JPH0391977A - Pulse generator - Google Patents

Pulse generator

Info

Publication number
JPH0391977A
JPH0391977A JP22830589A JP22830589A JPH0391977A JP H0391977 A JPH0391977 A JP H0391977A JP 22830589 A JP22830589 A JP 22830589A JP 22830589 A JP22830589 A JP 22830589A JP H0391977 A JPH0391977 A JP H0391977A
Authority
JP
Japan
Prior art keywords
discharge
electrode
diameter
electric field
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22830589A
Other languages
Japanese (ja)
Inventor
Shigeru Mogi
茂木 茂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22830589A priority Critical patent/JPH0391977A/en
Publication of JPH0391977A publication Critical patent/JPH0391977A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/038Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To enable pre-ionization and primary discharge to be smoothly carried out by a method wherein the diameter of a part of a pre-discharge electrode opposed to a primary electrode is so set as to make the electric field of the part concerned lower than the discharge electric field of gas laser medium in intensity, and the diameter of the tip of the pre-discharge electrode is made smaller than that of its part opposed to the primary electrode. CONSTITUTION:The diameter of a part of a pre-discharge electrode 6 opposed to primary electrodes 2 and 3 is made large enough so as to make the electric field of the part concerned lower than the discharge electric field of mixed gas 1 in intensity. The diameter of the tip of the pre-discharge electrode 6 is made much smaller than that of its part opposed to the primary electrode. That is, the part of the pre- discharge electrode 6 opposed to the primary electrodes 2 and 3 are formed large in diameter, whereby an electric field 10 of the opposed part becomes low in intensity and consequently voltage withstanding strength between the pre-discharge electrode 6 and the primary electrode 3 is sharply improved. On the contrary, the opposed parts of the pre-discharge electrodes 6 or the tips of the electrodes 6 are formed small in diameter, so that discharge starts easily between the pre-discharge electrodes 6. By this setup, pre-ionization and primary discharge following it are smoothly and stably carried out.

Description

【発明の詳細な説明】 [発四の目的] (産業上の利用分野) 本発明は、高繰返し型のパルスレーザ発振装置に使用す
るパルス発生装置に係り、特に、その放電ギャップ部の
絶縁構造に関するものである。
[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a pulse generator used in a high repetition rate pulsed laser oscillation device, and particularly relates to an insulation structure of a discharge gap portion thereof. It is related to.

(従来の技術) 近年、CO2レーザ、エキシマレーザ、銅蒸気レーザな
どの各種高繰返しパルスレーザ発振装置の技術開発に伴
い、実用化、汎用化の観点から、レーザ発振装置の一層
の小型、高性能化が要求されている。
(Prior art) In recent years, with the technological development of various high repetition pulse laser oscillation devices such as CO2 lasers, excimer lasers, and copper vapor lasers, from the viewpoint of practical application and generalization, laser oscillation devices are becoming more compact and have higher performance. ization is required.

第3図にこのような高繰返しバルスレーザ発振装置のパ
ルス発生装置の一例を示す。このパルス発生装置は、図
示していないが、気密容器に収納されている。この気密
容器内には、CO2 、H2、Heなどの混合ガス(レ
ーザ媒質)1が封入されており、この混合ガス1の雰囲
気中に高圧側と低圧側の一対の主電極2.3が、一定の
間隔を保って対向配置されている。この主電極2,3は
、その背面に設けられた支持板4,5にそれぞれ固定さ
れており、各支持板4,5は、図示していない容器に固
定されている。この主電極2,3間(主放電空間)の両
側方には、予備放電電極6が配置され、絶縁支持物7a
.7bで支持固定されている。また、主電極2.3の両
側方には、多数のピーキングコンデンサ8a,8bが配
置されており、ピーキングコンデンサ8a,8bの一端
は、予備放電電極6に接続され、他端は、支持板4.5
に接続されている。さらに、主電極2.3間の両側方に
は、図示しない風洞が設けられており、片側の風洞から
、主電極2,3間に混合ガス1を送り込み、この混合ガ
ス1を反対側の風洞から図示しない冷却器に戻し、再び
混合ガス1を主電極2.3間に送出すという、一連の循
環系が形戊されている。なお、図中9は、高圧側の主電
極2と図示しない外部電源との間を接続する高圧線であ
る。
FIG. 3 shows an example of a pulse generator for such a high repetition pulse laser oscillation device. Although not shown, this pulse generator is housed in an airtight container. A mixed gas (laser medium) 1 such as CO2, H2, He, etc. is sealed in this airtight container, and in the atmosphere of this mixed gas 1, a pair of main electrodes 2.3 on a high pressure side and a low pressure side are connected. They are placed facing each other at a constant distance. The main electrodes 2 and 3 are fixed to support plates 4 and 5 provided on their back surfaces, respectively, and each support plate 4 and 5 is fixed to a container (not shown). Preliminary discharge electrodes 6 are arranged on both sides of the main electrodes 2 and 3 (main discharge space), and insulating supports 7a
.. It is supported and fixed at 7b. Further, a large number of peaking capacitors 8a, 8b are arranged on both sides of the main electrode 2.3, one end of the peaking capacitors 8a, 8b is connected to the preliminary discharge electrode 6, and the other end is connected to the support plate 4. .5
It is connected to the. Furthermore, wind tunnels (not shown) are provided on both sides between the main electrodes 2 and 3, and a mixed gas 1 is fed between the main electrodes 2 and 3 from the wind tunnel on one side, and this mixed gas 1 is transferred to the wind tunnel on the opposite side. A series of circulation system is formed in which the mixed gas 1 is returned to a cooler (not shown) and sent again between the main electrodes 2 and 3. Note that 9 in the figure is a high voltage line connecting between the main electrode 2 on the high voltage side and an external power source (not shown).

このように構成された第3図のパルス発生装置に、図示
していない外部電源から、高圧線9を介して高電圧を印
加すると、予備放電電極6の放電により、主電極2,3
間に予備電離作用が生じると共に、ビーキングコンデン
サ8a,8bの電圧上昇に伴い、主電極2,3間の電圧
も上昇し、この電圧が、主電極2.3間のギャップ長、
および容器内の混合ガス1の圧力に応じて決まる一定電
注に達すると、ピーキングコンデンサ8a,8bに蓄え
られた電荷が主電極2,3に注入され、グロー放電が発
生する。このグロー放電により、混合ガス1が励起され
、レーザ発振が起こり、図示していない共振器により、
レーザ光が外部に取出される。
When a high voltage is applied from an external power source (not shown) to the pulse generator shown in FIG.
At the same time, as the voltage of the beaking capacitors 8a and 8b increases, the voltage between the main electrodes 2 and 3 also increases, and this voltage increases the gap length between the main electrodes 2 and 3.
When a constant current injection determined depending on the pressure of the mixed gas 1 in the container is reached, the charges stored in the peaking capacitors 8a and 8b are injected into the main electrodes 2 and 3, generating a glow discharge. This glow discharge excites the mixed gas 1, causing laser oscillation, and a resonator (not shown) causes
Laser light is extracted to the outside.

(発明が解決しようとする課題) ところで、以」二のような高繰返しパルスレーザ発振装
置のパルス発生装置において、予備放電電極6と主電極
2,3間の絶縁部10には、電位差が生じる。この場合
、第3図の低圧側を例にとると、予備放電電極6と主電
極3との間には、主電極2,3間の放電電圧の約1/2
の電位差が生じる。この電位差は、ピーキングコンデン
サ8aの1個分の電位差に相当する。このように、予備
放電電極6と主電極3との間に電位差を生じた場合の電
界は、例えば、図中の矢印11で示した方向に生じる。
(Problem to be Solved by the Invention) By the way, in the pulse generator of the high repetition pulse laser oscillation device as described below, a potential difference occurs in the insulating section 10 between the preliminary discharge electrode 6 and the main electrodes 2 and 3. . In this case, taking the low voltage side in FIG. 3 as an example, there is a voltage between the preliminary discharge electrode 6 and the main electrode 3 that is approximately 1/2 of the discharge voltage between the main electrodes 2 and 3.
A potential difference of . This potential difference corresponds to the potential difference of one peaking capacitor 8a. In this way, when a potential difference is generated between the preliminary discharge electrode 6 and the main electrode 3, an electric field is generated, for example, in the direction shown by the arrow 11 in the figure.

この電界11は、予備放電電極6と主電極3の両者の構
成が、不平等であれば大きくなり、平等になれば小さく
なる。また、この電界11が、混合ガス1の放電電界以
上になると、予備放電電極6と主電極3間が放電する。
This electric field 11 increases if the configurations of both the preliminary discharge electrode 6 and the main electrode 3 are unequal, and decreases if the configurations of both the preliminary discharge electrode 6 and the main electrode 3 are equal. Further, when this electric field 11 exceeds the discharge electric field of the mixed gas 1, a discharge occurs between the preliminary discharge electrode 6 and the main electrode 3.

この部分が放電すると、主電極2.3間で放電が発生し
ない状態になり、パルス発生装置として機能しなくなる
。この例のように、従来、予備放電電極形状の不備によ
り、パルス発生装置として機能できなくなる装霞が多数
発生している。この主たる原因としては、予備放電電極
6同士を放電し易くするために予備放電電極6を細くし
た結果、予備放電電極6と主電極2,3との間の電界が
高くなってしまうものと考えられる。
When this portion discharges, no discharge occurs between the main electrodes 2 and 3, and the device no longer functions as a pulse generator. As shown in this example, many haze devices have conventionally become incapable of functioning as pulse generators due to defects in the shape of the pre-discharge electrode. The main reason for this is thought to be that the electric field between the preliminary discharge electrode 6 and the main electrodes 2 and 3 becomes higher as a result of making the preliminary discharge electrode 6 thinner in order to make it easier for the preliminary discharge electrodes 6 to discharge each other. It will be done.

本発明は、以上のような従来技術の課題を解決するため
に提案されたものであり、その目的は、予備放電電極間
において容易に放電可能としながら、しかも予備放電電
極と主電極間の絶縁耐力を向上することにより、予備電
離および主放電を順調に行うことができ、確実に安定し
た主放電を得られ、安定したパルスを発生できるような
、優れたパルス発生装置を提供することである。
The present invention was proposed in order to solve the problems of the prior art as described above, and its purpose is to easily enable discharge between the pre-discharge electrodes and to improve the insulation between the pre-discharge electrode and the main electrode. To provide an excellent pulse generator that can perform preliminary ionization and main discharge smoothly, reliably obtain stable main discharge, and generate stable pulses by improving proof strength. .

[発四の構成] (課題を解決するための手段) 本発明によるパルス発生装置は、予備放電電極の主電極
に対向する部分の直径を、この部分の電界がガスレーザ
媒質の放電電界より低い電界になるように設定し、且つ
予備放電電極の先端部の直径を、主電極と対向する部分
の直径よりも小さくしたことを特徴としている。
[Composition of four generators] (Means for solving the problem) The pulse generator according to the present invention has a diameter of the portion of the pre-discharge electrode facing the main electrode such that the electric field of this portion is lower than the discharge electric field of the gas laser medium. It is characterized in that the diameter of the tip of the preliminary discharge electrode is smaller than the diameter of the portion facing the main electrode.

(作川) 以−1二のような構成を有する本発明においては、予備
放電電極と主電極との間の電界を放電電界より低くした
ため、同部の絶縁耐ノノを向上できると同時に、対向す
る予備放電電極間は、その先端部の直径を細く形戊した
ことから、容易に放電する。
(Sakugawa) In the present invention having the configuration as described above, the electric field between the preliminary discharge electrode and the main electrode is made lower than the discharge electric field. Since the diameter of the tip of the pre-discharge electrode is narrow, discharge can easily occur between the pre-discharge electrodes.

従って良好な予備電離および安定した主放電を確実に行
うことができる。
Therefore, good pre-ionization and stable main discharge can be ensured.

(実施例) 以下に、本発叩によるパルス発生装置の一実施例を第1
図および第2図を参照して具体的に説明する。なお、第
3図に示した従来技術と同一部分には同一符号を付し、
説明を省略する。
(Example) Below, an example of a pulse generator using the main beating will be described as a first example.
This will be explained in detail with reference to the drawings and FIG. Note that the same parts as those in the prior art shown in FIG. 3 are given the same reference numerals.
The explanation will be omitted.

第1図に示すように、本実施例において、予備放電電極
6の主電極2,3に対向する部分の直径は、この部分の
電界が混合ガス1の放電電界より低い電界になるように
太く構戊されている。また、予備放電電極6の先端部の
直径は、主電極と対向する部分の直径に比べて格段に小
さくされている。
As shown in FIG. 1, in this embodiment, the diameter of the portion of the preliminary discharge electrode 6 facing the main electrodes 2 and 3 is set so that the electric field in this portion is lower than the discharge electric field of the mixed gas 1. It is being structured. Furthermore, the diameter of the tip of the preliminary discharge electrode 6 is much smaller than the diameter of the portion facing the main electrode.

なお、他の部分の構成は、第3図に示した従来技術と同
様とされている。
Note that the configuration of other parts is similar to the prior art shown in FIG.

このように構戊された本実施例の作用は次の通りである
。すなわち、予備放電電極6の、主電極2,3と対向す
る部分を太く形成したことにより、第2図に示すように
、この部分の電界11が低くなり、予備放電電極6と主
電極3間の耐電圧が著しく向上する。つまり、同絶縁部
10の絶縁強度が高くなり、絶縁的に安定する。これに
対し、予備放電電極6同士の対向部分である先端部の直
径は、格段に小さくされているため、予備放電電極6間
においては、放電が容易に発生する。なお、第2図にお
いては、低圧側のみの構成を示したが、高圧側も同様に
構戊され、同様の作用を有している。
The operation of this embodiment thus structured is as follows. That is, by forming the part of the pre-discharge electrode 6 that faces the main electrodes 2 and 3 thick, the electric field 11 in this part becomes low, as shown in FIG. The withstand voltage is significantly improved. In other words, the insulation strength of the insulating portion 10 is increased, and the insulation is stable. On the other hand, since the diameter of the tip portions of the preliminary discharge electrodes 6 that are opposed to each other is made much smaller, discharge easily occurs between the preliminary discharge electrodes 6. Although FIG. 2 shows the configuration of only the low pressure side, the high pressure side is also configured in the same manner and has the same effect.

以−1二のように、本実施例においては、従来問題とな
っていた予備放電電極と主電極との間の絶縁弱点部が絶
縁強化される一方、予備放電電極間は容易に放電可能で
あるため、予備電離およびこれに続く主放電を順調且つ
安定に行うことができる。
As shown in 12 above, in this example, the insulation is strengthened at the insulation weak point between the preliminary discharge electrode and the main electrode, which had been a problem in the past, while it is now possible to easily discharge between the preliminary discharge electrodes. Therefore, preliminary ionization and subsequent main discharge can be performed smoothly and stably.

なお、本発明は前記実施例に限定されるものではなく、
例えば、予備放電電極の具体的な直径は、場合に応じて
適宜選択可能であり、また、予備放電電極の主電極と対
向する部分の直径と先端部の直径との比も、適宜選択可
能である。さらに、主電極の予備電極に対向する部分の
形状も特に限定されるものではない。
Note that the present invention is not limited to the above embodiments,
For example, the specific diameter of the pre-discharge electrode can be selected as appropriate depending on the case, and the ratio between the diameter of the portion of the pre-discharge electrode that faces the main electrode and the diameter of the tip can also be selected as appropriate. be. Further, the shape of the portion of the main electrode that faces the preliminary electrode is not particularly limited.

[発門の効果] 上記のように、本発明においては、予備放電電極の形状
の簡単な改良により、予備放電電極と主電極間の絶縁耐
力を格段に向上できると同時に予備放電電極間の放電を
容易に行えるため、予備電離および主放電を順調に行う
ことが可能で、確実に安定した主放電を得られ、安定し
たパルスを発生できるような、優れたパルス発生装置を
提供できる。
[Initial effect] As described above, in the present invention, by simply improving the shape of the pre-discharge electrode, the dielectric strength between the pre-discharge electrode and the main electrode can be significantly improved, and at the same time, the discharge between the pre-discharge electrodes can be improved. Therefore, it is possible to provide an excellent pulse generator that can perform preliminary ionization and main discharge smoothly, reliably obtain a stable main discharge, and generate stable pulses.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明によるパルス発生装置の一実施例を示す
正面図、第2図は同実施例における予備放電電極と主放
電との間の電界を示す正面図、第3図は従来のパルス発
生装置の一例を示す正面図である。 1・・・混合ガス、2,3・・・主電極、4,5・・・
支持板、6・・・予備放電電極,7a,7b・・・絶縁
支持物、8a,8b・・・ピーキングコンデンサ、9・
・・高圧線、10・・・絶縁部、11・・・電界。
FIG. 1 is a front view showing an embodiment of a pulse generator according to the present invention, FIG. 2 is a front view showing an electric field between a preliminary discharge electrode and a main discharge in the same embodiment, and FIG. 3 is a front view showing an electric field between a preliminary discharge electrode and a main discharge in the same embodiment. It is a front view showing an example of a generator. 1... Mixed gas, 2, 3... Main electrode, 4, 5...
Support plate, 6... Pre-discharge electrode, 7a, 7b... Insulating support, 8a, 8b... Peaking capacitor, 9.
...High voltage line, 10...Insulation part, 11...Electric field.

Claims (1)

【特許請求の範囲】 ガスレーザ媒質雰囲気中に対向配置された高圧側と低圧
側の主電極と、この主電極間の空間の近傍に配置された
予備放電電極と、主電極側方に配置されたコンデンサと
、コンデンサに蓄えられた電荷を前記予備放電電極を通
して主電極間で繰返し放電させ、パルス出力を発生させ
る高繰返し型のパルス発生装置において、 前記予備放電電極の主電極に対向する部分の直径を、こ
の部分の電界がガスレーザ媒質の放電電界より低い電界
になるように設定し、且つ予備放電電極の先端部の直径
を、主電極と対向する部分の直径よりも小さくしたこと
を特徴とするパルス発生装置。
[Claims] Main electrodes on the high-voltage side and the low-voltage side arranged oppositely in the gas laser medium atmosphere, a preliminary discharge electrode arranged near the space between the main electrodes, and a pre-discharge electrode arranged on the side of the main electrodes. In a high-repetition type pulse generator that generates a pulse output by repeatedly discharging the charge stored in the capacitor between a main electrode through the pre-discharge electrode, the diameter of the portion of the pre-discharge electrode that faces the main electrode. is set so that the electric field in this part is lower than the discharge electric field of the gas laser medium, and the diameter of the tip of the preliminary discharge electrode is smaller than the diameter of the part facing the main electrode. Pulse generator.
JP22830589A 1989-09-05 1989-09-05 Pulse generator Pending JPH0391977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22830589A JPH0391977A (en) 1989-09-05 1989-09-05 Pulse generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22830589A JPH0391977A (en) 1989-09-05 1989-09-05 Pulse generator

Publications (1)

Publication Number Publication Date
JPH0391977A true JPH0391977A (en) 1991-04-17

Family

ID=16874362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22830589A Pending JPH0391977A (en) 1989-09-05 1989-09-05 Pulse generator

Country Status (1)

Country Link
JP (1) JPH0391977A (en)

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