JPS62182538U - - Google Patents
Info
- Publication number
- JPS62182538U JPS62182538U JP7107086U JP7107086U JPS62182538U JP S62182538 U JPS62182538 U JP S62182538U JP 7107086 U JP7107086 U JP 7107086U JP 7107086 U JP7107086 U JP 7107086U JP S62182538 U JPS62182538 U JP S62182538U
- Authority
- JP
- Japan
- Prior art keywords
- cvd apparatus
- plasma cvd
- insulating
- insulating coating
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 239000011810 insulating material Substances 0.000 claims 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7107086U JPS62182538U (it) | 1986-05-12 | 1986-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7107086U JPS62182538U (it) | 1986-05-12 | 1986-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62182538U true JPS62182538U (it) | 1987-11-19 |
Family
ID=30913297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7107086U Pending JPS62182538U (it) | 1986-05-12 | 1986-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62182538U (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0226018A (ja) * | 1988-07-15 | 1990-01-29 | Tokyo Electron Ltd | プラズム処理装置 |
-
1986
- 1986-05-12 JP JP7107086U patent/JPS62182538U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0226018A (ja) * | 1988-07-15 | 1990-01-29 | Tokyo Electron Ltd | プラズム処理装置 |