JPS62178530U - - Google Patents
Info
- Publication number
- JPS62178530U JPS62178530U JP6580786U JP6580786U JPS62178530U JP S62178530 U JPS62178530 U JP S62178530U JP 6580786 U JP6580786 U JP 6580786U JP 6580786 U JP6580786 U JP 6580786U JP S62178530 U JPS62178530 U JP S62178530U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- upper edge
- semiconductor wafer
- outer periphery
- conversion equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6580786U JPS62178530U (enExample) | 1986-04-30 | 1986-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6580786U JPS62178530U (enExample) | 1986-04-30 | 1986-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62178530U true JPS62178530U (enExample) | 1987-11-12 |
Family
ID=30903223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6580786U Pending JPS62178530U (enExample) | 1986-04-30 | 1986-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62178530U (enExample) |
-
1986
- 1986-04-30 JP JP6580786U patent/JPS62178530U/ja active Pending