JPS62180935U - - Google Patents
Info
- Publication number
- JPS62180935U JPS62180935U JP1986069467U JP6946786U JPS62180935U JP S62180935 U JPS62180935 U JP S62180935U JP 1986069467 U JP1986069467 U JP 1986069467U JP 6946786 U JP6946786 U JP 6946786U JP S62180935 U JPS62180935 U JP S62180935U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- utility
- exhaust system
- registration request
- device characterized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986069467U JPS62180935U (xx) | 1986-05-08 | 1986-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986069467U JPS62180935U (xx) | 1986-05-08 | 1986-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180935U true JPS62180935U (xx) | 1987-11-17 |
Family
ID=30910226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986069467U Pending JPS62180935U (xx) | 1986-05-08 | 1986-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180935U (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0613135U (ja) * | 1992-07-24 | 1994-02-18 | 日新電機株式会社 | マルチプレ−ト型流体導入箱 |
-
1986
- 1986-05-08 JP JP1986069467U patent/JPS62180935U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0613135U (ja) * | 1992-07-24 | 1994-02-18 | 日新電機株式会社 | マルチプレ−ト型流体導入箱 |