JPH0782076B2 - Stage device for probe contact - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe contact stage device used for conducting a test, an inspection or the like by bringing a probe into contact with a connection pattern or the like of a liquid crystal display device (referred to as LCD). .

[0002]

2. Description of the Related Art When testing and inspecting the lighting state of an LCD, the LCD is placed flat on a pallet and the pallet is positionally adjusted in the X-axis direction, the Y-axis direction, and the rotation (θ) direction. Then, a probe installed at a predetermined position is brought close to the connection pattern to make an electrical contact, and a test and an inspection are performed.

The device for adjusting the pallet is constructed by stacking a stage for the X-axis direction, a stage for the Y-axis direction, and a stage for the θ direction. When adjusting the position of the pallet and the LCD on the upper surface of the pallet, the position of the pallet is monitored by a video camera, and the adjustment position pattern is displayed for the adjustment work.

[0004]

First, according to the conventional stage device, since the stages in the X, Y axis, and θ directions are stacked, the thickness is very large, and the height of the entire stage is high. There is a problem that the person's viewpoint is also high and it is difficult to see. Further, when the adjustment status is monitored by the video camera, the position where the video camera is placed becomes a problem. When observing the adjustment position pattern, the video camera should be placed above or below the LCD in the vertical direction.
If it is placed on the upper side, the camera may project to the working side, which is dangerous. In addition, the camera is an obstacle when the LCD is attached or detached, and the workability is poor. The camera may come into contact with an operator, and in such a case, the optical axis of the camera is deviated and accurate position pattern monitoring cannot be obtained. When a camera is arranged below the LCD for monitoring, it interferes with the backlight and a good monitoring image cannot be obtained. In addition, the position where the LCD is arranged must be increased, and the operator's viewpoint becomes high, resulting in poor workability.

Therefore, according to the present invention, the position adjusting stage is made thin, the adjusting work is easy, and the space for arranging the video camera for monitoring can be obtained, so that there is no trouble in the work due to the video camera. Thus, it is an object of the present invention to provide a stage device capable of highly accurate contact.

[0006]

SUMMARY OF THE INVENTION This invention comprises a pallet inspection plate body is placed at a predetermined position, a base plane undergo movably on the upper surface of the pallet, said pallet on said base Arranged on the upper surface of the base is an adjusting unit that is driven from the edge direction to adjust the position in the X-axis direction, the Y-axis direction orthogonal thereto, and the plane rotation direction.
Then, pass the light through the inside of the base and connect the light guide to the base.
To the edge of the camera, and then to guide this light out to the camera.
Position of the pallet by the adjusting means.
Monitor the adjustment status with the monitor connected to the camera section.
And an optical system path made visible.

[0007]

[0008]

By the above means, the adjusting means is flat,
The entire device can be made thin, and the video camera for monitoring can be arranged at a position separated from the periphery of the pallet by the optical system path.

[0009]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of the present invention. 100
Is a rectangular base. The base 100 is arranged at a predetermined position below the probe, for example. Base 10
At the center of the upper surface of 0, a rectangular pallet 200 is placed. The area of the pallet 200 is smaller than that of the base 100, so that the pallet 200 can move in a plane on the base.
It is mounted via a slide bearing 111 (see FIG. 1B).

Plungers 101, 101, for example, are attached to the upper surface of the base 100 on one side in the X-axis direction so as to elastically press the edge of the pallet 200 in the arrow X (-) direction. An adjusting screw 104 is engaged with a bearing 103 on the upper surface of the other side of the base 100 facing the plungers 101, 101. When the adjusting screw 104 is rotated in a predetermined direction, the edge of the pallet 200 is fixed. The pallet 200 can be pushed and driven in the X (+) direction. In addition, for example, the plunger 10 is provided on the upper surface of the base 100 on one side in the Y-axis direction.
2, 102 are attached, and are configured to elastically press the edge of the pallet 200 in the arrow Y (-) direction. The adjusting screws 106, 1 are provided on the upper surface of the other side of the base 100 facing the plungers 102, 102.
08 is engaged with the bearings 105 and 107. When the adjusting screws 106 and 108 are rotated in a predetermined direction, the edge of the pallet 200 is pushed to move the pallet 20 in the Y (+) direction.
0 can be driven. To adjust the rotation (θ) direction,
It can be adjusted by the amount of rotation of the adjusting screws 106 and 108.

Next, a liquid crystal display device (LCD) 300 can be arranged at a predetermined position in the center of the pallet 200. By adjusting the position of the pallet 200, the LCD 300 is positioned with respect to the contact.

According to this system, when the pallet 200 is positioned (that is, the LCD 300 is positioned), for example, the wiring pattern of the LCD 300 is enlarged and imaged by a video camera and compared with the reference pattern stored in the memory on the screen. However, the position of the pallet 200 is adjusted so that the wiring pattern and the reference pattern match.

Therefore, from the base 100 to the pallet 200
Alignment is performed by viewing, for example, two positions (not necessarily limited to this position) of the edge portion of the LCD 300 through the opening of. Therefore, the light introducing parts 401 a and 402 a are provided in the base 100, for example, at two positions facing the upper surface side. The light introducing portions 401a and 402a have L
An image of the CD wiring pattern is introduced from above. The light introduced into the light introducing portions 401a and 402a is guided at a right angle, and the light deriving portion 401b at the edge portion of the base 100,
402b (see FIG. 1B). For example, a right-angle prism or a reflecting mirror is used in this optical system path. Light derivation units 401b and 402
The light of b is guided to the video camera. The image captured by the video camera is displayed on the monitor. For example, a reference pattern is displayed on the monitor, and the LCD 3 is displayed on the reference pattern.
The pallet position (LCD position) is adjusted by the position adjusting means so that the wiring pattern of 00 matches. When the patterns match, the probe descending from the upper side is set to match a predetermined connection point of the LCD. That is, the imaging position of the video camera and the probe position of the probe device are set in advance in a predetermined positional relationship. The number of light introducing portions may be one or more, and the area is arbitrary.

FIG. 2 shows another embodiment of the present invention. In the above embodiment, the adjusting screw 10 is provided in both the X-axis direction and the Y-axis direction.
4, 106, and 108 are adjusted, but in the embodiment of FIG. 2, a shaft 50 penetrating the bearing portion of the base 100 is provided as means for adjusting in the X-axis direction, and the shaft is adjusted by rotating the adjustment motor 51. It was made possible. Therefore, instead of the adjusting screw 104 of the previous embodiment, the base 100 is provided with the ball bearing 53, which holds down the edge of the pallet 200. Reference numeral 54 is an X-axis direction guide rod.

In the above embodiment, the slide bearing 111 is used as a means for movably supporting the pallet 200 with respect to the base 100, but after adjustment, the pallet 200 is attracted to the base 100 using a vacuum suction device. You may make it a fixed state. The adjustment screw may be driven automatically or manually. Further, a micrometer or a linear actuator may be applied instead of the adjusting screw.

[0017]

According to the above invention, first, X
Since the adjusting means for the axis, the Y-axis direction, and the θ direction are arranged in a plane, the overall thickness of the device is reduced. In addition, when monitoring with a video system for positioning, a video camera or the like is provided above and below the base because the optical system path for capturing the image is configured to guide the optical image to the edge side of the base. not exist. For this reason, the work of mounting and dismounting the LCD becomes much easier than in the past, and the workability is improved. Also, the height of the entire table is reduced, making it easier for the operator to see. Furthermore, since the position where the probe is contacted is the same as the position where the pattern is imaged by the video camera, highly accurate contact can be performed.

[Brief description of drawings]

FIG. 1 is a plan view and a side view showing an embodiment of the present invention.

FIG. 2 is a plan view showing another embodiment of the present invention.

[Explanation of symbols]

100 ... Base, 200 ... Palette, 300 ... LCD,
101, 102 ... Plunger, 104, 106, 10
8 ... Adjusting screws, 401a, 401b ... Light introducing section.

Claims (1)

[Claims] A pallet 1. A inspection plate body is placed at a predetermined position, a base plane undergo movably on the upper surface of the pallet, by driving the pallet on the base from the edge direction, An adjusting means for adjusting the position in the X-axis direction, the Y-axis direction orthogonal to the X-axis direction, and the plane rotation direction, and the light introducing portion are arranged on the upper surface of the base, and the base is provided on the way.
Insert the light guide to the edge of the base,
In addition, by guiding this light output part to the camera part,
The state in which the position of the pallet is adjusted by the adjusting means is described above.
An optical system path that can be monitored by a monitor connected to the camera section .