JPS62177896A - El panel structure - Google Patents
El panel structureInfo
- Publication number
- JPS62177896A JPS62177896A JP61018085A JP1808586A JPS62177896A JP S62177896 A JPS62177896 A JP S62177896A JP 61018085 A JP61018085 A JP 61018085A JP 1808586 A JP1808586 A JP 1808586A JP S62177896 A JPS62177896 A JP S62177896A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light emitting
- intermediate layer
- light
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 15
- 239000012212 insulator Substances 0.000 claims description 11
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000000087 stabilizing effect Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔概要〕
本発明は、ELパネルの発光層界面近傍の電子準位を安
定させて発光特性を安定化することを目的としたもので
、発光層と第二絶縁層の間に、安定した界面電子状態を
作り出すことのできる中間層を設けることにより目的の
達成を図っている。[Detailed Description of the Invention] [Summary] The present invention is aimed at stabilizing the electronic level near the interface of the light-emitting layer of an EL panel to stabilize the light-emitting characteristics. This goal is achieved by providing an intermediate layer that can create a stable interfacial electronic state between the two.
本発明はELパネルに係り、特にパネルの発光特性を安
定化させることのできるELパネルの構造に関する。The present invention relates to an EL panel, and more particularly to a structure of an EL panel that can stabilize the light emitting characteristics of the panel.
ELパネルは、透明電極と背面電極の間に発光層を形成
してなり、各種表示、光源用として広く使用されている
。EL panels have a light-emitting layer formed between a transparent electrode and a back electrode, and are widely used for various displays and light sources.
このようなELパネルにおいては、発光特性を安定化さ
せることが重要な課題となる。In such an EL panel, stabilizing the light emission characteristics is an important issue.
この種の従来のELパネルの構造を第3図に示す。図中
、1はガラス基板、2は透明電極、3は発光中心不純物
を含んだZn S多結晶膜の発光層、4は背面電極であ
る。発光層3は、基板1上に形成された透明電極2の上
に第一絶縁層5を介し形成され、該発光層3と背面電極
4の間には第二絶縁層6が形成されている。発光層3の
形成は、真空蒸着またはスパッタリングにより行われる
。The structure of this type of conventional EL panel is shown in FIG. In the figure, 1 is a glass substrate, 2 is a transparent electrode, 3 is a light emitting layer of a ZnS polycrystalline film containing a luminescent center impurity, and 4 is a back electrode. The light emitting layer 3 is formed on the transparent electrode 2 formed on the substrate 1 with a first insulating layer 5 interposed therebetween, and a second insulating layer 6 is formed between the light emitting layer 3 and the back electrode 4. . The light emitting layer 3 is formed by vacuum deposition or sputtering.
ところが、上述のような従来のパネル構造では、Zn
Sの発光層と第二絶縁層との間に安定した界面電子状態
を作り出すことができず、発光特性の安定化を図ること
ができなかった。However, in the conventional panel structure as described above, Zn
A stable interfacial electronic state could not be created between the S light emitting layer and the second insulating layer, and the light emitting characteristics could not be stabilized.
本発明は上述の問題点を解決することのできるELパネ
ルの構造を提供するもので、そのための手段として、第
一図に示す構成を採用している。The present invention provides a structure of an EL panel that can solve the above-mentioned problems, and as a means for this purpose, the structure shown in FIG. 1 is adopted.
すなわち、本発明では、発光層と第二絶縁層との間に、
発光中心不純物を含まないZn Se中間層と、酸化物
絶縁体中間層とを、発光層側から順に形成している。That is, in the present invention, between the light emitting layer and the second insulating layer,
A Zn Se intermediate layer that does not contain luminescent center impurities and an oxide insulator intermediate layer are formed in this order from the luminescent layer side.
発光中心不純物を含まないZn Se中間層は、発光層
と酸化物絶縁体中間層間における不純物あるいは結晶性
の乱れに起因する不必要な電子準位をなくす役割を果た
す。また、Zn Seは不純物量制御がZn S等の場
合より容易なため、発光層と第二絶縁層との間の電子準
位を人為的に制御することができる。The Zn Se intermediate layer, which does not contain luminescent center impurities, plays a role in eliminating unnecessary electronic levels caused by impurities or disordered crystallinity between the luminescent layer and the oxide insulator intermediate layer. Furthermore, since the amount of impurities in ZnSe is easier to control than in the case of ZnS, etc., it is possible to artificially control the electronic level between the light emitting layer and the second insulating layer.
酸化物絶縁体中間層はスパッタリングにより形成される
が、該酸化物絶縁体中間層は、深い電界準位を安定化さ
せる役割を果たす。The oxide insulator intermediate layer is formed by sputtering, and serves to stabilize deep electric field levels.
以下、第1図及び第2図に関連して本発明の詳細な説明
する。The present invention will now be described in detail with reference to FIGS. 1 and 2.
第1図は本発明に係るELパネルの構造を示す断面図で
、図中、11はガラス基板、12及び13は基板11上
に順次形成された透明電極及び第一絶縁層である。第一
絶縁層13上には、発光層14と、発光中心不純物を含
まない(不純物量が制御された)Zn Se中間層15
並びに酸化物絶縁体中間層16と、第二絶縁層17と、
背面電極18が順次形成されてELパネルが構成される
。FIG. 1 is a cross-sectional view showing the structure of an EL panel according to the present invention. In the figure, 11 is a glass substrate, 12 and 13 are transparent electrodes and a first insulating layer that are sequentially formed on the substrate 11. On the first insulating layer 13, there is a light emitting layer 14 and a ZnSe intermediate layer 15 that does not contain a light emitting center impurity (the amount of impurity is controlled).
and an oxide insulator intermediate layer 16, a second insulating layer 17,
Back electrodes 18 are sequentially formed to form an EL panel.
発光層14.Zn5e中間層15.酸化物絶縁体中間層
16の形成要領は次の通りである。Luminescent layer 14. Zn5e intermediate layer 15. The procedure for forming the oxide insulator intermediate layer 16 is as follows.
発光層14は、真空蒸着により形成され、多量の発光中
心不純物を含有している。発光層14の上には、発光中
心不純物を含まない薄いZn Se中間層15が真空蒸
着により形成され、その上には、薄い酸化物絶縁体中間
層16がスパッタリングにより形成される。この酸化物
絶縁体中間層16の上には引き続き第二絶縁層17が形
成される。The light emitting layer 14 is formed by vacuum deposition and contains a large amount of light emitting center impurities. On the light emitting layer 14, a thin Zn Se intermediate layer 15 containing no emission center impurity is formed by vacuum evaporation, and thereon a thin oxide insulator intermediate layer 16 is formed by sputtering. A second insulating layer 17 is subsequently formed on this oxide insulating intermediate layer 16.
Zn Se中間層15.酸化物絶縁体中間層16の果た
す役割は次の通りである。Zn Se intermediate layer 15. The role played by the oxide insulator intermediate layer 16 is as follows.
発光層14には、上述のように多量の発光中心不純物が
含まれていて、結晶のストキオメトリーからのずれ、結
晶性の乱れがあり、しかも発光中不純物中に他の不純物
が含まれているため、第2図に示すようにZn Sのバ
ンドギャップ間に多くの電子準位ができる。一方、Zn
Se中間層15は、発光中心不純物を含まないため、
発光層14と第二絶縁層17の界面に不必要な電子準位
をなくす役割を果たす。また、Zn Se中間層15の
材料のZn Seは不純物量の制御がZn Sより容易
なため、発光層14と第二絶縁層17の間の電子準位を
人為的に制御することができる。さらに、スパッタリン
グにより形成される酸化物絶縁体中間層16は、深い界
面準位を安定化させる役割を果たす。このことは、次表
1に示すようにELパネルの輝度−電圧特性の立ち上が
り電圧VlfLが高くなることから確認できる。浅い界
面準位は、酸化物絶縁体中の酸素の影響で埋められると
考えられる。The light-emitting layer 14 contains a large amount of light-emitting center impurities as described above, and there is a deviation from the crystal stochiometry and disordered crystallinity, and in addition, other impurities are included in the light-emitting impurities. Therefore, as shown in FIG. 2, many electronic levels are created between the band gaps of ZnS. On the other hand, Zn
Since the Se intermediate layer 15 does not contain luminescent center impurities,
It serves to eliminate unnecessary electronic levels at the interface between the light emitting layer 14 and the second insulating layer 17. Further, since the impurity amount of ZnSe, which is the material of the ZnSe intermediate layer 15, can be controlled more easily than ZnS, the electronic level between the light emitting layer 14 and the second insulating layer 17 can be artificially controlled. Furthermore, the oxide insulator intermediate layer 16 formed by sputtering plays a role in stabilizing deep interface states. This can be confirmed from the fact that the rising voltage VlfL of the luminance-voltage characteristic of the EL panel becomes higher as shown in Table 1 below. It is thought that the shallow interface states are filled by the influence of oxygen in the oxide insulator.
表1
〔発明の効果〕
以上述べたように、本発明によれば、次の各種の優れた
効果を奏することが可能である。Table 1 [Effects of the Invention] As described above, according to the present invention, the following various excellent effects can be achieved.
(1) E Lパネルの発光層界面近傍の電子準位を安
定させて、発光特性の安定化を図ることが可能である。(1) It is possible to stabilize the electronic level near the interface of the light-emitting layer of the EL panel, thereby stabilizing the light-emitting characteristics.
(2)発光層と第二絶縁層の間の電子準位を人為的に容
易に制御することができる。(2) The electronic level between the light emitting layer and the second insulating layer can be easily controlled artificially.
第1図は本発明の実施例のELパネルの構造を示す断面
図、
第2図は本発明のELパネルの作用説明図、第3図は従
来のELパネルの構造を示す断面図で、
図中、
12は透明電極、
13は第一絶縁層、
14は発光層、
15はZn Se中間層、
16は酸化物絶縁体中間層、
17は第二絶縁層、
18は背面電極である。FIG. 1 is a cross-sectional view showing the structure of an EL panel according to an embodiment of the present invention, FIG. 2 is an explanatory view of the operation of the EL panel according to the present invention, and FIG. Inside, 12 is a transparent electrode, 13 is a first insulating layer, 14 is a light emitting layer, 15 is a ZnSe intermediate layer, 16 is an oxide insulator intermediate layer, 17 is a second insulating layer, and 18 is a back electrode.
Claims (1)
方の面に第二絶縁層を介し背面電極をそれぞれ形成して
なるELパネルにおいて、 前記発光層と前記第二絶縁層との間に、 発光中心不純物を含まないZn Se 中間層と、酸化
物絶縁体中間層を発光層側から順に形成したことを特徴
とするELパネルの構造。[Scope of Claims] An EL panel in which a transparent electrode is formed on one surface of a light-emitting layer through a first insulating layer, and a back electrode is formed on the other surface through a second insulating layer, wherein the light-emitting layer and the A structure of an EL panel characterized in that a Zn Se intermediate layer containing no emission center impurity and an oxide insulator intermediate layer are formed in order from the light emitting layer side between the second insulating layer and the second insulating layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61018085A JPS62177896A (en) | 1986-01-31 | 1986-01-31 | El panel structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61018085A JPS62177896A (en) | 1986-01-31 | 1986-01-31 | El panel structure |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62177896A true JPS62177896A (en) | 1987-08-04 |
Family
ID=11961806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61018085A Pending JPS62177896A (en) | 1986-01-31 | 1986-01-31 | El panel structure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62177896A (en) |
-
1986
- 1986-01-31 JP JP61018085A patent/JPS62177896A/en active Pending
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