JPS62181546U - - Google Patents

Info

Publication number
JPS62181546U
JPS62181546U JP7026686U JP7026686U JPS62181546U JP S62181546 U JPS62181546 U JP S62181546U JP 7026686 U JP7026686 U JP 7026686U JP 7026686 U JP7026686 U JP 7026686U JP S62181546 U JPS62181546 U JP S62181546U
Authority
JP
Japan
Prior art keywords
plate
view
shaped body
wafers
cartridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7026686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0415682Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986070266U priority Critical patent/JPH0415682Y2/ja
Publication of JPS62181546U publication Critical patent/JPS62181546U/ja
Application granted granted Critical
Publication of JPH0415682Y2 publication Critical patent/JPH0415682Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1986070266U 1986-05-09 1986-05-09 Expired JPH0415682Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986070266U JPH0415682Y2 (https=) 1986-05-09 1986-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986070266U JPH0415682Y2 (https=) 1986-05-09 1986-05-09

Publications (2)

Publication Number Publication Date
JPS62181546U true JPS62181546U (https=) 1987-11-18
JPH0415682Y2 JPH0415682Y2 (https=) 1992-04-08

Family

ID=30911750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986070266U Expired JPH0415682Y2 (https=) 1986-05-09 1986-05-09

Country Status (1)

Country Link
JP (1) JPH0415682Y2 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236229A (ja) * 1985-08-08 1987-02-17 Canon Inc ウエハ処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236229A (ja) * 1985-08-08 1987-02-17 Canon Inc ウエハ処理装置

Also Published As

Publication number Publication date
JPH0415682Y2 (https=) 1992-04-08

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