JPS62176706U - - Google Patents

Info

Publication number
JPS62176706U
JPS62176706U JP6524986U JP6524986U JPS62176706U JP S62176706 U JPS62176706 U JP S62176706U JP 6524986 U JP6524986 U JP 6524986U JP 6524986 U JP6524986 U JP 6524986U JP S62176706 U JPS62176706 U JP S62176706U
Authority
JP
Japan
Prior art keywords
measured
laser beam
film
measuring device
optical splitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6524986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6524986U priority Critical patent/JPS62176706U/ja
Priority to KR1019870003914A priority patent/KR900003208B1/ko
Priority to CA000535948A priority patent/CA1292803C/en
Priority to EP87106268A priority patent/EP0243961B1/en
Priority to DE8787106268T priority patent/DE3777232D1/de
Priority to US07/043,711 priority patent/US4748331A/en
Publication of JPS62176706U publication Critical patent/JPS62176706U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP6524986U 1986-04-29 1986-04-29 Pending JPS62176706U (es)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP6524986U JPS62176706U (es) 1986-04-29 1986-04-29
KR1019870003914A KR900003208B1 (ko) 1986-04-29 1987-04-23 막(膜)두께의 측정장치
CA000535948A CA1292803C (en) 1986-04-29 1987-04-28 Film thickness measuring device
EP87106268A EP0243961B1 (en) 1986-04-29 1987-04-29 Film thickness measuring device
DE8787106268T DE3777232D1 (de) 1986-04-29 1987-04-29 Vorrichtung zum messen der schichtdicke.
US07/043,711 US4748331A (en) 1986-04-29 1987-04-29 Film thickness measuring device with signal averaging to compensate for roller eccentricity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6524986U JPS62176706U (es) 1986-04-29 1986-04-29

Publications (1)

Publication Number Publication Date
JPS62176706U true JPS62176706U (es) 1987-11-10

Family

ID=30902145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6524986U Pending JPS62176706U (es) 1986-04-29 1986-04-29

Country Status (1)

Country Link
JP (1) JPS62176706U (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01259206A (ja) * 1988-04-08 1989-10-16 Mitsubishi Electric Corp 膜厚測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01259206A (ja) * 1988-04-08 1989-10-16 Mitsubishi Electric Corp 膜厚測定装置

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