JPS62181481A - Short pulse laser apparatus by discharge excitation - Google Patents
Short pulse laser apparatus by discharge excitationInfo
- Publication number
- JPS62181481A JPS62181481A JP2290786A JP2290786A JPS62181481A JP S62181481 A JPS62181481 A JP S62181481A JP 2290786 A JP2290786 A JP 2290786A JP 2290786 A JP2290786 A JP 2290786A JP S62181481 A JPS62181481 A JP S62181481A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- main electrode
- main
- voltage
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 title description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010304 firing Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 241000270281 Coluber constrictor Species 0.000 description 5
- OQZCSNDVOWYALR-UHFFFAOYSA-N flurochloridone Chemical compound FC(F)(F)C1=CC=CC(N2C(C(Cl)C(CCl)C2)=O)=C1 OQZCSNDVOWYALR-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
- H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、気体レーザーのうち、放電励起により短パ
ルスレーザ−光を発生する放電励起短パルスレーザ−装
置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a discharge-excited short-pulse laser device, which generates short-pulse laser light by discharge excitation, among gas lasers.
〔従来の技術）
一般にレーザー発振を得るためには、レーザー媒質中に
おいて空間的に均一な放電の発生が必要である。ところ
で、ＴＥＡＣＯ２レーザーやエキシマレーザ−等の短パ
ルスレーザ−光を発生させる短パルスレーザ−装置では
、その動作圧力が数気圧と比較的高圧であるため、上記
の放電は収束してレーザー発振が得にくい。そこで、主
放電に先立ち予め主放電領域に均一な電子による放電の
種をばらまいておくための予備電離を行うのが普通であ
る。[Prior Art] Generally, in order to obtain laser oscillation, it is necessary to generate a spatially uniform discharge in a laser medium. By the way, in short pulse laser devices that generate short pulse laser light such as TEACO2 lasers and excimer lasers, the operating pressure is relatively high at several atmospheres, so the above discharge converges and laser oscillation is achieved. Hateful. Therefore, it is common practice to perform preliminary ionization in order to uniformly scatter seeds of discharge by electrons in the main discharge region in advance of the main discharge.
第３図は従来の放電励起短パルスレーザ−装置を示す一
部断面図である。図において、（１）は高電圧パルス回
路、（２）はレーサー媒質中に配置され、レーザー光軸
方向を長手方向とする第１の主電極、（３）はこの第１
の主Ｔ、極（２）に前記レーサー媒質を介して対向配設
され複数の開孔部をもつ第２の１電（÷、（４）は第２
の主電極（３）に直接接触している誘電体、（５）は電
体（４）を介して第２の主電極（３）に対向配設された
補助電極、（６）は主放電の経路を示すものである。FIG. 3 is a partial sectional view showing a conventional discharge excited short pulse laser device. In the figure, (1) is a high voltage pulse circuit, (2) is a first main electrode arranged in a laser medium and whose longitudinal direction is in the direction of the laser optical axis, and (3) is this first main electrode.
The main T of the electrode (2) is arranged opposite to the pole (2) through the racer medium and has a plurality of openings.
The dielectric body is in direct contact with the main electrode (3), (5) is the auxiliary electrode arranged opposite to the second main electrode (3) via the electric body (4), and (6) is the main discharge This shows the route.
次にその動作を第３図および第２図の特性線図を用いて
説明する。第３図にＪ５いて、高電圧パルス回路（１）
の出力により第１の主電極（２）と第２の１電４Ｊｉ
（３）の間に高電圧パルスか印加される。この高電圧パ
ルスの立ち上がりの時間変化を第２図（７）に示す。本
例では第１の主電極（２）と補助電極（５）は直接接続
されて同電位になっているので、第２の主電極（３）と
補助電極（５）の間の電位差は、第２図（イ）のように
前記特性線図（７）の電位変化と同様に変化する。なお
、第２図（イ）の（Ａ）点以後は第２の主電極（３）に
おける開孔部の近傍で誘電体（４）の表面に沿面放電か
生ずる。この沿面放電は電位か変化する間常に生し、モ
して沿面放電により生した電子が沿面放電により生じた
紫外光により光電離され、その結果生成された電子か後
述の主放電をグロー状の均一な放電（６）とするだめの
１手となる。一方、第１、第２の主電極（２）、 （３
）間の電圧（電位差）が第２図（力の（８）点に達する
と、該電極間に絶縁破壊が起って主放電（６）を生じ、
これによりレーサー媒質が励起されて短パルスレーサー
光が取り出される。Next, the operation will be explained using the characteristic diagrams shown in FIGS. 3 and 2. J5 in Figure 3, high voltage pulse circuit (1)
The output of the first main electrode (2) and the second 1-electrode 4Ji
During (3) a high voltage pulse is applied. The time variation of the rise of this high voltage pulse is shown in FIG. 2 (7). In this example, the first main electrode (2) and the auxiliary electrode (5) are directly connected and have the same potential, so the potential difference between the second main electrode (3) and the auxiliary electrode (5) is As shown in FIG. 2(a), the potential changes in the same way as the potential change in the characteristic diagram (7). Incidentally, after point (A) in FIG. 2(a), creeping discharge occurs on the surface of the dielectric (4) in the vicinity of the opening in the second main electrode (3). This creeping discharge always occurs while the potential changes, and the electrons generated by the creeping discharge are photoionized by the ultraviolet light generated by the creeping discharge, and the resulting electrons cause the main discharge, which will be described later, to glow. This is the only way to achieve uniform discharge (6). On the other hand, the first and second main electrodes (2), (3
When the voltage (potential difference) between ) reaches point (8) in Figure 2 (force), dielectric breakdown occurs between the electrodes and a main discharge (6) occurs,
This excites the laser medium and extracts short pulse laser light.
〔発明か解決しようとする問題点］
従来の放電励起短パルスレーサー装置は上記のように構
成されているので、沿面放電の開始時期や、沿面放電に
より生ずる予備電調ｊ電子数を調整することができない
。そのため主放電の発生する電圧（第２図のＢ点）が変
化して、レーザー出力が変動する。あるいは、したいに
失われてゆく予備電離電子を補うために、誘電体の誘電
率を高くしたり、または薄い誘電体を用いることにより
、必要以上に沿面放電にエネルギーを没入しなければな
らないという問題かあった。[Problems to be Solved by the Invention] Since the conventional discharge-excited short pulse racer device is configured as described above, it is necessary to adjust the start timing of creeping discharge and the number of preliminary power conditioning electrons generated by creeping discharge. I can't. Therefore, the voltage at which the main discharge occurs (point B in FIG. 2) changes, and the laser output fluctuates. Another problem is that in order to compensate for the pre-ionized electrons that are being lost, it is necessary to increase the dielectric constant of the dielectric material or use a thinner dielectric material, thereby immersing more energy into creeping discharge than necessary. There was.
この発明は、上記のような問題点を解消するためになさ
れたものき、沿面放電の開始時期が調節てき、そして主
放電の開始直前に多ユの予備電離電子をばらまくことに
よって、レーザー出力を安定にした放電励起短パルスレ
ーザ−装置を得ることを目的・とする。This invention was made to solve the above-mentioned problems, and the start timing of the creeping discharge is adjusted, and the laser output is increased by scattering a large number of pre-ionized electrons just before the start of the main discharge. The purpose of this study is to obtain a stable discharge-excited short-pulse laser device.
（問題点を解決するための手段）
この発明に係る放電励起短パルスレーザ−装置は、第１
の主電極と補助電極間にパルス電圧を印加するタイミン
グが調整できる予備電離用の高電圧パルス回路を具え、
そして主放電の開始直前に立ら上かりの急俊なパルス電
圧を前記両電極間に印加するようにしだものである。(Means for Solving the Problems) The discharge-excited short pulse laser device according to the present invention has the following features:
Equipped with a high-voltage pulse circuit for pre-ionization that can adjust the timing of applying pulse voltage between the main electrode and the auxiliary electrode,
Then, a rapidly rising pulse voltage is applied between the two electrodes just before the start of the main discharge.
〔作用）
この発明におりる放電励起短パルスレーサー装置は、予
備電離用の高電圧パルス回路によって主放電の直前に多
量の予備電ｊｉｌｔ電子をばらまぎ、そして、予備型１
；ｉ１１のタイミングを調整することにより安定なレー
サー出力か得られる。[Function] The discharge excitation short pulse racer device according to the present invention scatters a large amount of preliminary electric jilt electrons just before main discharge by means of a high voltage pulse circuit for preliminary ionization, and
; By adjusting the timing of i11, stable racer output can be obtained.
以下、この発明の一実施例による装置を示した’ｆ、１
図の断面図について説明する。第１図において、（１）
〜（６）は第３図に示した従来例と同等か、またはそれ
に相当する部分である。（７）はスイ・ソチ素子で、補
助電極（５）と第１の主電極（２）の間に直列に接続さ
れている。Below, a device according to an embodiment of the present invention is shown.
The cross-sectional view of the figure will be explained. In Figure 1, (1)
-(6) are parts that are the same as or correspond to the conventional example shown in FIG. (7) is a Sui-Sochi element, which is connected in series between the auxiliary electrode (5) and the first main electrode (2).
次にその動作を説明する。まず、高電圧パルス回路（１
）により第１の主電極（２）と第２の主電極（３）の間
に電圧を印加すると、第２図（力に示したように主放電
開始電圧（Ｂ）点まで電圧か時間（１） とともに上昇
する。この上昇電圧が適当な値に達するまてはスイッチ
（７）の接点は開かれているので、第２の主電極（３）
と補助電極（５）の間には電位差か生じない。なお、ス
イッチ（７）として本例では自爆型のスパークキャップ
スイッチを用いた。このスパークギャップはギャップ間
隔を変えたり、またはスパークギャップ内のガス圧等を
変えることにより、その接点間を閉しる電圧を変えるこ
とができる。Next, its operation will be explained. First, high voltage pulse circuit (1
), when a voltage is applied between the first main electrode (2) and the second main electrode (3), the voltage or time ( 1) The contact of the switch (7) is open until this increased voltage reaches an appropriate value, so the second main electrode (3)
There is no potential difference between the electrode and the auxiliary electrode (5). In this example, a self-destructing type spark cap switch was used as the switch (7). This spark gap can change the voltage that closes the contacts by changing the gap interval or by changing the gas pressure within the spark gap.
かくして、スパークギャップの両接点間には第２図（つ
）の点線で示したような電位差が発生しているから、ス
パークギャップスイッチの接点か閉じる電圧（Ｃ）を主
放電の発生ずる電圧（Ｂ）より少し低くしておけば、主
放電の直前に沿面放電が生して予イ＋＃Ｉ電ｉｉ：ｌｆ
電子かはらまかれるようになる。ところで、発生ずる予
イｉ１°ｆ電餌電子故は、誘電体（４）の容士饋と電圧
の立Ｆ）−にかりり、ｒ性に比例−・ｊ−るか、スパー
クキャップスイッチの閉じる速度か速いために、第２の
主電険（３）と補助電極（５）との間には第２図（つ）
のように立ら上がりの速いパルス性電圧か印加され、そ
の瞬間、従来より％ ｆｆｉの電子かばらまかれること
になる。次に、主電極（２）！３）間の電圧が第２図（
ト）の（Ｂ）点に達すると、上記の電子を種に一様な主
放電が形成される。Thus, since a potential difference as shown by the dotted line in Figure 2 (2) is generated between both contacts of the spark gap, the voltage (C) at which the contacts of the spark gap switch close is set to the voltage (C) at which the main discharge occurs. If it is set a little lower than B), a creeping discharge will occur just before the main discharge.
It begins to be filled with electrons. By the way, the electric current caused by i1°f is proportional to the capacitance of the dielectric (4) and the voltage (F)-, and is proportional to the r characteristic of the spark cap switch. In order to increase the closing speed, there is a gap between the second main electrode (3) and auxiliary electrode (5).
A pulsed voltage with a fast rise is applied, and at that moment, % ffi of electrons are scattered compared to the conventional method. Next, the main electrode (2)! 3) The voltage between
When reaching point (B) in g), a uniform main discharge is formed with the above electrons as seeds.
ノＪお、上記実施例では、スイッチ素子として自爆スパ
ークキャップを用いたが、一般のスパークギャップ、サ
イラトロンあるいはサイリスタ等でもよく、主放電用の
高電圧パルス回路より発生したパルス電圧と同期させて
これらのスイッチ素子を駆動するようにすればよい。ま
た、上記実施例のスイッチ素子としては過飽和リアクト
ルを用いてもよい。この場合、主電極間の電圧が高まっ
たところで過飽和リアクトルか飽和して、そのインタフ
タンス値か小さくなるように設計すれはよい。In the above embodiment, a self-destructive spark cap was used as the switching element, but a general spark gap, thyratron, thyristor, etc. may also be used, and these can be used in synchronization with the pulse voltage generated from the high voltage pulse circuit for main discharge. What is necessary is to drive the switch elements of. Moreover, a supersaturated reactor may be used as the switch element in the above embodiment. In this case, it is best to design the supersaturated reactor so that it becomes saturated when the voltage between the main electrodes increases, and its interface value decreases.
（発明の効果］
以上のようにこの発明によれは、予備電；；ｉｌｌのた
めの高電圧パルス回路を段目たのて、主放電の直前に５
世の予備室Ｊ］１［電子をほらまくことができる。その
ため、主放電の発生に関与しない電子の数か少なく、効
率良く予備電離か行えるようになる。また、予備電離の
タイミングを調整して主放電発生の時期を一定にするこ
とができるので、安定なレーザー出力か得られる。(Effects of the Invention) As described above, according to the present invention, a high voltage pulse circuit for pre-charging is provided in the second stage, and the
World's Preliminary Room J] 1 [Can scatter electrons. Therefore, the number of electrons that are not involved in the generation of the main discharge is small, and preliminary ionization can be performed efficiently. Furthermore, since the timing of pre-ionization can be adjusted to keep the timing of main discharge constant, stable laser output can be obtained.
第１図はこの発明の一実施例による放電励起短パルスレ
ーサー装置を示す断面図、第２図（７）〜（つ）はこの
発明および従来装置の動作を説明するための特性線図、
第３図は従来の放電励起短パルスレーザ−装置を示す断
面図である。
図中、（１）は高電圧パルス回路、（２）は第１の主電
極、（３）は第２の主電極、（４）は誘電体、（５）は
補助電極、（６）は主放電、（７）はスイッチ素子であ
る。
なお、各図中同一符号は同一または相当部分を示す。
代理人 弁理士 佐 藤 正 年
第３図FIG. 1 is a sectional view showing a discharge-excited short pulse racer device according to an embodiment of the present invention, and FIGS.
FIG. 3 is a sectional view showing a conventional discharge excited short pulse laser device. In the figure, (1) is a high voltage pulse circuit, (2) is the first main electrode, (3) is the second main electrode, (4) is the dielectric, (5) is the auxiliary electrode, and (6) is the auxiliary electrode. The main discharge (7) is a switch element. Note that the same reference numerals in each figure indicate the same or corresponding parts. Agent Patent Attorney Tadashi Sato Figure 3
Claims (2)
手方向とする第１の主電極と、複数個の開孔部を有し上
記第１の主電極とレーザー媒質を介して対向配設された
第２の主電極と、誘電体素子を介して上記第２の主電極
に対向して配設された補助電極と、上記の第１の主電極
と第２の主電極の間に接続された高電圧パルス回路とよ
り成る放電励起短パルスレーザー装置において、上記第
１の主電極と補助電極間にスイッチ素子を接続すること
により、両電極間にパルス性電圧が印加される予備電離
用の高電圧パルス回路としたことを特徴とする放電励起
短パルスレーザー装置。(1) A first main electrode disposed in a laser medium and having a longitudinal direction along the laser optical axis, and a first main electrode having a plurality of openings and facing the first main electrode via the laser medium a second main electrode, an auxiliary electrode disposed opposite to the second main electrode via a dielectric element, and an auxiliary electrode connected between the first main electrode and the second main electrode. In a discharge-excited short pulse laser device comprising a high-voltage pulse circuit, a switch element is connected between the first main electrode and the auxiliary electrode to apply a pulsed voltage between the two electrodes for pre-ionization. A discharge-excited short-pulse laser device characterized by a high-voltage pulse circuit.
クギャップスイッチ又は過飽和リアクルトを用いること
を特徴とする特許請求の範囲第１項記載の放電励起短パ
ルスレーザー装置。(2) The discharge-excited short pulse laser device according to claim 1, characterized in that a thyratron, a spark gap switch, or a supersaturated reactor is used as the switch element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2290786A JPS62181481A (en) | 1986-02-06 | 1986-02-06 | Short pulse laser apparatus by discharge excitation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2290786A JPS62181481A (en) | 1986-02-06 | 1986-02-06 | Short pulse laser apparatus by discharge excitation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62181481A true JPS62181481A (en) | 1987-08-08 |
Family
ID=12095707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2290786A Pending JPS62181481A (en) | 1986-02-06 | 1986-02-06 | Short pulse laser apparatus by discharge excitation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62181481A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6468991A (en) * | 1987-09-09 | 1989-03-15 | Toshiba Corp | Gas laser device |
-
1986
- 1986-02-06 JP JP2290786A patent/JPS62181481A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6468991A (en) * | 1987-09-09 | 1989-03-15 | Toshiba Corp | Gas laser device |
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