JPS62182539U - - Google Patents
Info
- Publication number
- JPS62182539U JPS62182539U JP1986070586U JP7058686U JPS62182539U JP S62182539 U JPS62182539 U JP S62182539U JP 1986070586 U JP1986070586 U JP 1986070586U JP 7058686 U JP7058686 U JP 7058686U JP S62182539 U JPS62182539 U JP S62182539U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- exhaust
- shaft
- air
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 13
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/08—Drying solid materials or objects by processes not involving the application of heat by centrifugal treatment
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Molecular Biology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986070586U JPH0729630Y2 (ja) | 1986-05-09 | 1986-05-09 | 基板の回転乾燥装置 |
| KR1019870004472A KR920000678B1 (ko) | 1986-05-09 | 1987-05-07 | 기판의 회전 건조 장치 |
| US07/047,169 US4735000A (en) | 1986-05-09 | 1987-05-07 | Apparatus for drying substrates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986070586U JPH0729630Y2 (ja) | 1986-05-09 | 1986-05-09 | 基板の回転乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62182539U true JPS62182539U (US06633600-20031014-M00021.png) | 1987-11-19 |
| JPH0729630Y2 JPH0729630Y2 (ja) | 1995-07-05 |
Family
ID=13435810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986070586U Expired - Lifetime JPH0729630Y2 (ja) | 1986-05-09 | 1986-05-09 | 基板の回転乾燥装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4735000A (US06633600-20031014-M00021.png) |
| JP (1) | JPH0729630Y2 (US06633600-20031014-M00021.png) |
| KR (1) | KR920000678B1 (US06633600-20031014-M00021.png) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03238819A (ja) * | 1990-02-15 | 1991-10-24 | Seiichiro Sogo | 半導体材料の乾燥方法および装置 |
| KR100248564B1 (ko) * | 1992-04-07 | 2000-03-15 | 다카시마 히로시 | 스핀 드라이어 |
| TW472296B (en) * | 1999-05-25 | 2002-01-11 | Ebara Corp | Substrate treating apparatus and method of operating the same |
| US6457478B1 (en) | 1999-11-12 | 2002-10-01 | Michael J. Danese | Method for treating an object using ultra-violet light |
| US6272768B1 (en) | 1999-11-12 | 2001-08-14 | Michael J. Danese | Apparatus for treating an object using ultra-violet light |
| CN110762974B (zh) * | 2019-11-07 | 2021-02-09 | 杭州晨昊纺织整理有限公司 | 一种用于纺织加工的布料烘干装置 |
| CN112460949A (zh) * | 2020-11-25 | 2021-03-09 | 江门市美亚纺织材料有限公司 | 一种用于纺织助剂加工的烘干设备 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59115967A (ja) * | 1982-12-20 | 1984-07-04 | 三菱電機株式会社 | 回転形乾燥機 |
| JPS6210439U (US06633600-20031014-M00021.png) * | 1985-07-03 | 1987-01-22 | ||
| JPS6263930U (US06633600-20031014-M00021.png) * | 1985-10-14 | 1987-04-21 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1143151B (de) * | 1954-02-10 | 1963-01-31 | Licentia Gmbh | Haushaltwaescheschleuder |
| JPS629635A (ja) * | 1985-07-08 | 1987-01-17 | Oki Electric Ind Co Ltd | 半導体ウエハの回転乾燥装置 |
-
1986
- 1986-05-09 JP JP1986070586U patent/JPH0729630Y2/ja not_active Expired - Lifetime
-
1987
- 1987-05-07 US US07/047,169 patent/US4735000A/en not_active Expired - Lifetime
- 1987-05-07 KR KR1019870004472A patent/KR920000678B1/ko not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59115967A (ja) * | 1982-12-20 | 1984-07-04 | 三菱電機株式会社 | 回転形乾燥機 |
| JPS6210439U (US06633600-20031014-M00021.png) * | 1985-07-03 | 1987-01-22 | ||
| JPS6263930U (US06633600-20031014-M00021.png) * | 1985-10-14 | 1987-04-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR920000678B1 (ko) | 1992-01-20 |
| JPH0729630Y2 (ja) | 1995-07-05 |
| US4735000A (en) | 1988-04-05 |
| KR870011662A (ko) | 1987-12-26 |
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