JPS62179536U - - Google Patents
Info
- Publication number
- JPS62179536U JPS62179536U JP6516786U JP6516786U JPS62179536U JP S62179536 U JPS62179536 U JP S62179536U JP 6516786 U JP6516786 U JP 6516786U JP 6516786 U JP6516786 U JP 6516786U JP S62179536 U JPS62179536 U JP S62179536U
- Authority
- JP
- Japan
- Prior art keywords
- air
- ceiling
- hepa filter
- clean room
- injection nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986065167U JPH0311645Y2 (enrdf_load_stackoverflow) | 1986-05-01 | 1986-05-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986065167U JPH0311645Y2 (enrdf_load_stackoverflow) | 1986-05-01 | 1986-05-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62179536U true JPS62179536U (enrdf_load_stackoverflow) | 1987-11-14 |
| JPH0311645Y2 JPH0311645Y2 (enrdf_load_stackoverflow) | 1991-03-20 |
Family
ID=30901992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986065167U Expired JPH0311645Y2 (enrdf_load_stackoverflow) | 1986-05-01 | 1986-05-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311645Y2 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012241961A (ja) * | 2011-05-18 | 2012-12-10 | Panasonic Corp | クリーンルームの逆流防止装置 |
| JP2017219207A (ja) * | 2016-06-03 | 2017-12-14 | ダイキン工業株式会社 | 食品の搬送式冷却システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6048431A (ja) * | 1983-08-24 | 1985-03-16 | Sanki Eng Co Ltd | クリ−ンル−ムに発生する渦気流の消去方法 |
-
1986
- 1986-05-01 JP JP1986065167U patent/JPH0311645Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6048431A (ja) * | 1983-08-24 | 1985-03-16 | Sanki Eng Co Ltd | クリ−ンル−ムに発生する渦気流の消去方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012241961A (ja) * | 2011-05-18 | 2012-12-10 | Panasonic Corp | クリーンルームの逆流防止装置 |
| JP2017219207A (ja) * | 2016-06-03 | 2017-12-14 | ダイキン工業株式会社 | 食品の搬送式冷却システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311645Y2 (enrdf_load_stackoverflow) | 1991-03-20 |