JPS62175077U - - Google Patents
Info
- Publication number
- JPS62175077U JPS62175077U JP6449986U JP6449986U JPS62175077U JP S62175077 U JPS62175077 U JP S62175077U JP 6449986 U JP6449986 U JP 6449986U JP 6449986 U JP6449986 U JP 6449986U JP S62175077 U JPS62175077 U JP S62175077U
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- crucible
- transparent
- cylindrical body
- translucent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 239000013078 crystal Substances 0.000 claims description 2
Landscapes
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986064499U JPH0431254Y2 (un) | 1986-04-28 | 1986-04-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986064499U JPH0431254Y2 (un) | 1986-04-28 | 1986-04-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62175077U true JPS62175077U (un) | 1987-11-06 |
JPH0431254Y2 JPH0431254Y2 (un) | 1992-07-28 |
Family
ID=30900710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986064499U Expired JPH0431254Y2 (un) | 1986-04-28 | 1986-04-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0431254Y2 (un) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01148782A (ja) * | 1987-12-03 | 1989-06-12 | Shin Etsu Handotai Co Ltd | 単結晶引き上げ用石英ルツボ |
JP2003081689A (ja) * | 2001-09-10 | 2003-03-19 | Kusuwa Kuorutsu:Kk | 合成石英ルツボおよび製造方法 |
JP2009132616A (ja) * | 2009-03-16 | 2009-06-18 | Japan Siper Quarts Corp | シリコン単結晶の引き上げを行う方法 |
JP2011121842A (ja) * | 2009-12-14 | 2011-06-23 | Japan Siper Quarts Corp | 単結晶引上げ用ルツボ及び単結晶引上げ方法 |
JP2011121843A (ja) * | 2009-12-14 | 2011-06-23 | Japan Siper Quarts Corp | 単結晶引上げ用ルツボ及び単結晶引上げ方法 |
JP2012101946A (ja) * | 2010-11-05 | 2012-05-31 | Shin Etsu Handotai Co Ltd | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
WO2012140816A1 (ja) * | 2011-04-11 | 2012-10-18 | 信越半導体株式会社 | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
JP2012218980A (ja) * | 2011-04-11 | 2012-11-12 | Shin Etsu Handotai Co Ltd | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
JP2013224224A (ja) * | 2012-04-19 | 2013-10-31 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59213697A (ja) * | 1983-05-20 | 1984-12-03 | Toshiba Ceramics Co Ltd | 単結晶半導体引上装置 |
-
1986
- 1986-04-28 JP JP1986064499U patent/JPH0431254Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59213697A (ja) * | 1983-05-20 | 1984-12-03 | Toshiba Ceramics Co Ltd | 単結晶半導体引上装置 |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01148782A (ja) * | 1987-12-03 | 1989-06-12 | Shin Etsu Handotai Co Ltd | 単結晶引き上げ用石英ルツボ |
JP2003081689A (ja) * | 2001-09-10 | 2003-03-19 | Kusuwa Kuorutsu:Kk | 合成石英ルツボおよび製造方法 |
JP2009132616A (ja) * | 2009-03-16 | 2009-06-18 | Japan Siper Quarts Corp | シリコン単結晶の引き上げを行う方法 |
JP2011121842A (ja) * | 2009-12-14 | 2011-06-23 | Japan Siper Quarts Corp | 単結晶引上げ用ルツボ及び単結晶引上げ方法 |
JP2011121843A (ja) * | 2009-12-14 | 2011-06-23 | Japan Siper Quarts Corp | 単結晶引上げ用ルツボ及び単結晶引上げ方法 |
CN103201226A (zh) * | 2010-11-05 | 2013-07-10 | 信越半导体股份有限公司 | 石英玻璃坩埚及其制造方法、以及单晶硅的制造方法 |
JP2012101946A (ja) * | 2010-11-05 | 2012-05-31 | Shin Etsu Handotai Co Ltd | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
CN103201226B (zh) * | 2010-11-05 | 2015-08-05 | 信越半导体股份有限公司 | 石英玻璃坩埚及其制造方法、以及单晶硅的制造方法 |
US9376336B2 (en) | 2010-11-05 | 2016-06-28 | Shin-Etsu Handotai Co., Ltd. | Quartz glass crucible, method for producing the same, and method for producing silicon single crystal |
WO2012140816A1 (ja) * | 2011-04-11 | 2012-10-18 | 信越半導体株式会社 | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
JP2012218979A (ja) * | 2011-04-11 | 2012-11-12 | Shin Etsu Handotai Co Ltd | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
JP2012218980A (ja) * | 2011-04-11 | 2012-11-12 | Shin Etsu Handotai Co Ltd | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
JP2013224224A (ja) * | 2012-04-19 | 2013-10-31 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0431254Y2 (un) | 1992-07-28 |