JPS62175077U - - Google Patents

Info

Publication number
JPS62175077U
JPS62175077U JP6449986U JP6449986U JPS62175077U JP S62175077 U JPS62175077 U JP S62175077U JP 6449986 U JP6449986 U JP 6449986U JP 6449986 U JP6449986 U JP 6449986U JP S62175077 U JPS62175077 U JP S62175077U
Authority
JP
Japan
Prior art keywords
quartz glass
crucible
transparent
cylindrical body
translucent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6449986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0431254Y2 (un
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986064499U priority Critical patent/JPH0431254Y2/ja
Publication of JPS62175077U publication Critical patent/JPS62175077U/ja
Application granted granted Critical
Publication of JPH0431254Y2 publication Critical patent/JPH0431254Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Glass Melting And Manufacturing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1986064499U 1986-04-28 1986-04-28 Expired JPH0431254Y2 (un)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986064499U JPH0431254Y2 (un) 1986-04-28 1986-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986064499U JPH0431254Y2 (un) 1986-04-28 1986-04-28

Publications (2)

Publication Number Publication Date
JPS62175077U true JPS62175077U (un) 1987-11-06
JPH0431254Y2 JPH0431254Y2 (un) 1992-07-28

Family

ID=30900710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986064499U Expired JPH0431254Y2 (un) 1986-04-28 1986-04-28

Country Status (1)

Country Link
JP (1) JPH0431254Y2 (un)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01148782A (ja) * 1987-12-03 1989-06-12 Shin Etsu Handotai Co Ltd 単結晶引き上げ用石英ルツボ
JP2003081689A (ja) * 2001-09-10 2003-03-19 Kusuwa Kuorutsu:Kk 合成石英ルツボおよび製造方法
JP2009132616A (ja) * 2009-03-16 2009-06-18 Japan Siper Quarts Corp シリコン単結晶の引き上げを行う方法
JP2011121842A (ja) * 2009-12-14 2011-06-23 Japan Siper Quarts Corp 単結晶引上げ用ルツボ及び単結晶引上げ方法
JP2011121843A (ja) * 2009-12-14 2011-06-23 Japan Siper Quarts Corp 単結晶引上げ用ルツボ及び単結晶引上げ方法
JP2012101946A (ja) * 2010-11-05 2012-05-31 Shin Etsu Handotai Co Ltd 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
WO2012140816A1 (ja) * 2011-04-11 2012-10-18 信越半導体株式会社 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
JP2012218980A (ja) * 2011-04-11 2012-11-12 Shin Etsu Handotai Co Ltd 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
JP2013224224A (ja) * 2012-04-19 2013-10-31 Shin Etsu Handotai Co Ltd シリコン単結晶の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59213697A (ja) * 1983-05-20 1984-12-03 Toshiba Ceramics Co Ltd 単結晶半導体引上装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59213697A (ja) * 1983-05-20 1984-12-03 Toshiba Ceramics Co Ltd 単結晶半導体引上装置

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01148782A (ja) * 1987-12-03 1989-06-12 Shin Etsu Handotai Co Ltd 単結晶引き上げ用石英ルツボ
JP2003081689A (ja) * 2001-09-10 2003-03-19 Kusuwa Kuorutsu:Kk 合成石英ルツボおよび製造方法
JP2009132616A (ja) * 2009-03-16 2009-06-18 Japan Siper Quarts Corp シリコン単結晶の引き上げを行う方法
JP2011121842A (ja) * 2009-12-14 2011-06-23 Japan Siper Quarts Corp 単結晶引上げ用ルツボ及び単結晶引上げ方法
JP2011121843A (ja) * 2009-12-14 2011-06-23 Japan Siper Quarts Corp 単結晶引上げ用ルツボ及び単結晶引上げ方法
CN103201226A (zh) * 2010-11-05 2013-07-10 信越半导体股份有限公司 石英玻璃坩埚及其制造方法、以及单晶硅的制造方法
JP2012101946A (ja) * 2010-11-05 2012-05-31 Shin Etsu Handotai Co Ltd 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
CN103201226B (zh) * 2010-11-05 2015-08-05 信越半导体股份有限公司 石英玻璃坩埚及其制造方法、以及单晶硅的制造方法
US9376336B2 (en) 2010-11-05 2016-06-28 Shin-Etsu Handotai Co., Ltd. Quartz glass crucible, method for producing the same, and method for producing silicon single crystal
WO2012140816A1 (ja) * 2011-04-11 2012-10-18 信越半導体株式会社 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
JP2012218979A (ja) * 2011-04-11 2012-11-12 Shin Etsu Handotai Co Ltd 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
JP2012218980A (ja) * 2011-04-11 2012-11-12 Shin Etsu Handotai Co Ltd 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
JP2013224224A (ja) * 2012-04-19 2013-10-31 Shin Etsu Handotai Co Ltd シリコン単結晶の製造方法

Also Published As

Publication number Publication date
JPH0431254Y2 (un) 1992-07-28

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