JPS6356262U - - Google Patents
Info
- Publication number
- JPS6356262U JPS6356262U JP14761686U JP14761686U JPS6356262U JP S6356262 U JPS6356262 U JP S6356262U JP 14761686 U JP14761686 U JP 14761686U JP 14761686 U JP14761686 U JP 14761686U JP S6356262 U JPS6356262 U JP S6356262U
- Authority
- JP
- Japan
- Prior art keywords
- support stand
- substrate support
- introduction pipe
- nozzle holes
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000001020 plasma etching Methods 0.000 claims description 3
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14761686U JPS6356262U (it) | 1986-09-26 | 1986-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14761686U JPS6356262U (it) | 1986-09-26 | 1986-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6356262U true JPS6356262U (it) | 1988-04-15 |
Family
ID=31061139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14761686U Pending JPS6356262U (it) | 1986-09-26 | 1986-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6356262U (it) |
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1986
- 1986-09-26 JP JP14761686U patent/JPS6356262U/ja active Pending