JPS62179749U - - Google Patents

Info

Publication number
JPS62179749U
JPS62179749U JP1986146874U JP14687486U JPS62179749U JP S62179749 U JPS62179749 U JP S62179749U JP 1986146874 U JP1986146874 U JP 1986146874U JP 14687486 U JP14687486 U JP 14687486U JP S62179749 U JPS62179749 U JP S62179749U
Authority
JP
Japan
Prior art keywords
pattern
stage
ink
fine particles
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986146874U
Other languages
English (en)
Other versions
JPS6328421Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986146874U priority Critical patent/JPS6328421Y2/ja
Publication of JPS62179749U publication Critical patent/JPS62179749U/ja
Application granted granted Critical
Publication of JPS6328421Y2 publication Critical patent/JPS6328421Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】
図は、本考案の一実施例の構成図である。 図において、1はステージ、2は孔、3は移動
台、4は孔、5は試料、8はインク噴射装置、9
は制御部、10はテレビカメラ、11はテレビモ
ニタである。

Claims (1)

    【実用新案登録請求の範囲】
  1. 欠けによる欠陥を有するパターンを含む試料を
    載置するステージと、欠陥パターン修正用インク
    の微粒子を噴射するインク噴射装置とを備え、ス
    テージ上に載置された前記試料の欠陥パターン部
    分に前記インクの微粒子を噴射して欠けパターン
    を修正することを特徴とした欠陥パターン修正装
    置。
JP1986146874U 1986-09-25 1986-09-25 Expired JPS6328421Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986146874U JPS6328421Y2 (ja) 1986-09-25 1986-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986146874U JPS6328421Y2 (ja) 1986-09-25 1986-09-25

Publications (2)

Publication Number Publication Date
JPS62179749U true JPS62179749U (ja) 1987-11-14
JPS6328421Y2 JPS6328421Y2 (ja) 1988-08-01

Family

ID=31059731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986146874U Expired JPS6328421Y2 (ja) 1986-09-25 1986-09-25

Country Status (1)

Country Link
JP (1) JPS6328421Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05188401A (ja) * 1991-06-24 1993-07-30 Korea Electron Telecommun 大型薄膜トランジスタ(TFT)液晶ディスプレイパネル(LCD panel)の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05188401A (ja) * 1991-06-24 1993-07-30 Korea Electron Telecommun 大型薄膜トランジスタ(TFT)液晶ディスプレイパネル(LCD panel)の製造方法

Also Published As

Publication number Publication date
JPS6328421Y2 (ja) 1988-08-01

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