JPS62177516A - Device for observing shape of fine substance such as magnetic head - Google Patents

Abstract

PURPOSE:To observe the shape of a fine substance by constituting the titled device of horizontal and vertical microscopes, monitor TVs, a reference block positioning mechanism, and a moving mechanism. CONSTITUTION:A device for observing the shape of a fine substance such as a magnetic head consists of the horizontal and vertical microscopes 3, 6 fixed on a supporting stand to form observing positions or portions, monitor TVs 5, 8 respectively connected to the microscopes 3, 6 to immediately observe real images magnified by the microscopes, the reference block positioning mechanism 29 capable of positioning the substance to be observed, and the moving mechanism 9 having a moving body for moving the substance to be observed from the mechanical reference surface to an observing position or a portion. Consequently, the substance to be observed such as a magnetic head whole leading end is fragile and is easily damaged can be also simultaneously observed by the monitor TVs.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an apparatus for observing the shape of minute objects, such as magnetic heads used in VTRs.

``Prior Art'' The material piece of a magnetic head is made of ferrite material, which is brittle and easily damaged from the viewpoint of 1f wear resistance and frequency characteristics. Particularly in the case of home VTRs, ferrite is used for overall performance, but this performance is determined not only by the material of the material piece, but also by the so-called gill depth (Gd), gluing height ( o), track width (T
w), and the core thickness Cw).

Therefore, in manufacturing a magnetic head, in the case of a magnetic head in which a material piece protrudes from the base body, the gap depth Gd), gluing height HO), track Width (Ding W
), it is very important to measure the core thickness CW).

However, current magnetic head observation devices in the industry are difficult to use because the material pieces of the magnetic head are fragile and easily damaged.
The magnetic head is placed on the fixing plate by aligning the rear end surface of the base body of the magnetic head with a part of the stopper formed or provided on the fixing plate of the device, and then the position of the microscope is shifted to adjust the focus. there were.

Therefore, with conventional observation devices, if the shape and dimensions of the object to be measured are different, for example the attachment position of the #1 piece in the protruding direction, the focus of the microscope must be adjusted every time the magnetic head is replaced. In order to improve work efficiency, only one horizontal or vertical microscope is installed, and the above-mentioned Gd, Ho, TW, and CW can be measured individually or between Tw and CW.
The reality is that it is only possible to measure both together.

Therefore, multiple observers are required, and each time the magnetic head is replaced, the attachment position of the material piece in the protruding direction is different, so the focus of the microscope must be adjusted each time, which is very time-consuming. It cost.

[Problems to be Solved by the Present Invention] In view of the above-mentioned conventional drawbacks, the present invention has been developed to solve the following problems: Core thickness CW)
can be visually observed by one observer at a time, and there is no need to adjust the focus of the microscope each time, even if the shape of the object to be measured, for example, the position in which the material piece of the magnetic head is attached in the protruding direction, differs. Furthermore, it is possible for an observer to casually place an object to be measured on a moving object and then move it from a mechanical reference surface to an observation position or part without damaging the tip surface of the object. The objective is to obtain a device that can observe the shape of minute objects such as magnetic heads.

[Means for Solving the Problems] The device for observing the shape of a minute object such as a magnetic head of the present invention has horizontal and vertical directions fixedly provided on a support base to form an observation position or part. A microscope, a monitor television that is connected to each of these microscopes so that the magnified real image of the microscope can be immediately observed with the eye, a reference/block positioning mechanism that can position the object to be measured, and a mechanism for positioning the object to be measured by the machine. and a moving mechanism having a moving body that moves from a standard reference plane to the observation position or site.

"Embodiments of the present invention" The present invention will be described in detail below with reference to embodiments shown in the drawings.

In one embodiment shown in FIGS. 1 to 13, reference numeral 1 denotes a minute object such as a magnetic head, and in this example, the so-called gap depth (Gd) of a magnetic head 2 of a household VTR as shown in FIG. Crucifixion height (HO), track width (Tw
), core thickness Cw), and the magnetic head 2 includes a rectangular base body 2b having an engagement hole 2a in the center, and a base body 2b having an engaging hole 2a in the center. It is composed of a material piece (head chip) 2d having an arcuate tip surface and fixedly attached to a mounting portion 2C protruding from the tip surface so as to further protrude. Reference numeral 3 denotes a horizontal microscope fixedly installed on a first support base 4, and as shown in FIG. The first system that can project an enlarged real image of the image (CW) on the screen.
Monitor TV 5 is connected. 6 is the second support stand 7
This microscope 6 is fixedly installed in a vertical direction, and a 272-terrestrial television 8 is connected to this microscope 6, which is capable of projecting an enlarged real image of the gap depth (Gd) of the magnetic head 2 on the screen. There is. Therefore, in the present invention, if the axis of the microscope 3 in the horizontal direction is the X axis, and the axis of the microscope 6 in the vertical direction is the Z axis, then the region to be measured where the X axis and the Z axis intersect is Determine the observation position or part O of the object and focus each microscope 3.6 in advance. Reference numeral 9 denotes a moving mechanism for moving the object 2 to be measured from a place different from the observation position or part O to the observation position or part O as shown in FIG. 6, and this moving mechanism 9 is driven as shown in FIG. A rotating shaft 12 that is rotated by a power source 10 and has a male thread 11 on the outer periphery, and a female thread 13 that engages with the male thread 11 of this rotating shaft 12, and reciprocates in the axial direction by the rotation of the rotating wheel. Possible cylindrical threaded body 14 and this threaded body 14
a rectangular connecting plate 15 which is fixedly fitted into the connecting plate 15; and a vertical connecting plate whose lower end is connected to the connecting plate 15 by a plurality of fasteners 16 and whose upper end is attached to a movable body 17 that moves horizontally. The movable body 11 is guided by a guide plate 20 provided on a table plate 19 horizontally suspended above the observation device. A fixed cam member 21 is fixedly provided on the table plate 19 below the movable body 17 and in front of the guide plate 20.
As shown in FIG. 11, the upper surface 21a and the front surface 21b are each formed with a tapered surface that is continuous with the other surface so that a single member can perform a plurality of guiding functions. Reference numeral 22 denotes a side guide piece in the shape of a rhombus, which is fixed at the tip of the movable body 11 and at the corner on the forward direction side.
A pressing member 23 that can push the magnetic head 2 toward the mechanical reference plane Y is attached. As shown in FIG. 12, this pressing member 23
The movable pin 23b is swingably supported in the outer cylinder 23a via a pivot pin, and the spring member 23c constantly biases the movable pin 23b in one direction. The upper part of the pin 23b protrudes somewhat from the upper surface of the outer cylindrical body 23a, and the lower part of the movable pin 23b has a rotating part whose outer peripheral part presses against the upper part of the front side surface 21b of the fixed cam member 21 described above. A moving body 23b is provided with a bearing (not shown) interposed therebetween. Reference numeral 24 denotes a movable arm whose rear end is indirectly pivoted to the movable body 17 above the movable body 17 and whose tip end can fix the magnetic head 2 placed on the movable body 17. 24 is constantly biased downward by a coil spring 26 attached to a column 25 that passes through the center of the movable arm 24 and is erected on the movable body 17. Reference numeral 27 denotes a bushing rod that loosely fits through a vertical hole formed in the movable body 17 and raises and lowers the movable arm 24. The head of this bushing rod 27 comes into contact with the lower surface of the movable arm 24 near the tip, while the lower part is supported by the rear side of the upper surface 21a of the fixed cam member 21 (in FIG. 11, the location marked with many dots) and slides therein. Reference numeral 28 denotes a stopper piece fixed to the tip of the movable body 17 so as to protrude from the corner of the lower surface on the backward direction side, and this stopper piece 28 is mechanically attached as shown in FIG. 5 or 6. It protrudes somewhat outward from the reference plane Y. Reference numeral 29 denotes a reference block positioning mechanism disposed on the lower part 19a of the table plate 19 described above at a position outside the mechanical reference plane Y. This reference block positioning mechanism 29 is fitted onto the vertical shaft 30. And pushing = I The degree member 31 is constantly biased in the direction of the arrow shown in the fifth figure by a spring member (not shown) having a stronger spring force than the spring member 23c of the pushing member, and the proximal end portion of this fitting member 31 is connected to each other. A plurality of horizontal guide bars 3 are attached and have flanges at their free ends.
2, and these horizontal guide bars 32 are inserted and transferred.
A reference block 34 that can move horizontally with respect to the body 17 and has a vertical observation reference surface 33 on the inside; A plurality of spring members 35 are respectively wound around the horizontal guide bar 32 between the reference block 34 and a plurality of spring members 35 which integrally protrude from the observation reference surface 33 of the reference block 34 and slide on the lower side of the front side surface 21b of the fixed cam member 21. The rear surface of the reference block 34 is in contact with the stopper piece 28 mentioned above from the start.

In the above configuration, first, the reference block 34 and the moving body 1 are
As shown in FIG. 5, the reference block 34 is located at the observation position of the observation device 1 or at a starting position remote from the part O, and the reference block 34 is stopped by the stopper piece 28 of the moving body and the fitting member 31 is stopped. The protruding pin 36 is biased by the spring member and the spring member 35 of the horizontal guide bar 32, and the protruding pin 36 is attached to the first
abutting the lower part of the vertical surface 40 and, as a result, the reference block 34
The observation reference plane 33 is located outside the mechanical reference plane Y. At this time, the outer peripheral part of the rotating body 23d of the pressing member 23 contacts the upper part of the first vertical surface 40 of the front side surface 21b of the fixed cam part 4421 while resisting the spring force of the spring member 230, and the movable pin 23b is moved as shown in FIG. As shown in FIG. 8, the rear end of the movable body 17 is slightly tilted diagonally to the right. On the other hand, the lower end of the bushing rod 27 is supported by the first horizontal surface 41 on the rear side of the upper surface 21a of the fixed cam member 21, and as a result, the movable arm 24 is supported by the head of the bushing rod 21 as shown in FIG. It is being pushed up against the spring force.

When observing the polygonal magnetic head 2 shown in FIG. 13 as an example of the object to be measured, the upper part of the movable pin 23b of the member 23 is pressed against the engagement hole 2a of the magnetic head 2 as shown in FIG. The magnetic head 2 is arbitrarily or casually placed on the movable body 11 so that the magnetic head 2 is engaged with the magnetic head 2 . In this case, it is sufficient that the magnetic head 2 is properly placed within the side guide piece 22 so that the engagement hole 2a and the movable pin 23b are engaged with each other such that i Itf<<. Next, when the rotation shaft 12 is rotated by the drive source 10, the screw assembly 14 begins to move in the direction of the arrow as shown in FIG. Therefore, since the movable body 17 is also integrally connected to the threaded body 14 via the connecting plate 15 and the vertical connecting rod 18, the guide plate is moved along the mechanical reference plane Y as shown in FIG. 20 starts moving horizontally in the direction of the arrow. However, as the movable body 11 moves, the reference block 34 is pushed by the stopper piece 28 and moves in the same direction as the movable body 11 at the same speed as the movable body 11 while resisting the spring force of the spring member 35. 36 slides from the lower part of the first vertical surface 40 of the front side surface 211) of the fixed cam member 21 to the lower part of the tapered surface 42 that follows, and then to the lower part of the second vertical surface 43 that is continuous with the tapered surface 42. reach At this time, the reference block 34 is moved inward by the tapered surface 42, and its observation reference plane 33 completely coincides with the mechanical reference plane Y as shown in FIG.

On the other hand, the rotating body 23d of the pressing member 23 is connected to the protruding pin 3.
Similarly to 6, the fixed cam member 21 travels while sequentially rotating each surface on the upper side of the front side surface 21b. Then, as shown in FIG. 10, the movable pin 23b gradually tilts in the angular direction, approximately 45 degrees in this embodiment, and as a result, one side wall of the base body 2b of the magnetic head 2
The magnetic head 2 is pressed and slid into sliding contact with the side guide portion 22a of the magnetic head 2, and the magnetic head 2 is pushed forward. Then, the tip of the material piece 2d of the magnetic head 2 lightly abuts against the observation reference plane 33 of the reference block 34 located on the mechanical reference plane Y, and positioning is achieved. After positioning the magnetic head 2 with the front end surface as a reference, the movable arm 2
4 is completely pushed down by the coil spring 2G as shown in FIG. 4, and the magnetic head is fixed. Now, to describe the operating mode of the movable arm 24, the fixed cam part'@2
When the bush rod 27 is located on the first horizontal plane 41 of the first horizontal plane 41, the movable arm 24 is pushed up as described above, the movable body 17 moves, and the bush rod 27 moves to the first horizontal plane 41.
When located on the tapered surface 44 connected to the tapered surface 4
4 is gradually pushed down by the coil spring 26. Then, the lower second horizontal surface 45 connected to the tapered surface 44 is completely lowered.

As the movable body 11 continues to move further, the reference block 29 is moved to the tapered surface 46 formed by the projecting pin 36 projecting from the lower part of the front side surface 21b of the fixed cam member 21, as shown in FIG. As a result, the protruding portion 47 slides on the tapered surface 46 of the protruding portion 47, and as a result, it separates from the magnetic head 2 without rubbing the tip surface and also comes off the stopper piece 28, and the spring of the spring member 36 is released before reaching the observation position or portion O. The force pushes it back to its original position. Finally, the movable body 17 moves to the desired position, and the magnetic head 2
The leading end surface of the material piece 2b is positioned at the observation position or part 0 of the observation device 1.

The tip surface of the material piece 2d of the magnetic head 2 thus positioned at the observation position or location O is exposed to the microscope 3.
6 and displayed on monitor TV 5.8.

That is, as shown in FIG. 1, the monitor TV 5 has a horizontal microscope! A real image of the mounting height (T(0), track width (Tw), and core thickness Cw) of the magnetic head 2 magnified by 113 is displayed on the monitor television 8, which is magnified by a vertical microscope VT6. The actual image of the gill depth Gw) of the magnetic head 2 is clearly projected.

In the above embodiment, a protective band such as sea urchin magnetic tape is cut to an appropriate length and attached to the observation reference surface of the reference block 34 so as not to damage the tip end surface of the material piece 2d of the magnetic head 2. It's good to keep it.

Also, for example, the moving body 17 of the moving mechanism 9 and the guide plate 20
Various design changes can be made to the relationship.

"Effects of the present invention J As is clear from the above explanation, the present invention has the following effects.

(1) Even if the tip surface is fragile and easily damaged, such as a magnetic head or other object to be measured, the points to be observed based on the tip surface, such as the magnetic head gap depth (Gd), gluing height (HO), track The width (T' W ) and the core thickness can be observed at the same time using a monitor television.

Therefore, even a single observer can perform sufficient observation, thereby saving labor.

(2) When observing, the observer may arbitrarily or casually place the object to be measured on the moving body.

That is, the object to be measured placed on the movable body is automatically positioned by the reference block positioning mechanism and the pressing member, and is transported from the mechanical reference plane Y to the observation position or site O by the movable body.

Therefore, observation is easy and, for example, various V
Even magnetic heads used for TR can be placed on a moving body and observed.

Therefore, when the object to be measured is a magnetic head, there is no need to adjust the focus of the microscope every time the magnetic head is replaced even if the attachment position of the material piece in the protruding direction is different.

(3) In the case of an embodiment using a fixed cam member having a plurality of guide tapered surfaces, the movable pin of the pressing member may be tilted, the reference block may be guided to a mechanical reference surface, Alternatively, since the movable arm can be moved up and down via the bushing rod, the number of parts constituting the observation device can be reduced.

(4) In the case of an embodiment in which a side guide piece is provided on the movable body, a pressing member pushes the magnetic head in an angular direction, and the magnetic head is pushed forward while slidingly contacting the side guide part of the side guide piece. The magnetic head can be pushed out to the observation reference surface of the reference block in an accurate posture.

(5) In the case of other embodiments in which the reference block is separated from the moving faJ body before reaching the observation position or part 0 and is returned to its original position by a spring member, the reference block is
It won't be the 1st revenge of 3.6.

[Brief explanation of drawings]

1 to 12 show one embodiment of the present invention, in which FIG. 1 is a schematic explanatory diagram showing the arrangement of the microscope, etc., FIG. 2 is a schematic explanatory diagram showing the moving mechanism, and FIG. Figure 4 is an explanatory diagram that does not show the operating mode of the movable arm, and Figures 5 to 7 are the reference block of the reference block positioning prosthesis! 1;JJ
Each explanatory diagram, FIGS. 8 to 10, does not show the mode, but the movement Ia
Each schematic explanatory view of placing the object to be measured on the movable body of the frame and pushing it forward with the pressing member, FIG. 11 is a perspective view of the fixed cam member, FIG. 12 is a perspective view of the pressing member, and FIG. 13 is the main body. FIG. 1 is a perspective view showing an example of an object to be measured that can be observed in the present invention. 1...Observation\A placement, 2...Magnetic head, 3
．． 6...Microscope, 5.8...Monitor TV,
9...Movement i-structure, 12...Rotation axis, 17.
・・Moving body, 19・Table board, 20・
... Guide plate, 21 ... Fixed cam member, 22
... Side guide piece, 23 ... Pressing member, 2
3b...Movable pin, 24...Movable arm, 2
7... Butsch rod, 28... Stopper piece,
29... Reference block positioning mechanism, 34... Reference block, 36... Projection pin. Patent Applicant: FT Giken Co., Ltd. Agent Patent Attorney: Mitsu Yasushi Miura Figure 3 Figure 4 Figure 5 Figure wE6 Figure 7 Figure 8 Figure 1O

Claims (1)

[Claims] 1) Horizontal and vertical microscopes fixedly provided on a support base to form an observation position or region, and a microscope connected to each of these microscopes so that an enlarged real image of the microscope can be immediately seen with the eye. A moving mechanism including a monitor television capable of observing, a reference block positioning mechanism capable of positioning an object to be measured, and a moving body that moves the object to be measured from a mechanical reference plane to the observation position or part. A device that observes the shape of minute objects such as magnetic heads. 2) The moving body of the moving mechanism is provided with a pressing member capable of pushing the object to be measured to a mechanical reference surface. A device that observes the shape of objects. 3) The reference block positioning mechanism is provided with a reference block having a protruding pin that slides on the front side of the fixed cam member. A device for observing shapes. 4) A movable arm capable of fixing an object to be measured is pivotally supported on the moving body of the moving mechanism. Equipment for observation. 5) The magnetic field according to claim 2, characterized in that a fixed cam member that can guide at least the movable pin of the pressing member into a tilted state is provided below the moving body of the moving mechanism. A device that observes the shape of minute objects such as heads.