JPS6218039Y2 - - Google Patents

Info

Publication number
JPS6218039Y2
JPS6218039Y2 JP15006782U JP15006782U JPS6218039Y2 JP S6218039 Y2 JPS6218039 Y2 JP S6218039Y2 JP 15006782 U JP15006782 U JP 15006782U JP 15006782 U JP15006782 U JP 15006782U JP S6218039 Y2 JPS6218039 Y2 JP S6218039Y2
Authority
JP
Japan
Prior art keywords
jig
holding
partial
workpiece
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15006782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5954929U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15006782U priority Critical patent/JPS5954929U/ja
Publication of JPS5954929U publication Critical patent/JPS5954929U/ja
Application granted granted Critical
Publication of JPS6218039Y2 publication Critical patent/JPS6218039Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Packaging Frangible Articles (AREA)
JP15006782U 1982-10-02 1982-10-02 ハイブリツドｉｃ等の薄板状ワ−クの保持用治具 Granted JPS5954929U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15006782U JPS5954929U (ja) 1982-10-02 1982-10-02 ハイブリツドｉｃ等の薄板状ワ−クの保持用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15006782U JPS5954929U (ja) 1982-10-02 1982-10-02 ハイブリツドｉｃ等の薄板状ワ−クの保持用治具

Publications (2)

Publication Number Publication Date
JPS5954929U JPS5954929U (ja) 1984-04-10
JPS6218039Y2 true JPS6218039Y2 (da) 1987-05-09

Family

ID=30332937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15006782U Granted JPS5954929U (ja) 1982-10-02 1982-10-02 ハイブリツドｉｃ等の薄板状ワ−クの保持用治具

Country Status (1)

Country Link
JP (1) JPS5954929U (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109154083B (zh) 2016-03-03 2021-02-05 核心技术株式会社 薄膜形成装置用基板托盘

Also Published As

Publication number Publication date
JPS5954929U (ja) 1984-04-10

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