JPS62179536U - - Google Patents

Info

Publication number
JPS62179536U
JPS62179536U JP6516786U JP6516786U JPS62179536U JP S62179536 U JPS62179536 U JP S62179536U JP 6516786 U JP6516786 U JP 6516786U JP 6516786 U JP6516786 U JP 6516786U JP S62179536 U JPS62179536 U JP S62179536U
Authority
JP
Japan
Prior art keywords
air
ceiling
hepa filter
clean room
injection nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6516786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311645Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986065167U priority Critical patent/JPH0311645Y2/ja
Publication of JPS62179536U publication Critical patent/JPS62179536U/ja
Application granted granted Critical
Publication of JPH0311645Y2 publication Critical patent/JPH0311645Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Ventilation (AREA)
JP1986065167U 1986-05-01 1986-05-01 Expired JPH0311645Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986065167U JPH0311645Y2 (ko) 1986-05-01 1986-05-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986065167U JPH0311645Y2 (ko) 1986-05-01 1986-05-01

Publications (2)

Publication Number Publication Date
JPS62179536U true JPS62179536U (ko) 1987-11-14
JPH0311645Y2 JPH0311645Y2 (ko) 1991-03-20

Family

ID=30901992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986065167U Expired JPH0311645Y2 (ko) 1986-05-01 1986-05-01

Country Status (1)

Country Link
JP (1) JPH0311645Y2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012241961A (ja) * 2011-05-18 2012-12-10 Panasonic Corp クリーンルームの逆流防止装置
JP2017219207A (ja) * 2016-06-03 2017-12-14 ダイキン工業株式会社 食品の搬送式冷却システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6048431A (ja) * 1983-08-24 1985-03-16 Sanki Eng Co Ltd クリ−ンル−ムに発生する渦気流の消去方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6048431A (ja) * 1983-08-24 1985-03-16 Sanki Eng Co Ltd クリ−ンル−ムに発生する渦気流の消去方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012241961A (ja) * 2011-05-18 2012-12-10 Panasonic Corp クリーンルームの逆流防止装置
JP2017219207A (ja) * 2016-06-03 2017-12-14 ダイキン工業株式会社 食品の搬送式冷却システム

Also Published As

Publication number Publication date
JPH0311645Y2 (ko) 1991-03-20

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