JPS62179246U - - Google Patents
Info
- Publication number
- JPS62179246U JPS62179246U JP6670186U JP6670186U JPS62179246U JP S62179246 U JPS62179246 U JP S62179246U JP 6670186 U JP6670186 U JP 6670186U JP 6670186 U JP6670186 U JP 6670186U JP S62179246 U JPS62179246 U JP S62179246U
- Authority
- JP
- Japan
- Prior art keywords
- thin
- moving
- component
- thin component
- suction means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6670186U JPS62179246U (enExample) | 1986-04-30 | 1986-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6670186U JPS62179246U (enExample) | 1986-04-30 | 1986-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62179246U true JPS62179246U (enExample) | 1987-11-13 |
Family
ID=30904951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6670186U Pending JPS62179246U (enExample) | 1986-04-30 | 1986-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62179246U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01139441A (ja) * | 1987-11-24 | 1989-05-31 | Kyushu Electron Metal Co Ltd | ウエーハの枚葉化装置 |
| JPH07109038A (ja) * | 1993-10-15 | 1995-04-25 | Koken Kk | シート材の枚葉供給方法および装置 |
-
1986
- 1986-04-30 JP JP6670186U patent/JPS62179246U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01139441A (ja) * | 1987-11-24 | 1989-05-31 | Kyushu Electron Metal Co Ltd | ウエーハの枚葉化装置 |
| JPH07109038A (ja) * | 1993-10-15 | 1995-04-25 | Koken Kk | シート材の枚葉供給方法および装置 |