JPS62176706U - - Google Patents
Info
- Publication number
- JPS62176706U JPS62176706U JP6524986U JP6524986U JPS62176706U JP S62176706 U JPS62176706 U JP S62176706U JP 6524986 U JP6524986 U JP 6524986U JP 6524986 U JP6524986 U JP 6524986U JP S62176706 U JPS62176706 U JP S62176706U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- laser beam
- film
- measuring device
- optical splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6524986U JPS62176706U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-29 | 1986-04-29 | |
| KR1019870003914A KR900003208B1 (ko) | 1986-04-29 | 1987-04-23 | 막(膜)두께의 측정장치 |
| CA000535948A CA1292803C (en) | 1986-04-29 | 1987-04-28 | Film thickness measuring device |
| EP87106268A EP0243961B1 (en) | 1986-04-29 | 1987-04-29 | Film thickness measuring device |
| DE8787106268T DE3777232D1 (de) | 1986-04-29 | 1987-04-29 | Vorrichtung zum messen der schichtdicke. |
| US07/043,711 US4748331A (en) | 1986-04-29 | 1987-04-29 | Film thickness measuring device with signal averaging to compensate for roller eccentricity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6524986U JPS62176706U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-29 | 1986-04-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62176706U true JPS62176706U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-10 |
Family
ID=30902145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6524986U Pending JPS62176706U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-29 | 1986-04-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62176706U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01259206A (ja) * | 1988-04-08 | 1989-10-16 | Mitsubishi Electric Corp | 膜厚測定装置 |
-
1986
- 1986-04-29 JP JP6524986U patent/JPS62176706U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01259206A (ja) * | 1988-04-08 | 1989-10-16 | Mitsubishi Electric Corp | 膜厚測定装置 |