JPS6217549A - Clean room - Google Patents

Abstract

PURPOSE:To keep a proper pressure difference at all times to prevent contamination of the clean room and contrive reduction of cost for ventilating power by a method wherein a driving device, effecting the opening and closing of doors, is controlled by an interlocking device, which will never open other doors when one door is being opened. CONSTITUTION:When one stands before the (i)th automatic door among (n) sets of automatic doors 9 and a mat is trod, a limit switch (LSi1a) 31 is put ON, a relay (Ri1) 41 is operated and a geared motor 21 is operated to open the automatic door. When the opening door contacts with the limit switch (LSi3a) 32, the automatic door is stopped and when one leaves the mat, the relay (Ri3) is operated to convert the geared motor 21 and move the automatic door into closing direction. Subsequently, when the limit switch 33 is moved, the relay (Ri4) is operated and the rotation of the geared motor 21 is stopped when the automatic door is closed. At the same time, the relay (Ri5) is operated to release the interlocking of the other automatic doors.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a clean room for obtaining a clean space.

Prior Art A conventional clean room had a configuration as shown in FIG. In Figure 6, 1 is class 10000° room pressure Om
m A CI locker room, 2 is a class 5000° room pressure 1 mm Aq clean corridor, 3 is an air shower device installed between locker room 1 and clean corridor 2, 4 is a pay method clean room, class 1000 It consists of a worker passageway 6, a class 1o process zone 6, a class 100 working zone 7, and a class 5000 maintenance seam 78, and the room pressure is 2 BAq. Reference numeral 9 denotes a sliding type automatic entry/exit door installed between the clean corridor 2 and the worker passageway 6, and it is installed from the clean corridor 2 side to the worker passageway 6 side via the 1of'i person exit door. The mat 11 is a driving device for the entrance/exit door. 13 is maintenance zone 8 and class 10000, room pressure Omm
This is a swing type door provided between the Aq service passages 12.

In the clean room configured as described above, workers or visitors change into dust-free clothes in the locker room 1 and are showered with air using the air shower device 3.

After taking a shower, enter Clean Corridor 2. The worker further steps on the mat 1o located before and after the automatic door 9 for entering and leaving the room, and the automatic door 9 for entering and leaving the room is opened by the drive device 11 to enter and leave the room. Take up a position and work inside. On the other hand, people transporting chemicals, maintenance workers, etc. passed through the service passageway 12, opened the door 13, and entered the maintenance zone 8.

Problems to be Solved by the Invention In such a conventional configuration, workers often enter the clean room corridor 2 in a concentrated manner just before the start of work, open the entry/exit door 9, and attempt to enter the clean room 4. .

In such a case, a plurality of automatic entry/exit doors 9 are opened at the same time, and as a result, the pressure difference set between the clean room 4 with a low dust concentration and the clean corridor 2 with a high dust concentration increases. There is a problem in that the dust becomes smaller or becomes almost the same, causing contamination of the clean room 4 due to dust intrusion into the clean room 4 from the clean corridor 2 side.

In addition, in order to maintain an appropriate pressure difference even when all the automatic entrance/exit doors 9 are opened, a relief damper or the like is used to keep the automatic entrance/exit doors 9 open even when the automatic entrance/exit doors 9 are closed. It was necessary to reduce the pressure in the clean room corridor 2 by releasing the equivalent amount of leaked air. Therefore, there was a problem in that an unnecessarily large blower was required.

The present invention solves these problems by reducing the range of room pressure fluctuations caused by opening the door as much as possible, thereby maintaining an appropriate pressure difference at all times to prevent contamination within the clean room, and reducing the blowing power. The purpose is to keep costs low.

Means for Solving the Problem In order to solve this problem, the clean room of the present invention includes a plurality of entrance/exit doors provided on the partition wall that partitions spaces with different degrees of cleanliness and different room pressures. The drive device that opens and closes the doors is controlled by an interlock device that prevents other doors from opening if one door is open.

Function: With this configuration, the entrance/exit door used to enter and exit the clean room can be opened and closed independently.
Multiple doors will no longer open at the same time.

Embodiment An embodiment of the present invention will be explained based on FIGS. 1 to 4. Here, the same numbers are used for the same parts as in FIG. 5, and a description thereof will be omitted.

The drive device 11 of the automatic door 9 for entering and leaving the room includes a gear motor 21 and a shaft 7) 22 on the upper part of the automatic door 9, a pulley 23 mounted on the tip of the shaft 22, and a pulley 23 that controls the rotation of the pulley 23. It consists of a belt 27 for transmitting information to a pulley 26 provided in a lintel 26 provided at the lower end of the partition plate 24 of the clean room 4. 14 is an interlock device.

In Fig. 3, 31 is a mark y) Turns on/off the drive device 11 of the automatic door 9 for entering/exiting the room provided below 10.
32 is a limit switch that determines the end point when the automatic entry/exit door 9 moves; 33 is a limit switch for confirming that the automatic entry/exit door 9 is closed.

In FIG. 4, details of the interlock device 14 are shown. 41 is a relay coil section, and "Ri5' is the fifth relay of the ri-th automatic door for entrance/exit." 42 is a relay contact part, and "Rn4a" indicates the a contact of the fourth relay of the rnth automatic door 9 for entrance/exit. 43 is a switch of the interlock device 14.

The operation of the automatic door 9 for entering and exiting a clean room configured as described above will be explained. There are n automatic entrance/exit doors 9, and when you stand in front of the first automatic entrance/exit door 9 and turn to the ``Limi-Soto'' switch (LS5.
a) 31 enters, the relay (R, ) 41 operates, the gear motor (M, ) 21 operates, and the automatic door 9 for entry/exit is opened. When the automatic door 9 for entering and leaving the room that is being opened touches the limit switch (LS) 32, the automatic door 93a for entering and leaving the room stops, and when the person leaves the mart 1o, the relay (R) is activated.
is activated, the gear motor (Mi) 21 is reversed, the automatic entry/exit door 9 moves in the direction of closing, and the limit switch (LS) is activated.
i4a) When 33 is touched, it becomes completely closed. When the limit switch (LSi4a) 33 moves, the relay (
Ri4) is activated and the rotation of the gear motor (Mi) 21 is stopped when the automatic entry/exit door 9 is closed, and at the same time, the relay (Ri,) is activated to release the interlock of other automatic entrance/exit doors 9. .

Effects of the Invention As is clear from the above description of the embodiments, the present invention has a plurality of entry/exit doors, a drive device for the doors, and an interlock device for the doors, so that when the door is opened, By reducing the width of the chamber pressure fluctuation, an appropriate pressure difference is always maintained to prevent contamination within the clean room.In addition, in order to maintain an appropriate pressure difference, a large amount of air is released through a relief damper etc. when the door is closed. Since it is not necessary, the cost of blowing power can be kept low, and the effect is great.

[Brief explanation of the drawing]

Fig. 1 is a plan view of a clean room according to an embodiment of the present invention, Fig. 2 is a sectional view of an automatic door for coworkers leaving the room, Fig. 3 is a perspective view of an automatic door for coworkers leaving the room, and Fig. 4 is an automatic door for coworkers leaving the room. The door sequence circuit diagram, FIG. 5, is a plan view of a conventional clean room. 4...Clean room, 9...Room entrance/exit door, 11...Drive device, 14...Interface, link device. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 4-°-Clean)

Claims (1)

[Claims] A partition wall that partitions spaces with different degrees of cleanliness and different room pressures is provided with multiple doors for entry and exit, and the drive device that opens and closes these doors is an interface that does not open other doors when one door opens. A clean room with a configuration controlled by a locking device.