2 is adjusted. By correcting this, the workpiece 1 can be processed into a flat, spherical, or complexly shaped surface.
第８図は主軸３１が水平面に対しθなる傾きで
取り付けられた工作機械の場合の本発明の第５の
実施例を示したものである。第８図において、主
軸３１の変位を測定するための反射鏡６２が、主
軸軸心上の工具３４側と反対側の主軸端面に取り
付けられている。主軸軸心方向の主軸３１の変位
をｘ〓としたとき、水平方向および垂直方向の変
位ｘおよびｙは、
ｘ＝ｘ〓・cosθ ………(2)
ｙ＝ｘ〓・sinθ ………(3)
で表わされ、上式を演算処理装置９で演算し、主
軸３１または軸受３２をＸ〓方向に、Ｘ−Ｙテー
ブル２をＸ方向に移動せしめることにより、切込
み量Ｈおよびピツチ割出し量Ｐを同時に位置決め
することができる。 FIG. 8 shows a fifth embodiment of the present invention in the case of a machine tool in which the main shaft 31 is mounted at an angle of θ with respect to the horizontal plane. In FIG. 8, a reflecting mirror 62 for measuring the displacement of the main shaft 31 is attached to the end surface of the main shaft on the opposite side to the tool 34 side on the main shaft axis. When the displacement of the main shaft 31 in the direction of the main axis axis is x〓, the horizontal and vertical displacements x and y are as follows: x=x〓・cosθ……(2) y=x〓・sinθ……( 3) The above equation is calculated by the processing unit 9, and by moving the main shaft 31 or the bearing 32 in the X direction and the X-Y table 2 in the X direction, the depth of cut H and the pitch index can be calculated. The amount P can be positioned simultaneously.
以上説明したように、本発明によれば、温度変
化等によるＸ−Ｙテーブルあるいは主軸の変位
（伸縮量）をそれぞれレーザ測長器により測定
し、発生した誤差を補正、制御するようにしたこ
とにより、正確に位置決めができ、製品の歩留り
も向上できる。 As explained above, according to the present invention, the displacement (expansion/contraction amount) of the X-Y table or the main axis due to temperature changes, etc. is measured using a laser length measuring device, and the errors that occur are corrected and controlled. This enables accurate positioning and improves product yield.
第１図は従来技術による位置決め装置を装備し
た切断機の構成図、第２図は本発明による位置決
め装置の一実施例（第１の実施例）を装備した切
断機の構成図、第３図は該実施例における割出し
補正時のＸ−Ｙテーブルの動きを説明するための
説明図、第４図ないし第８図は本発明の他の実施
例（第２〜第５の実施例）の説明図である。
符号の説明、１……被加工物、２……Ｘ−Ｙテ
ーブル、８……送りねじ、９……演算処理装置、
３１……主軸、３２……軸受、３３……フラン
ジ、３４……工具、３５……防水筒、３７……チ
ヤツク、３８……工具取付台、４１……レーザ発
振器、４２……Ｉ／インターフエイス、４３…
…分配器、５１，６１……干渉器、５２，６２…
…反射鏡、５３，６３……レシーバ、５４，６４
……カウンタ、６６……反射鏡取付具、７１……
送り用モータ、７２……モータ駆動装置。
FIG. 1 is a block diagram of a cutting machine equipped with a positioning device according to the prior art, FIG. 2 is a block diagram of a cutting machine equipped with an embodiment (first embodiment) of a positioning device according to the present invention, and FIG. is an explanatory diagram for explaining the movement of the X-Y table during index correction in this embodiment, and FIGS. 4 to 8 are illustrations of other embodiments (second to fifth embodiments) of the present invention. It is an explanatory diagram. Explanation of symbols, 1... Workpiece, 2... X-Y table, 8... Feed screw, 9... Arithmetic processing unit,
31...Main shaft, 32...Bearing, 33...Flange, 34...Tool, 35...Waterproof tube, 37...Chuck, 38...Tool mount, 41...Laser oscillator, 42...I/interface Faith, 43...
...Distributor, 51, 61... Interferer, 52, 62...
... Reflector, 53, 63 ... Receiver, 54, 64
...Counter, 66...Reflector mount, 71...
Feeding motor, 72...Motor drive device.
Claims (1)
加工する工具を具備する機構部とからなり、少な
くともどちらか一方の機構部が送りねじと送り用
モータとを備え、少なくとも１軸方向に移動可能
な加工機において、被加工物を載架する機構部
と、工具を具備する機構部との各々の機構部に配
置した平面鏡または直角プリズムでのレーザ光の
反射を利用して、前記被加工物を載架した機構部
の強制移動あるいは自然変位する方向の位置を読
み取る第１のレーザ測長器を設け、かつ前記工具
を具備した機構部の強制移動あるいは自然変位す
る方向の位置を読み取る第２のレーザ測長器を設
け、前記第１および第２のレーザ測長器の測定結
果から工具と被加工物との相対距離を読み取り、
工具と被加工物との位置決めを行うことを特徴と
する精密位置決め装置。 ２ 特許請求の範囲第１項に記載の精密位置決め
装置において、被加工物を、送りねじと送り用モ
ータとを備え少なくとも割出し方向への移動が可
能なテーブルに載架し、前記被加工物を加工する
工具を回転する主軸に具備し、該主軸のどちらか
一方の端面またはほぼ工具直下の主軸軸心位置に
平面鏡または直角プリズムを配置し、工具とテー
ブルとの割出し方向の相対距離を読み取り、前記
送り用モータを駆動し被加工物を移動させて、工
具と被加工物との割出し方向の相対距離を正確に
調整することを特徴とする精密位置決め装置。 ３ 特許請求の範囲第１項に記載の精密位置決め
装置において、回転する主軸の先端に被加工物を
取り付け、かつ該被加工物近傍の主軸軸心位置に
平面鏡または直角プリズムを配置し、送りねじと
送り用モータとを備え少なくとも前記主軸軸心方
向への移動が可能な工具取付台上に工具を具備
し、かつ主軸軸心と平行方向の測定が可能なごと
く平面鏡または直角プリズムを配置し、被加工物
と工具取付台との主軸軸心方向の相対距離を読み
取り、前記送り用モータを駆動し工具を移動させ
て工具と被加工物との主軸軸心方向の相対距離を
正確に調整することを特徴とする精密位置決め装
置。 ４ 特許請求の範囲第１項に記載の精密位置決め
装置において、被加工物を加工する工具を先端に
具備した主軸を水平面と傾斜をなして取り付け、
かつ工具取付け側とは反対側の前記主軸端面に平
面鏡または直角プリズムを設け、前記工具の水平
方向と垂直方向の位置を読み取り、工具と被加工
物との水平方向の位置決めと、工具切込み方向の
位置決めとを同時に行うことを特徴とする精密位
置決め装置。 ５ 特許請求の範囲第１項に記載の精密位置決め
装置において、第１および第２のレーザ測長器に
連結されかつそれらによつて与えられる変位およ
び指定の演算用定数を記憶し演算して制御信号を
出力する演算処理装置を設け、該演算処理装置
が、工具と被加工物との割出し方向の変位および
工具切込み方向の変位を読み取り、前記工具の変
位に相当した補正制御信号を発してテーブルの送
り用モータを制御することを特徴とする精密位置
決め装置。 ６ 特許請求の範囲第１項に記載の精密位置決め
装置において、平面鏡または直角プリズム取付け
側の主軸の軸端面部に、主軸軸心と同軸上に防水
筒を設け、前記平面鏡または直角プリズムと、該
平面鏡または直角プリズムに入射・反射するレー
ザ光とを覆うことを特徴とする精密位置決め装
置。 ７ 特許請求の範囲第１項に記載の精密位置決め
装置において、主軸を軸心方向に中空穴を有する
中空状に形成し、かつ軸心方向に形成された中空
穴の端面に、平面鏡または直角プリズムを接着し
た反射鏡取付具を、前記平面鏡または直角プリズ
ムがほぼ工具直下の主軸軸心位置に配置されるよ
うに設け、前記平面鏡または直角プリズムと、該
平面鏡または直角プリズムに入射・反射するレー
ザ光とを覆うことを特徴とする精密位置決め装
置。[Scope of Claims] 1. Consisting of a mechanism section on which a workpiece is mounted and a mechanism section equipped with a tool for machining the workpiece, at least one of the mechanism sections is equipped with a feed screw and a feed motor. In a processing machine which is equipped with a machine and is movable in at least one axis direction, a plane mirror or a right-angle prism placed in each of the mechanical part on which the workpiece is mounted and the mechanical part in which the tool is provided is used to emit laser light. A first laser length measuring device is provided which uses reflection to read the position in the direction of forced movement or natural displacement of the mechanical part on which the workpiece is mounted, and the mechanical part equipped with the tool is forced to move or A second laser length measuring device that reads the position in the direction of natural displacement is provided, and the relative distance between the tool and the workpiece is read from the measurement results of the first and second laser length measuring devices,
A precision positioning device characterized by positioning a tool and a workpiece. 2. In the precision positioning device according to claim 1, a workpiece is mounted on a table that is equipped with a feed screw and a feed motor and is movable at least in an indexing direction, and the workpiece is A tool for machining is mounted on a rotating spindle, and a plane mirror or right-angle prism is placed on either end of the spindle or at the center of the spindle almost directly below the tool, and the relative distance between the tool and the table in the indexing direction is measured. A precision positioning device characterized in that the relative distance in the indexing direction between the tool and the workpiece is accurately adjusted by reading the information and driving the feed motor to move the workpiece. 3. In the precision positioning device according to claim 1, a workpiece is attached to the tip of a rotating main shaft, a plane mirror or a right-angle prism is arranged at the center of the main shaft near the workpiece, and a feed screw is provided. and a feeding motor, and a tool is provided on a tool mount that is movable at least in the direction of the spindle axis, and a plane mirror or a right-angle prism is arranged so as to enable measurement in a direction parallel to the spindle axis, The relative distance between the workpiece and the tool mount in the direction of the spindle axis is read, and the feed motor is driven to move the tool to accurately adjust the relative distance between the tool and the workpiece in the direction of the spindle axis. A precision positioning device characterized by: 4. In the precision positioning device according to claim 1, a main shaft equipped with a tool for machining a workpiece at its tip is installed at an angle with a horizontal plane,
A plane mirror or a right-angle prism is installed on the end face of the spindle on the side opposite to the tool mounting side to read the horizontal and vertical positions of the tool, and to determine the horizontal positioning of the tool and workpiece and the cutting direction of the tool. A precision positioning device characterized by simultaneously performing positioning. 5. In the precision positioning device according to claim 1, the device is connected to the first and second laser length measuring devices, and is controlled by storing and calculating the displacements and specified calculation constants given by them. An arithmetic processing device that outputs a signal is provided, and the arithmetic processing device reads the displacement between the tool and the workpiece in the indexing direction and the displacement in the tool cutting direction, and issues a correction control signal corresponding to the displacement of the tool. A precision positioning device characterized by controlling a table feeding motor. 6. In the precision positioning device according to claim 1, a waterproof cylinder is provided on the shaft end surface of the main shaft on the plane mirror or right-angle prism mounting side coaxially with the main shaft axis, and the plane mirror or right-angle prism and the A precision positioning device characterized by covering a plane mirror or a right-angle prism with a laser beam incident on and reflected from the plane mirror or right-angle prism. 7. In the precision positioning device according to claim 1, the main shaft is formed into a hollow shape having a hollow hole in the axial direction, and a plane mirror or a right angle prism is provided on the end face of the hollow hole formed in the axial direction. A reflecting mirror mount to which the plane mirror or right-angle prism is glued is provided so that the plane mirror or right-angle prism is located at the center of the main axis almost directly below the tool, and the plane mirror or right-angle prism is attached to the plane mirror or right-angle prism, and the laser beam incident on and reflected by the plane mirror or right-angle prism is attached. A precision positioning device characterized by covering.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13698181A JPS5840247A (en) | 1981-09-02 | 1981-09-02 | Precision positioning device |
| US06/333,632 US4585379A (en) | 1980-12-27 | 1981-12-22 | Precision positioning device |
| CH824581A CH645292A5 (en) | 1980-12-27 | 1981-12-23 | PRECISION POSITIONING DEVICE. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13698181A JPS5840247A (en) | 1981-09-02 | 1981-09-02 | Precision positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5840247A JPS5840247A (en) | 1983-03-09 |
| JPS6218312B2 true JPS6218312B2 (en) | 1987-04-22 |
Family
ID=15187975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13698181A Granted JPS5840247A (en) | 1980-12-27 | 1981-09-02 | Precision positioning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5840247A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6301009B1 (en) * | 1997-12-01 | 2001-10-09 | Zygo Corporation | In-situ metrology system and method |
| CN104759944A (en) * | 2014-01-06 | 2015-07-08 | 苏州易昌光电科技有限公司 | Sensing system for zero return of machine tool and control method thereof |
| CN111633274B (en) * | 2020-05-25 | 2021-07-06 | 周巧美 | Saw blade quick replacement device for machining |
| CN112925264A (en) * | 2021-01-25 | 2021-06-08 | 新代科技(苏州)有限公司 | Method for automatically moving cutter on lathe |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5157081A (en) * | 1974-11-15 | 1976-05-19 | Mitsui Seiki Kogyo Kk | Jidokikainiokeru hikakobutsuto kogutono sotaiichigime hoho |
| JPS5371771A (en) * | 1976-12-09 | 1978-06-26 | Fujitsu Ltd | Positioning control system |
-
1981
- 1981-09-02 JP JP13698181A patent/JPS5840247A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5157081A (en) * | 1974-11-15 | 1976-05-19 | Mitsui Seiki Kogyo Kk | Jidokikainiokeru hikakobutsuto kogutono sotaiichigime hoho |
| JPS5371771A (en) * | 1976-12-09 | 1978-06-26 | Fujitsu Ltd | Positioning control system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5840247A (en) | 1983-03-09 |
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