JPS62179499U - - Google Patents

Info

Publication number
JPS62179499U
JPS62179499U JP6787486U JP6787486U JPS62179499U JP S62179499 U JPS62179499 U JP S62179499U JP 6787486 U JP6787486 U JP 6787486U JP 6787486 U JP6787486 U JP 6787486U JP S62179499 U JPS62179499 U JP S62179499U
Authority
JP
Japan
Prior art keywords
valve
gas
storage container
purge
ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6787486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0710160Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986067874U priority Critical patent/JPH0710160Y2/ja
Publication of JPS62179499U publication Critical patent/JPS62179499U/ja
Application granted granted Critical
Publication of JPH0710160Y2 publication Critical patent/JPH0710160Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
JP1986067874U 1986-05-06 1986-05-06 ガス貯蔵容器内の超高純度ガス取出し用弁装置 Expired - Lifetime JPH0710160Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986067874U JPH0710160Y2 (ja) 1986-05-06 1986-05-06 ガス貯蔵容器内の超高純度ガス取出し用弁装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986067874U JPH0710160Y2 (ja) 1986-05-06 1986-05-06 ガス貯蔵容器内の超高純度ガス取出し用弁装置

Publications (2)

Publication Number Publication Date
JPS62179499U true JPS62179499U (enrdf_load_stackoverflow) 1987-11-14
JPH0710160Y2 JPH0710160Y2 (ja) 1995-03-08

Family

ID=30907172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986067874U Expired - Lifetime JPH0710160Y2 (ja) 1986-05-06 1986-05-06 ガス貯蔵容器内の超高純度ガス取出し用弁装置

Country Status (1)

Country Link
JP (1) JPH0710160Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848799A (ja) * 1982-09-13 1983-03-22 Hitachi Ltd 羽根付ディフュ−ザ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848799A (ja) * 1982-09-13 1983-03-22 Hitachi Ltd 羽根付ディフュ−ザ

Also Published As

Publication number Publication date
JPH0710160Y2 (ja) 1995-03-08

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